diff --git a/arch/arm/src/max326xx/common/max326_icc.c b/arch/arm/src/max326xx/common/max326_icc.c
index b855825bc7..7f2ef00877 100644
--- a/arch/arm/src/max326xx/common/max326_icc.c
+++ b/arch/arm/src/max326xx/common/max326_icc.c
@@ -44,6 +44,7 @@
 #include <assert.h>
 
 #include "up_arch.h"
+#include "hardware/max326_icc.h"
 #include "max326_periphclks.h"
 #include "max326_icc.h"
 
diff --git a/arch/arm/src/max326xx/chip/max32620_30_memorymap.h b/arch/arm/src/max326xx/hardware/max32620_30_memorymap.h
similarity index 96%
rename from arch/arm/src/max326xx/chip/max32620_30_memorymap.h
rename to arch/arm/src/max326xx/hardware/max32620_30_memorymap.h
index b64a323a2c..d95f394f5e 100644
--- a/arch/arm/src/max326xx/chip/max32620_30_memorymap.h
+++ b/arch/arm/src/max326xx/hardware/max32620_30_memorymap.h
@@ -1,5 +1,5 @@
 /********************************************************************************************
- * arch/arm/src/max326xx/chip/max32620_30_memorymap.h
+ * arch/arm/src/max326xx/hardware/max32620_30_memorymap.h
  *
  *   Copyright (C) 2018 Gregory Nutt. All rights reserved.
  *   Author: Gregory Nutt <gnutt@nuttx.org>
@@ -33,8 +33,8 @@
  *
  ********************************************************************************************/
 
-#ifndef __ARCH_ARM_SRC_MAX326XX_CHIP_MAX32620_30_MEMORYMAP_H
-#define __ARCH_ARM_SRC_MAX326XX_CHIP_MAX32620_30_MEMORYMAP_H
+#ifndef __ARCH_ARM_SRC_MAX326XX_HARDWARE_MAX32620_30_MEMORYMAP_H
+#define __ARCH_ARM_SRC_MAX326XX_HARDWARE_MAX32620_30_MEMORYMAP_H
 
 /********************************************************************************************
  * Included Files
@@ -132,4 +132,4 @@
  * Public Functions
  ********************************************************************************************/
 
-#endif /* __ARCH_ARM_SRC_MAX326XX_CHIP_MAX32620_30_MEMORYMAP_H */
+#endif /* __ARCH_ARM_SRC_MAX326XX_HARDWARE_MAX32620_30_MEMORYMAP_H */
diff --git a/arch/arm/src/max326xx/chip/max32660_flc.h b/arch/arm/src/max326xx/hardware/max32660_flc.h
similarity index 95%
rename from arch/arm/src/max326xx/chip/max32660_flc.h
rename to arch/arm/src/max326xx/hardware/max32660_flc.h
index c4a6e822a3..919763b5ed 100644
--- a/arch/arm/src/max326xx/chip/max32660_flc.h
+++ b/arch/arm/src/max326xx/hardware/max32660_flc.h
@@ -1,5 +1,5 @@
 /************************************************************************************
- * arch/arm/src/max326xx/chip/max32660_flc.h
+ * arch/arm/src/max326xx/hardware/max32660_flc.h
  *
  *   Copyright (C) 2018 Gregory Nutt. All rights reserved.
  *   Author: Gregory Nutt <gnutt@nuttx.org>
@@ -33,15 +33,15 @@
  *
  ************************************************************************************/
 
-#ifndef __ARCH_ARM_SRC_MAX326XX_CHIP_MAX32660_FLC_H
-#define __ARCH_ARM_SRC_MAX326XX_CHIP_MAX32660_FLC_H
+#ifndef __ARCH_ARM_SRC_MAX326XX_HARDWARE_MAX32660_FLC_H
+#define __ARCH_ARM_SRC_MAX326XX_HARDWARE_MAX32660_FLC_H
 
 /************************************************************************************
  * Included Files
  ************************************************************************************/
 
 #include <nuttx/config.h>
-#include "chip/max326_memorymap.h"
+#include "hardware/max326_memorymap.h"
 
 /************************************************************************************
  * Pre-processor Definitions
@@ -111,4 +111,4 @@
 /* Flash Controller Data Register 2 (32-bit FLASH data) */
 /* Flash Controller Data Register 3 (32-bit FLASH data) */
 
-#endif /* __ARCH_ARM_SRC_MAX326XX_CHIP_MAX32660_FLC_H */
+#endif /* __ARCH_ARM_SRC_MAX326XX_HARDWARE_MAX32660_FLC_H */
diff --git a/arch/arm/src/max326xx/chip/max32660_gpio.h b/arch/arm/src/max326xx/hardware/max32660_gpio.h
similarity index 97%
rename from arch/arm/src/max326xx/chip/max32660_gpio.h
rename to arch/arm/src/max326xx/hardware/max32660_gpio.h
index 4dce5ee728..88d7315398 100644
--- a/arch/arm/src/max326xx/chip/max32660_gpio.h
+++ b/arch/arm/src/max326xx/hardware/max32660_gpio.h
@@ -1,5 +1,5 @@
 /************************************************************************************
- * arch/arm/src/max326xx/chip/max32660_gpio.h
+ * arch/arm/src/max326xx/hardware/max32660_gpio.h
  *
  *   Copyright (C) 2018 Gregory Nutt. All rights reserved.
  *   Author: Gregory Nutt <gnutt@nuttx.org>
@@ -33,15 +33,15 @@
  *
  ************************************************************************************/
 
-#ifndef __ARCH_ARM_SRC_MAX326XX_CHIP_MAX32660_GPIO_H
-#define __ARCH_ARM_SRC_MAX326XX_CHIP_MAX32660_GPIO_H
+#ifndef __ARCH_ARM_SRC_MAX326XX_HARDWARE_MAX32660_GPIO_H
+#define __ARCH_ARM_SRC_MAX326XX_HARDWARE_MAX32660_GPIO_H
 
 /************************************************************************************
  * Included Files
  ************************************************************************************/
 
 #include <nuttx/config.h>
-#include "chip/max326_memorymap.h"
+#include "hardware/max326_memorymap.h"
 
 /************************************************************************************
  * Pre-processor Definitions
@@ -184,4 +184,4 @@
                                                    * Resistor Select:
                                                    * n=0-1, 4-7, 10-13: Pullup select */
 
-#endif /* __ARCH_ARM_SRC_MAX326XX_CHIP_MAX32660_GPIO_H */
+#endif /* __ARCH_ARM_SRC_MAX326XX_HARDWARE_MAX32660_GPIO_H */
diff --git a/arch/arm/src/max326xx/chip/max32660_i2c.h b/arch/arm/src/max326xx/hardware/max32660_i2c.h
similarity index 98%
rename from arch/arm/src/max326xx/chip/max32660_i2c.h
rename to arch/arm/src/max326xx/hardware/max32660_i2c.h
index 7daa9f046a..68233b6136 100644
--- a/arch/arm/src/max326xx/chip/max32660_i2c.h
+++ b/arch/arm/src/max326xx/hardware/max32660_i2c.h
@@ -1,5 +1,5 @@
 /************************************************************************************
- * arch/arm/src/max326xx/chip/max32660_i2c.h
+ * arch/arm/src/max326xx/hardware/max32660_i2c.h
  *
  *   Copyright (C) 2018 Gregory Nutt. All rights reserved.
  *   Author: Gregory Nutt <gnutt@nuttx.org>
@@ -33,15 +33,15 @@
  *
  ************************************************************************************/
 
-#ifndef __ARCH_ARM_SRC_MAX326XX_CHIP_MAX32660_I2C_H
-#define __ARCH_ARM_SRC_MAX326XX_CHIP_MAX32660_I2C_H
+#ifndef __ARCH_ARM_SRC_MAX326XX_HARDWARE_MAX32660_I2C_H
+#define __ARCH_ARM_SRC_MAX326XX_HARDWARE_MAX32660_I2C_H
 
 /************************************************************************************
  * Included Files
  ************************************************************************************/
 
 #include <nuttx/config.h>
-#include "chip/max326_memorymap.h"
+#include "hardware/max326_memorymap.h"
 
 /************************************************************************************
  * Pre-processor Definitions
@@ -298,4 +298,4 @@
 #define I2C_DMA_TXEN                (1 << 0)  /* Bit 0:  TX DMA Channel Enable */
 #define I2C_DMA_RXEN                (1 << 1)  /* Bit 1:  RX DMA Channel Enable */
 
-#endif /* __ARCH_ARM_SRC_MAX326XX_CHIP_MAX32660_I2C_H */
+#endif /* __ARCH_ARM_SRC_MAX326XX_HARDWARE_MAX32660_I2C_H */
diff --git a/arch/arm/src/max326xx/chip/max32660_memorymap.h b/arch/arm/src/max326xx/hardware/max32660_memorymap.h
similarity index 94%
rename from arch/arm/src/max326xx/chip/max32660_memorymap.h
rename to arch/arm/src/max326xx/hardware/max32660_memorymap.h
index 6d9fc8ca5b..9e09744405 100644
--- a/arch/arm/src/max326xx/chip/max32660_memorymap.h
+++ b/arch/arm/src/max326xx/hardware/max32660_memorymap.h
@@ -1,5 +1,5 @@
 /********************************************************************************************
- * arch/arm/src/max326xx/chip/max32660_memorymap.h
+ * arch/arm/src/max326xx/hardware/max32660_memorymap.h
  *
  *   Copyright (C) 2018 Gregory Nutt. All rights reserved.
  *   Author: Gregory Nutt <gnutt@nuttx.org>
@@ -33,8 +33,8 @@
  *
  ********************************************************************************************/
 
-#ifndef __ARCH_ARM_SRC_MAX326XX_CHIP_MAX32660_MEMORYMAP_H
-#define __ARCH_ARM_SRC_MAX326XX_CHIP_MAX32660_MEMORYMAP_H
+#ifndef __ARCH_ARM_SRC_MAX326XX_HARDWARE_MAX32660_MEMORYMAP_H
+#define __ARCH_ARM_SRC_MAX326XX_HARDWARE_MAX32660_MEMORYMAP_H
 
 /********************************************************************************************
  * Included Files
@@ -89,4 +89,4 @@
  * Public Functions
  ********************************************************************************************/
 
-#endif /* __ARCH_ARM_SRC_MAX326XX_CHIP_MAX32660_MEMORYMAP_H */
+#endif /* __ARCH_ARM_SRC_MAX326XX_HARDWARE_MAX32660_MEMORYMAP_H */
diff --git a/arch/arm/src/max326xx/chip/max32660_pinmux.h b/arch/arm/src/max326xx/hardware/max32660_pinmux.h
similarity index 96%
rename from arch/arm/src/max326xx/chip/max32660_pinmux.h
rename to arch/arm/src/max326xx/hardware/max32660_pinmux.h
index bbf4e42930..6b8f264972 100644
--- a/arch/arm/src/max326xx/chip/max32660_pinmux.h
+++ b/arch/arm/src/max326xx/hardware/max32660_pinmux.h
@@ -1,5 +1,5 @@
 /************************************************************************************
- * arch/arm/src/max326xx/chip/max32660_pinmux.h
+ * arch/arm/src/max326xx/hardware/max32660_pinmux.h
  *
  *   Copyright (C) 2018 Gregory Nutt. All rights reserved.
  *   Author: Gregory Nutt <gnutt@nuttx.org>
@@ -33,8 +33,8 @@
  *
  ************************************************************************************/
 
-#ifndef __ARCH_ARM_SRC_MAX326XX_CHIP_MAX32660_PINMUX_H
-#define __ARCH_ARM_SRC_MAX326XX_CHIP_MAX32660_PINMUX_H
+#ifndef __ARCH_ARM_SRC_MAX326XX_HARDWARE_MAX32660_PINMUX_H
+#define __ARCH_ARM_SRC_MAX326XX_HARDWARE_MAX32660_PINMUX_H
 
 /************************************************************************************
  * Included Files
@@ -131,4 +131,4 @@
 #define GPIO_UART1_TX_2  (GPIO_ALT3 | GPIO_PORT0 | GPIO_PIN6)
 #define GPIO_UART1_TX_3  (GPIO_ALT2 | GPIO_PORT0 | GPIO_PIN10) /* 20-TQFN only */
 
-#endif /* __ARCH_ARM_SRC_MAX326XX_CHIP_MAX32660_PINMUX_H */
+#endif /* __ARCH_ARM_SRC_MAX326XX_HARDWARE_MAX32660_PINMUX_H */
diff --git a/arch/arm/src/max326xx/chip/max32660_rtc.h b/arch/arm/src/max326xx/hardware/max32660_rtc.h
similarity index 96%
rename from arch/arm/src/max326xx/chip/max32660_rtc.h
rename to arch/arm/src/max326xx/hardware/max32660_rtc.h
index 90e866ee7a..b6fa75380b 100644
--- a/arch/arm/src/max326xx/chip/max32660_rtc.h
+++ b/arch/arm/src/max326xx/hardware/max32660_rtc.h
@@ -1,5 +1,5 @@
 /************************************************************************************
- * arch/arm/src/max326xx/chip/max32660_rtc.h
+ * arch/arm/src/max326xx/hardware/max32660_rtc.h
  *
  *   Copyright (C) 2018 Gregory Nutt. All rights reserved.
  *   Author: Gregory Nutt <gnutt@nuttx.org>
@@ -33,15 +33,15 @@
  *
  ************************************************************************************/
 
-#ifndef __ARCH_ARM_SRC_MAX326XX_CHIP_MAX32660_RTC_H
-#define __ARCH_ARM_SRC_MAX326XX_CHIP_MAX32660_RTC_H
+#ifndef __ARCH_ARM_SRC_MAX326XX_HARDWARE_MAX32660_RTC_H
+#define __ARCH_ARM_SRC_MAX326XX_HARDWARE_MAX32660_RTC_H
 
 /************************************************************************************
  * Included Files
  ************************************************************************************/
 
 #include <nuttx/config.h>
-#include "chip/max326_memorymap.h"
+#include "hardware/max326_memorymap.h"
 
 /************************************************************************************
  * Pre-processor Definitions
@@ -124,4 +124,4 @@
 #define RTC_OSCCTRL_BYPASS        (1 << 4)  /* Bit 4:  RTC Crystal Bypass */
 #define RTC_OSCCTRL_32KOUT        (1 << 5)  /* Bit 5:  RTC Square Wave Output */
 
-#endif /* __ARCH_ARM_SRC_MAX326XX_CHIP_MAX32660_RTC_H */
+#endif /* __ARCH_ARM_SRC_MAX326XX_HARDWARE_MAX32660_RTC_H */
diff --git a/arch/arm/src/max326xx/chip/max32660_spi.h b/arch/arm/src/max326xx/hardware/max32660_spi.h
similarity index 97%
rename from arch/arm/src/max326xx/chip/max32660_spi.h
rename to arch/arm/src/max326xx/hardware/max32660_spi.h
index 2127d29b68..6a5d3769b2 100644
--- a/arch/arm/src/max326xx/chip/max32660_spi.h
+++ b/arch/arm/src/max326xx/hardware/max32660_spi.h
@@ -1,5 +1,5 @@
 /************************************************************************************
- * arch/arm/src/max326xx/chip/max32660_spi.h
+ * arch/arm/src/max326xx/hardware/max32660_spi.h
  *
  *   Copyright (C) 2018 Gregory Nutt. All rights reserved.
  *   Author: Gregory Nutt <gnutt@nuttx.org>
@@ -33,15 +33,15 @@
  *
  ************************************************************************************/
 
-#ifndef __ARCH_ARM_SRC_MAX326XX_CHIP_MAX32660_SPI_H
-#define __ARCH_ARM_SRC_MAX326XX_CHIP_MAX32660_SPI_H
+#ifndef __ARCH_ARM_SRC_MAX326XX_HARDWARE_MAX32660_SPI_H
+#define __ARCH_ARM_SRC_MAX326XX_HARDWARE_MAX32660_SPI_H
 
 /************************************************************************************
  * Included Files
  ************************************************************************************/
 
 #include <nuttx/config.h>
-#include "chip/max326_memorymap.h"
+#include "hardware/max326_memorymap.h"
 
 /************************************************************************************
  * Pre-processor Definitions
@@ -195,4 +195,4 @@
 
 #define SPI_STAT_BUSY               (1 << 0)  /* Bit 0:  SPI Active Status */
 
-#endif /* __ARCH_ARM_SRC_MAX326XX_CHIP_MAX32660_SPI_H */
+#endif /* __ARCH_ARM_SRC_MAX326XX_HARDWARE_MAX32660_SPI_H */
diff --git a/arch/arm/src/max326xx/chip/max32660_spimss.h b/arch/arm/src/max326xx/hardware/max32660_spimss.h
similarity index 96%
rename from arch/arm/src/max326xx/chip/max32660_spimss.h
rename to arch/arm/src/max326xx/hardware/max32660_spimss.h
index 4b6d2f63a6..2331659f6f 100644
--- a/arch/arm/src/max326xx/chip/max32660_spimss.h
+++ b/arch/arm/src/max326xx/hardware/max32660_spimss.h
@@ -1,5 +1,5 @@
 /************************************************************************************
- * arch/arm/src/max326xx/chip/max32660_spimss.h
+ * arch/arm/src/max326xx/hardware/max32660_spimss.h
  *
  *   Copyright (C) 2018 Gregory Nutt. All rights reserved.
  *   Author: Gregory Nutt <gnutt@nuttx.org>
@@ -33,15 +33,15 @@
  *
  ************************************************************************************/
 
-#ifndef __ARCH_ARM_SRC_MAX326XX_CHIP_MAX32660_SPIMSS_H
-#define __ARCH_ARM_SRC_MAX326XX_CHIP_MAX32660_SPIMSS_H
+#ifndef __ARCH_ARM_SRC_MAX326XX_HARDWARE_MAX32660_SPIMSS_H
+#define __ARCH_ARM_SRC_MAX326XX_HARDWARE_MAX32660_SPIMSS_H
 
 /************************************************************************************
  * Included Files
  ************************************************************************************/
 
 #include <nuttx/config.h>
-#include "chip/max326_memorymap.h"
+#include "hardware/max326_memorymap.h"
 
 /************************************************************************************
  * Pre-processor Definitions
@@ -138,4 +138,4 @@
 #define SPIMSS_I2SCTRL_I2SMONO        (1 << 3)  /* Bit 3:  I2S Monophonic Audio Mode */
 #define SPIMSS_I2SCTRL_I2SLJ          (1 << 4)  /* Bit 4:  I2S Left Justify */
 
-#endif /* __ARCH_ARM_SRC_MAX326XX_CHIP_MAX32660_SPIMSS_H */
+#endif /* __ARCH_ARM_SRC_MAX326XX_HARDWARE_MAX32660_SPIMSS_H */
diff --git a/arch/arm/src/max326xx/chip/max32660_tmr.h b/arch/arm/src/max326xx/hardware/max32660_tmr.h
similarity index 96%
rename from arch/arm/src/max326xx/chip/max32660_tmr.h
rename to arch/arm/src/max326xx/hardware/max32660_tmr.h
index 4d99e6eb85..32079c32b4 100644
--- a/arch/arm/src/max326xx/chip/max32660_tmr.h
+++ b/arch/arm/src/max326xx/hardware/max32660_tmr.h
@@ -1,5 +1,5 @@
 /************************************************************************************
- * arch/arm/src/max326xx/chip/max32660_tmr.h
+ * arch/arm/src/max326xx/hardware/max32660_tmr.h
  *
  *   Copyright (C) 2018 Gregory Nutt. All rights reserved.
  *   Author: Gregory Nutt <gnutt@nuttx.org>
@@ -33,15 +33,15 @@
  *
  ************************************************************************************/
 
-#ifndef __ARCH_ARM_SRC_MAX326XX_CHIP_MAX32660_TMR_H
-#define __ARCH_ARM_SRC_MAX326XX_CHIP_MAX32660_TMR_H
+#ifndef __ARCH_ARM_SRC_MAX326XX_HARDWARE_MAX32660_TMR_H
+#define __ARCH_ARM_SRC_MAX326XX_HARDWARE_MAX32660_TMR_H
 
 /************************************************************************************
  * Included Files
  ************************************************************************************/
 
 #include <nuttx/config.h>
-#include "chip/max326_memorymap.h"
+#include "hardware/max326_memorymap.h"
 
 /************************************************************************************
  * Pre-processor Definitions
@@ -127,4 +127,4 @@
 #define TMR_CN_NOLLPOL              (1 << 11) /* Bit 11: PWM Output phase A' Polarity */
 #define TMR_CN_PWMCKBD              (1 << 12) /* Bit 12: PWM Output phase A' Disable */
 
-#endif /* __ARCH_ARM_SRC_MAX326XX_CHIP_MAX32660_TMR_H */
+#endif /* __ARCH_ARM_SRC_MAX326XX_HARDWARE_MAX32660_TMR_H */
diff --git a/arch/arm/src/max326xx/chip/max32660_uart.h b/arch/arm/src/max326xx/hardware/max32660_uart.h
similarity index 97%
rename from arch/arm/src/max326xx/chip/max32660_uart.h
rename to arch/arm/src/max326xx/hardware/max32660_uart.h
index 771b275b0b..5c205af892 100644
--- a/arch/arm/src/max326xx/chip/max32660_uart.h
+++ b/arch/arm/src/max326xx/hardware/max32660_uart.h
@@ -1,5 +1,5 @@
 /************************************************************************************
- * arch/arm/src/max326xx/chip/max32660_uart.h
+ * arch/arm/src/max326xx/hardware/max32660_uart.h
  *
  *   Copyright (C) 2018 Gregory Nutt. All rights reserved.
  *   Author: Gregory Nutt <gnutt@nuttx.org>
@@ -33,15 +33,15 @@
  *
  ************************************************************************************/
 
-#ifndef __ARCH_ARM_SRC_MAX326XX_CHIP_MAX32660_UART_H
-#define __ARCH_ARM_SRC_MAX326XX_CHIP_MAX32660_UART_H
+#ifndef __ARCH_ARM_SRC_MAX326XX_HARDWARE_MAX32660_UART_H
+#define __ARCH_ARM_SRC_MAX326XX_HARDWARE_MAX32660_UART_H
 
 /************************************************************************************
  * Included Files
  ************************************************************************************/
 
 #include <nuttx/config.h>
-#include "chip/max326_memorymap.h"
+#include "hardware/max326_memorymap.h"
 
 /************************************************************************************
  * Pre-processor Definitions
@@ -197,4 +197,4 @@
 
 #define UART_TXFIFO_MASK            (0xff)    /* Bits 0-7: TX FIFO Data Output Peek Register */
 
-#endif /* __ARCH_ARM_SRC_MAX326XX_CHIP_MAX32660_UART_H */
+#endif /* __ARCH_ARM_SRC_MAX326XX_HARDWARE_MAX32660_UART_H */
diff --git a/arch/arm/src/max326xx/chip/max32660_wdt.h b/arch/arm/src/max326xx/hardware/max32660_wdt.h
similarity index 96%
rename from arch/arm/src/max326xx/chip/max32660_wdt.h
rename to arch/arm/src/max326xx/hardware/max32660_wdt.h
index a705556323..845705ceda 100644
--- a/arch/arm/src/max326xx/chip/max32660_wdt.h
+++ b/arch/arm/src/max326xx/hardware/max32660_wdt.h
@@ -1,5 +1,5 @@
 /************************************************************************************
- * arch/arm/src/max326xx/chip/max32660_wdt.h
+ * arch/arm/src/max326xx/hardware/max32660_wdt.h
  *
  *   Copyright (C) 2018 Gregory Nutt. All rights reserved.
  *   Author: Gregory Nutt <gnutt@nuttx.org>
@@ -33,15 +33,15 @@
  *
  ************************************************************************************/
 
-#ifndef __ARCH_ARM_SRC_MAX326XX_CHIP_MAX32660_WDT_H
-#define __ARCH_ARM_SRC_MAX326XX_CHIP_MAX32660_WDT_H
+#ifndef __ARCH_ARM_SRC_MAX326XX_HARDWARE_MAX32660_WDT_H
+#define __ARCH_ARM_SRC_MAX326XX_HARDWARE_MAX32660_WDT_H
 
 /************************************************************************************
  * Included Files
  ************************************************************************************/
 
 #include <nuttx/config.h>
-#include "chip/max326_memorymap.h"
+#include "hardware/max326_memorymap.h"
 
 /************************************************************************************
  * Pre-processor Definitions
@@ -110,4 +110,4 @@
 #  define WDT0_RST_SEQ1             (0xa5 << WDT0_RST_SHIFT)
 #  define WDT0_RST_SEQ2             (0x5a << WDT0_RST_SHIFT)
 
-#endif /* __ARCH_ARM_SRC_MAX326XX_CHIP_MAX32660_WDT_H */
+#endif /* __ARCH_ARM_SRC_MAX326XX_HARDWARE_MAX32660_WDT_H */
diff --git a/arch/arm/src/max326xx/chip/max326_dma.h b/arch/arm/src/max326xx/hardware/max326_dma.h
similarity index 98%
rename from arch/arm/src/max326xx/chip/max326_dma.h
rename to arch/arm/src/max326xx/hardware/max326_dma.h
index d08f26156d..43e6c2627c 100644
--- a/arch/arm/src/max326xx/chip/max326_dma.h
+++ b/arch/arm/src/max326xx/hardware/max326_dma.h
@@ -1,5 +1,5 @@
 /************************************************************************************
- * arch/arm/src/max326xx/chip/max326_dma.h
+ * arch/arm/src/max326xx/hardware/max326_dma.h
  *
  *   Copyright (C) 2018 Gregory Nutt. All rights reserved.
  *   Author: Gregory Nutt <gnutt@nuttx.org>
@@ -33,15 +33,15 @@
  *
  ************************************************************************************/
 
-#ifndef __ARCH_ARM_SRC_MAX326XX_CHIP_MAX326_DMA_H
-#define __ARCH_ARM_SRC_MAX326XX_CHIP_MAX326_DMA_H
+#ifndef __ARCH_ARM_SRC_MAX326XX_HARDWARE_MAX326_DMA_H
+#define __ARCH_ARM_SRC_MAX326XX_HARDWARE_MAX326_DMA_H
 
 /************************************************************************************
  * Included Files
  ************************************************************************************/
 
 #include <nuttx/config.h>
-#include "chip/max326_memorymap.h"
+#include "hardware/max326_memorymap.h"
 
 /************************************************************************************
  * Pre-processor Definitions
@@ -275,4 +275,4 @@
                                                   *            Value */
 #define DMACH_CNTRLD_RLDEN          (1 << 31)    /* Bit 31: Reload Enable */
 
-#endif /* __ARCH_ARM_SRC_MAX326XX_CHIP_MAX326_DMA_H */
+#endif /* __ARCH_ARM_SRC_MAX326XX_HARDWARE_MAX326_DMA_H */
diff --git a/arch/arm/src/max326xx/chip/max326_fcr.h b/arch/arm/src/max326xx/hardware/max326_fcr.h
similarity index 92%
rename from arch/arm/src/max326xx/chip/max326_fcr.h
rename to arch/arm/src/max326xx/hardware/max326_fcr.h
index df85738fd5..3241a9155a 100644
--- a/arch/arm/src/max326xx/chip/max326_fcr.h
+++ b/arch/arm/src/max326xx/hardware/max326_fcr.h
@@ -1,5 +1,5 @@
 /************************************************************************************
- * arch/arm/src/max326xx/chip/max326_fcr.h
+ * arch/arm/src/max326xx/hardware/max326_fcr.h
  *
  *   Copyright (C) 2018 Gregory Nutt. All rights reserved.
  *   Author: Gregory Nutt <gnutt@nuttx.org>
@@ -33,15 +33,15 @@
  *
  ************************************************************************************/
 
-#ifndef __ARCH_ARM_SRC_MAX326XX_CHIP_MAX326_FCR_H
-#define __ARCH_ARM_SRC_MAX326XX_CHIP_MAX326_FCR_H
+#ifndef __ARCH_ARM_SRC_MAX326XX_HARDWARE_MAX326_FCR_H
+#define __ARCH_ARM_SRC_MAX326XX_HARDWARE_MAX326_FCR_H
 
 /************************************************************************************
  * Included Files
  ************************************************************************************/
 
 #include <nuttx/config.h>
-#include "chip/max326_memorymap.h"
+#include "hardware/max326_memorymap.h"
 
 /************************************************************************************
  * Pre-processor Definitions
@@ -64,4 +64,4 @@
 #define FCR_REG0_I2C1_SDA_FILTER    (1 << 22) /* Bit 22: I2C1 SDA Filter Enable */
 #define FCR_REG0_I2C1_SCL_FILTER    (1 << 23) /* Bit 23: I2C1 SCL Filter Enable */
 
-#endif /* __ARCH_ARM_SRC_MAX326XX_CHIP_MAX326_FCR_H */
+#endif /* __ARCH_ARM_SRC_MAX326XX_HARDWARE_MAX326_FCR_H */
diff --git a/arch/arm/src/max326xx/chip/max326_flc.h b/arch/arm/src/max326xx/hardware/max326_flc.h
similarity index 88%
rename from arch/arm/src/max326xx/chip/max326_flc.h
rename to arch/arm/src/max326xx/hardware/max326_flc.h
index d0253707d3..70b4a2983c 100644
--- a/arch/arm/src/max326xx/chip/max326_flc.h
+++ b/arch/arm/src/max326xx/hardware/max326_flc.h
@@ -1,5 +1,5 @@
 /************************************************************************************
- * arch/arm/src/max326xx/chip/max326_flc.h
+ * arch/arm/src/max326xx/hardware/max326_flc.h
  *
  *   Copyright (C) 2018 Gregory Nutt. All rights reserved.
  *   Author: Gregory Nutt <gnutt@nuttx.org>
@@ -33,8 +33,8 @@
  *
  ************************************************************************************/
 
-#ifndef __ARCH_ARM_SRC_MAX326XX_CHIP_MAX326_FLC_H
-#define __ARCH_ARM_SRC_MAX326XX_CHIP_MAX326_FLC_H
+#ifndef __ARCH_ARM_SRC_MAX326XX_HARDWARE_MAX326_FLC_H
+#define __ARCH_ARM_SRC_MAX326XX_HARDWARE_MAX326_FLC_H
 
 /************************************************************************************
  * Included Files
@@ -43,11 +43,11 @@
 #include <nuttx/config.h>
 
 #if defined(CONFIG_ARCH_FAMILY_MAX32620) || defined(CONFIG_ARCH_FAMILY_MAX32630)
-#  include "chip/max32620_30_flc.h"
+#  include "hardware/max32620_30_flc.h"
 #elif defined(CONFIG_ARCH_FAMILY_MAX32660)
-#  include "chip/max32660_flc.h"
+#  include "hardware/max32660_flc.h"
 #else
 #  error "Unsupported MAX326XX family"
 #endif
 
-#endif /* __ARCH_ARM_SRC_MAX326XX_CHIP_MAX326_FLC_H */
+#endif /* __ARCH_ARM_SRC_MAX326XX_HARDWARE_MAX326_FLC_H */
diff --git a/arch/arm/src/max326xx/chip/max326_gcr.h b/arch/arm/src/max326xx/hardware/max326_gcr.h
similarity index 97%
rename from arch/arm/src/max326xx/chip/max326_gcr.h
rename to arch/arm/src/max326xx/hardware/max326_gcr.h
index d14d48ccea..400f0d2d8f 100644
--- a/arch/arm/src/max326xx/chip/max326_gcr.h
+++ b/arch/arm/src/max326xx/hardware/max326_gcr.h
@@ -1,5 +1,5 @@
 /************************************************************************************
- * arch/arm/src/max326xx/chip/max326_gcr.h
+ * arch/arm/src/max326xx/hardware/max326_gcr.h
  *
  *   Copyright (C) 2018 Gregory Nutt. All rights reserved.
  *   Author: Gregory Nutt <gnutt@nuttx.org>
@@ -33,8 +33,8 @@
  *
  ************************************************************************************/
 
-#ifndef __ARCH_ARM_SRC_MAX326XX_CHIP_MAX326_GCR_H
-#define __ARCH_ARM_SRC_MAX326XX_CHIP_MAX326_GCR_H
+#ifndef __ARCH_ARM_SRC_MAX326XX_HARDWARE_MAX326_GCR_H
+#define __ARCH_ARM_SRC_MAX326XX_HARDWARE_MAX326_GCR_H
 
 /************************************************************************************
  * Included Files
@@ -48,7 +48,7 @@
  ************************************************************************************/
 
 #include <nuttx/config.h>
-#include "chip/max326_memorymap.h"
+#include "hardware/max326_memorymap.h"
 
 /************************************************************************************
  * Pre-processor Definitions
@@ -196,4 +196,4 @@
 
 #define GCR_SYSIE_ICEULIE           (1 << 0)  /* Bit 0:  Arm ICE Unlocked Interrupt Enable */
 
-#endif /* __ARCH_ARM_SRC_MAX326XX_CHIP_MAX326_GCR_H */
+#endif /* __ARCH_ARM_SRC_MAX326XX_HARDWARE_MAX326_GCR_H */
diff --git a/arch/arm/src/max326xx/chip/max326_gpio.h b/arch/arm/src/max326xx/hardware/max326_gpio.h
similarity index 88%
rename from arch/arm/src/max326xx/chip/max326_gpio.h
rename to arch/arm/src/max326xx/hardware/max326_gpio.h
index 8e09511679..70b58651e9 100644
--- a/arch/arm/src/max326xx/chip/max326_gpio.h
+++ b/arch/arm/src/max326xx/hardware/max326_gpio.h
@@ -1,5 +1,5 @@
 /************************************************************************************
- * arch/arm/src/max326xx/chip/max326_gpio.h
+ * arch/arm/src/max326xx/hardware/max326_gpio.h
  *
  *   Copyright (C) 2018 Gregory Nutt. All rights reserved.
  *   Author: Gregory Nutt <gnutt@nuttx.org>
@@ -33,8 +33,8 @@
  *
  ************************************************************************************/
 
-#ifndef __ARCH_ARM_SRC_MAX326XX_CHIP_MAX326_GPIO_H
-#define __ARCH_ARM_SRC_MAX326XX_CHIP_MAX326_GPIO_H
+#ifndef __ARCH_ARM_SRC_MAX326XX_HARDWARE_MAX326_GPIO_H
+#define __ARCH_ARM_SRC_MAX326XX_HARDWARE_MAX326_GPIO_H
 
 /************************************************************************************
  * Included Files
@@ -43,11 +43,11 @@
 #include <nuttx/config.h>
 
 #if defined(CONFIG_ARCH_FAMILY_MAX32620) || defined(CONFIG_ARCH_FAMILY_MAX32630)
-#  include "chip/max32620_30_gpio.h"
+#  include "hardware/max32620_30_gpio.h"
 #elif defined(CONFIG_ARCH_FAMILY_MAX32660)
-#  include "chip/max32660_gpio.h"
+#  include "hardware/max32660_gpio.h"
 #else
 #  error "Unsupported MAX326XX family"
 #endif
 
-#endif /* __ARCH_ARM_SRC_MAX326XX_CHIP_MAX326_GPIO_H */
+#endif /* __ARCH_ARM_SRC_MAX326XX_HARDWARE_MAX326_GPIO_H */
diff --git a/arch/arm/src/max326xx/chip/max326_icc.h b/arch/arm/src/max326xx/hardware/max326_icc.h
similarity index 94%
rename from arch/arm/src/max326xx/chip/max326_icc.h
rename to arch/arm/src/max326xx/hardware/max326_icc.h
index 6f6d7df20e..fb4061e50a 100644
--- a/arch/arm/src/max326xx/chip/max326_icc.h
+++ b/arch/arm/src/max326xx/hardware/max326_icc.h
@@ -1,5 +1,5 @@
 /************************************************************************************
- * arch/arm/src/max326xx/chip/max326_icc.h
+ * arch/arm/src/max326xx/hardware/max326_icc.h
  *
  *   Copyright (C) 2018 Gregory Nutt. All rights reserved.
  *   Author: Gregory Nutt <gnutt@nuttx.org>
@@ -33,15 +33,15 @@
  *
  ************************************************************************************/
 
-#ifndef __ARCH_ARM_SRC_MAX326XX_CHIP_MAX326_ICC_H
-#define __ARCH_ARM_SRC_MAX326XX_CHIP_MAX326_ICC_H
+#ifndef __ARCH_ARM_SRC_MAX326XX_HARDWARE_MAX326_ICC_H
+#define __ARCH_ARM_SRC_MAX326XX_HARDWARE_MAX326_ICC_H
 
 /************************************************************************************
  * Included Files
  ************************************************************************************/
 
 #include <nuttx/config.h>
-#include "chip/max326_memorymap.h"
+#include "hardware/max326_memorymap.h"
 
 /************************************************************************************
  * Pre-processor Definitions
@@ -92,4 +92,4 @@
  * the cache
  */
 
-#endif /* __ARCH_ARM_SRC_MAX326XX_CHIP_MAX326_ICC_H */
+#endif /* __ARCH_ARM_SRC_MAX326XX_HARDWARE_MAX326_ICC_H */
diff --git a/arch/arm/src/max326xx/chip/max326_memorymap.h b/arch/arm/src/max326xx/hardware/max326_memorymap.h
similarity index 86%
rename from arch/arm/src/max326xx/chip/max326_memorymap.h
rename to arch/arm/src/max326xx/hardware/max326_memorymap.h
index 7896c7ae2d..7472af8563 100644
--- a/arch/arm/src/max326xx/chip/max326_memorymap.h
+++ b/arch/arm/src/max326xx/hardware/max326_memorymap.h
@@ -1,5 +1,5 @@
 /************************************************************************************
- * arch/arm/src/max326xx/chip/max326_memorymap.h
+ * arch/arm/src/max326xx/hardware/max326_memorymap.h
  *
  *   Copyright (C) 2018 Gregory Nutt. All rights reserved.
  *   Author: Gregory Nutt <gnutt@nuttx.org>
@@ -33,8 +33,8 @@
  *
  ************************************************************************************/
 
-#ifndef __ARCH_ARM_SRC_MAX326XX_CHIP_MAX326_MEMORYMAP_H
-#define __ARCH_ARM_SRC_MAX326XX_CHIP_MAX326_MEMORYMAP_H
+#ifndef __ARCH_ARM_SRC_MAX326XX_HARDWARE_MAX326_MEMORYMAP_H
+#define __ARCH_ARM_SRC_MAX326XX_HARDWARE_MAX326_MEMORYMAP_H
 
 /************************************************************************************
  * Included Files
@@ -43,11 +43,11 @@
 #include <nuttx/config.h>
 
 #if defined(CONFIG_ARCH_FAMILY_MAX32620) || defined(CONFIG_ARCH_FAMILY_MAX32630)
-#  include "chip/max32620_30_memorymap.h"
+#  include "hardware/max32620_30_memorymap.h"
 #elif defined(CONFIG_ARCH_FAMILY_MAX32660)
-#  include "chip/max32660_memorymap.h"
+#  include "hardware/max32660_memorymap.h"
 #else
 #  error "Unsupported MAX326XX family"
 #endif
 
-#endif /* __ARCH_ARM_SRC_MAX326XX_CHIP_MAX326_MEMORYMAP_H */
+#endif /* __ARCH_ARM_SRC_MAX326XX_HARDWARE_MAX326_MEMORYMAP_H */
diff --git a/arch/arm/src/max326xx/chip/max326_pinmux.h b/arch/arm/src/max326xx/hardware/max326_pinmux.h
similarity index 87%
rename from arch/arm/src/max326xx/chip/max326_pinmux.h
rename to arch/arm/src/max326xx/hardware/max326_pinmux.h
index a851dc5ba6..69ef38fc56 100644
--- a/arch/arm/src/max326xx/chip/max326_pinmux.h
+++ b/arch/arm/src/max326xx/hardware/max326_pinmux.h
@@ -1,5 +1,5 @@
 /************************************************************************************
- * arch/arm/src/max326xx/chip/max326_pinmux.h
+ * arch/arm/src/max326xx/hardware/max326_pinmux.h
  *
  *   Copyright (C) 2018 Gregory Nutt. All rights reserved.
  *   Author: Gregory Nutt <gnutt@nuttx.org>
@@ -33,8 +33,8 @@
  *
  ************************************************************************************/
 
-#ifndef __ARCH_ARM_SRC_MAX326XX_CHIP_MAX326_PINMUX_H
-#define __ARCH_ARM_SRC_MAX326XX_CHIP_MAX326_PINMUX_H
+#ifndef __ARCH_ARM_SRC_MAX326XX_HARDWARE_MAX326_PINMUX_H
+#define __ARCH_ARM_SRC_MAX326XX_HARDWARE_MAX326_PINMUX_H
 
 /************************************************************************************
  * Included Files
@@ -43,11 +43,11 @@
 #include <nuttx/config.h>
 
 #if defined(CONFIG_ARCH_FAMILY_MAX32620) || defined(CONFIG_ARCH_FAMILY_MAX32630)
-#  include "chip/max32620_30_pinmux.h"
+#  include "hardware/max32620_30_pinmux.h"
 #elif defined(CONFIG_ARCH_FAMILY_MAX32660)
-#  include "chip/max32660_pinmux.h"
+#  include "hardware/max32660_pinmux.h"
 #else
 #  error "Unsupported MAX326XX family"
 #endif
 
-#endif /* __ARCH_ARM_SRC_MAX326XX_CHIP_MAX326_PINMUX_H */
+#endif /* __ARCH_ARM_SRC_MAX326XX_HARDWARE_MAX326_PINMUX_H */
diff --git a/arch/arm/src/max326xx/chip/max326_pwrseq.h b/arch/arm/src/max326xx/hardware/max326_pwrseq.h
similarity index 96%
rename from arch/arm/src/max326xx/chip/max326_pwrseq.h
rename to arch/arm/src/max326xx/hardware/max326_pwrseq.h
index 72af1557e6..31bf403267 100644
--- a/arch/arm/src/max326xx/chip/max326_pwrseq.h
+++ b/arch/arm/src/max326xx/hardware/max326_pwrseq.h
@@ -1,5 +1,5 @@
 /************************************************************************************
- * arch/arm/src/max326xx/chip/max326_pwrseq.h
+ * arch/arm/src/max326xx/hardware/max326_pwrseq.h
  *
  *   Copyright (C) 2018 Gregory Nutt. All rights reserved.
  *   Author: Gregory Nutt <gnutt@nuttx.org>
@@ -33,15 +33,15 @@
  *
  ************************************************************************************/
 
-#ifndef __ARCH_ARM_SRC_MAX326XX_CHIP_MAX326_PWRSEQ_H
-#define __ARCH_ARM_SRC_MAX326XX_CHIP_MAX326_PWRSEQ_H
+#ifndef __ARCH_ARM_SRC_MAX326XX_HARDWARE_MAX326_PWRSEQ_H
+#define __ARCH_ARM_SRC_MAX326XX_HARDWARE_MAX326_PWRSEQ_H
 
 /************************************************************************************
  * Included Files
  ************************************************************************************/
 
 #include <nuttx/config.h>
-#include "chip/max326_memorymap.h"
+#include "hardware/max326_memorymap.h"
 
 /************************************************************************************
  * Pre-processor Definitions
@@ -116,4 +116,4 @@
 #define PWRSEQ_LPMEMSD_SRAM3OFF       (1 << 3)  /* Bit 3:  System RAM 3 Shut Down
                                                  *         (0x20010000-0x20017fff) */
 
-#endif /* __ARCH_ARM_SRC_MAX326XX_CHIP_MAX326_PWRSEQ_H */
+#endif /* __ARCH_ARM_SRC_MAX326XX_HARDWARE_MAX326_PWRSEQ_H */
diff --git a/arch/arm/src/max326xx/chip/max326_rtc.h b/arch/arm/src/max326xx/hardware/max326_rtc.h
similarity index 88%
rename from arch/arm/src/max326xx/chip/max326_rtc.h
rename to arch/arm/src/max326xx/hardware/max326_rtc.h
index 9ae7a502e5..fbd3fcdd5b 100644
--- a/arch/arm/src/max326xx/chip/max326_rtc.h
+++ b/arch/arm/src/max326xx/hardware/max326_rtc.h
@@ -1,5 +1,5 @@
 /************************************************************************************
- * arch/arm/src/max326xx/chip/max326_rtc.h
+ * arch/arm/src/max326xx/hardware/max326_rtc.h
  *
  *   Copyright (C) 2018 Gregory Nutt. All rights reserved.
  *   Author: Gregory Nutt <gnutt@nuttx.org>
@@ -33,8 +33,8 @@
  *
  ************************************************************************************/
 
-#ifndef __ARCH_ARM_SRC_MAX326XX_CHIP_MAX326_RTC_H
-#define __ARCH_ARM_SRC_MAX326XX_CHIP_MAX326_RTC_H
+#ifndef __ARCH_ARM_SRC_MAX326XX_HARDWARE_MAX326_RTC_H
+#define __ARCH_ARM_SRC_MAX326XX_HARDWARE_MAX326_RTC_H
 
 /************************************************************************************
  * Included Files
@@ -43,11 +43,11 @@
 #include <nuttx/config.h>
 
 #if defined(CONFIG_ARCH_FAMILY_MAX32620) || defined(CONFIG_ARCH_FAMILY_MAX32630)
-#  include "chip/max32620_30_rtc.h"
+#  include "hardware/max32620_30_rtc.h"
 #elif defined(CONFIG_ARCH_FAMILY_MAX32660)
-#  include "chip/max32660_rtc.h"
+#  include "hardware/max32660_rtc.h"
 #else
 #  error "Unsupported MAX326XX family"
 #endif
 
-#endif /* __ARCH_ARM_SRC_MAX326XX_CHIP_MAX326_RTC_H */
+#endif /* __ARCH_ARM_SRC_MAX326XX_HARDWARE_MAX326_RTC_H */
diff --git a/arch/arm/src/max326xx/chip/max326_sir.h b/arch/arm/src/max326xx/hardware/max326_sir.h
similarity index 92%
rename from arch/arm/src/max326xx/chip/max326_sir.h
rename to arch/arm/src/max326xx/hardware/max326_sir.h
index b42c1e45e6..42bb6f8385 100644
--- a/arch/arm/src/max326xx/chip/max326_sir.h
+++ b/arch/arm/src/max326xx/hardware/max326_sir.h
@@ -1,5 +1,5 @@
 /************************************************************************************
- * arch/arm/src/max326xx/chip/max326_sir.h
+ * arch/arm/src/max326xx/hardware/max326_sir.h
  *
  *   Copyright (C) 2018 Gregory Nutt. All rights reserved.
  *   Author: Gregory Nutt <gnutt@nuttx.org>
@@ -33,15 +33,15 @@
  *
  ************************************************************************************/
 
-#ifndef __ARCH_ARM_SRC_MAX326XX_CHIP_MAX326_SIR_H
-#define __ARCH_ARM_SRC_MAX326XX_CHIP_MAX326_SIR_H
+#ifndef __ARCH_ARM_SRC_MAX326XX_HARDWARE_MAX326_SIR_H
+#define __ARCH_ARM_SRC_MAX326XX_HARDWARE_MAX326_SIR_H
 
 /************************************************************************************
  * Included Files
  ************************************************************************************/
 
 #include <nuttx/config.h>
-#include "chip/max326_memorymap.h"
+#include "hardware/max326_memorymap.h"
 
 /************************************************************************************
  * Pre-processor Definitions
@@ -66,4 +66,4 @@
 
 /* System Initialization Address Error Register (32-bit Configuration Error Address) */
 
-#endif /* __ARCH_ARM_SRC_MAX326XX_CHIP_MAX326_SIR_H */
+#endif /* __ARCH_ARM_SRC_MAX326XX_HARDWARE_MAX326_SIR_H */
diff --git a/arch/arm/src/max326xx/chip/max326_tmr.h b/arch/arm/src/max326xx/hardware/max326_tmr.h
similarity index 88%
rename from arch/arm/src/max326xx/chip/max326_tmr.h
rename to arch/arm/src/max326xx/hardware/max326_tmr.h
index 0cb00b96f9..5481208f1a 100644
--- a/arch/arm/src/max326xx/chip/max326_tmr.h
+++ b/arch/arm/src/max326xx/hardware/max326_tmr.h
@@ -1,5 +1,5 @@
 /************************************************************************************
- * arch/arm/src/max326xx/chip/max326_tmr.h
+ * arch/arm/src/max326xx/hardware/max326_tmr.h
  *
  *   Copyright (C) 2018 Gregory Nutt. All rights reserved.
  *   Author: Gregory Nutt <gnutt@nuttx.org>
@@ -33,8 +33,8 @@
  *
  ************************************************************************************/
 
-#ifndef __ARCH_ARM_SRC_MAX326XX_CHIP_MAX326_TMR_H
-#define __ARCH_ARM_SRC_MAX326XX_CHIP_MAX326_TMR_H
+#ifndef __ARCH_ARM_SRC_MAX326XX_HARDWARE_MAX326_TMR_H
+#define __ARCH_ARM_SRC_MAX326XX_HARDWARE_MAX326_TMR_H
 
 /************************************************************************************
  * Included Files
@@ -43,11 +43,11 @@
 #include <nuttx/config.h>
 
 #if defined(CONFIG_ARCH_FAMILY_MAX32620) || defined(CONFIG_ARCH_FAMILY_MAX32630)
-#  include "chip/max32620_30_tmr.h"
+#  include "hardware/max32620_30_tmr.h"
 #elif defined(CONFIG_ARCH_FAMILY_MAX32660)
-#  include "chip/max32660_tmr.h"
+#  include "hardware/max32660_tmr.h"
 #else
 #  error "Unsupported MAX326XX family"
 #endif
 
-#endif /* __ARCH_ARM_SRC_MAX326XX_CHIP_MAX326_TMR_H */
+#endif /* __ARCH_ARM_SRC_MAX326XX_HARDWARE_MAX326_TMR_H */
diff --git a/arch/arm/src/max326xx/chip/max326_uart.h b/arch/arm/src/max326xx/hardware/max326_uart.h
similarity index 88%
rename from arch/arm/src/max326xx/chip/max326_uart.h
rename to arch/arm/src/max326xx/hardware/max326_uart.h
index 062c525a97..d08ef0b5a2 100644
--- a/arch/arm/src/max326xx/chip/max326_uart.h
+++ b/arch/arm/src/max326xx/hardware/max326_uart.h
@@ -1,5 +1,5 @@
 /************************************************************************************
- * arch/arm/src/max326xx/chip/max326_uart.h
+ * arch/arm/src/max326xx/hardware/max326_uart.h
  *
  *   Copyright (C) 2018 Gregory Nutt. All rights reserved.
  *   Author: Gregory Nutt <gnutt@nuttx.org>
@@ -33,8 +33,8 @@
  *
  ************************************************************************************/
 
-#ifndef __ARCH_ARM_SRC_MAX326XX_CHIP_MAX326_UART_H
-#define __ARCH_ARM_SRC_MAX326XX_CHIP_MAX326_UART_H
+#ifndef __ARCH_ARM_SRC_MAX326XX_HARDWARE_MAX326_UART_H
+#define __ARCH_ARM_SRC_MAX326XX_HARDWARE_MAX326_UART_H
 
 /************************************************************************************
  * Included Files
@@ -43,11 +43,11 @@
 #include <nuttx/config.h>
 
 #if defined(CONFIG_ARCH_FAMILY_MAX32620) || defined(CONFIG_ARCH_FAMILY_MAX32630)
-#  include "chip/max32620_30_uart.h"
+#  include "hardware/max32620_30_uart.h"
 #elif defined(CONFIG_ARCH_FAMILY_MAX32660)
-#  include "chip/max32660_uart.h"
+#  include "hardware/max32660_uart.h"
 #else
 #  error "Unsupported MAX326XX family"
 #endif
 
-#endif /* __ARCH_ARM_SRC_MAX326XX_CHIP_MAX326_UART_H */
+#endif /* __ARCH_ARM_SRC_MAX326XX_HARDWARE_MAX326_UART_H */
diff --git a/arch/arm/src/max326xx/chip/max326_wdt.h b/arch/arm/src/max326xx/hardware/max326_wdt.h
similarity index 88%
rename from arch/arm/src/max326xx/chip/max326_wdt.h
rename to arch/arm/src/max326xx/hardware/max326_wdt.h
index 5a4b414b5e..063a5e57fc 100644
--- a/arch/arm/src/max326xx/chip/max326_wdt.h
+++ b/arch/arm/src/max326xx/hardware/max326_wdt.h
@@ -1,5 +1,5 @@
 /************************************************************************************
- * arch/arm/src/max326xx/chip/max326_wdt.h
+ * arch/arm/src/max326xx/hardware/max326_wdt.h
  *
  *   Copyright (C) 2018 Gregory Nutt. All rights reserved.
  *   Author: Gregory Nutt <gnutt@nuttx.org>
@@ -33,8 +33,8 @@
  *
  ************************************************************************************/
 
-#ifndef __ARCH_ARM_SRC_MAX326XX_CHIP_MAX326_WDT_H
-#define __ARCH_ARM_SRC_MAX326XX_CHIP_MAX326_WDT_H
+#ifndef __ARCH_ARM_SRC_MAX326XX_HARDWARE_MAX326_WDT_H
+#define __ARCH_ARM_SRC_MAX326XX_HARDWARE_MAX326_WDT_H
 
 /************************************************************************************
  * Included Files
@@ -43,11 +43,11 @@
 #include <nuttx/config.h>
 
 #if defined(CONFIG_ARCH_FAMILY_MAX32620) || defined(CONFIG_ARCH_FAMILY_MAX32630)
-#  include "chip/max32620_30_wdt.h"
+#  include "hardware/max32620_30_wdt.h"
 #elif defined(CONFIG_ARCH_FAMILY_MAX32660)
-#  include "chip/max32660_wdt.h"
+#  include "hardware/max32660_wdt.h"
 #else
 #  error "Unsupported MAX326XX family"
 #endif
 
-#endif /* __ARCH_ARM_SRC_MAX326XX_CHIP_MAX326_WDT_H */
+#endif /* __ARCH_ARM_SRC_MAX326XX_HARDWARE_MAX326_WDT_H */
diff --git a/arch/arm/src/max326xx/max32660/max32660_clockconfig.c b/arch/arm/src/max326xx/max32660/max32660_clockconfig.c
index e49c767713..a2b8123791 100644
--- a/arch/arm/src/max326xx/max32660/max32660_clockconfig.c
+++ b/arch/arm/src/max326xx/max32660/max32660_clockconfig.c
@@ -45,9 +45,9 @@
 
 #include "up_arch.h"
 
-#include "chip/max326_gcr.h"
-#include "chip/max326_pwrseq.h"
-#include "chip/max326_flc.h"
+#include "hardware/max326_gcr.h"
+#include "hardware/max326_pwrseq.h"
+#include "hardware/max326_flc.h"
 #include "max326_clockconfig.h"
 
 #include <arch/board/board.h>
diff --git a/arch/arm/src/max326xx/max32660/max32660_dma.c b/arch/arm/src/max326xx/max32660/max32660_dma.c
index ff978e35a2..eb5e935af3 100644
--- a/arch/arm/src/max326xx/max32660/max32660_dma.c
+++ b/arch/arm/src/max326xx/max32660/max32660_dma.c
@@ -47,6 +47,7 @@
 
 #include "up_arch.h"
 
+#include "hardware/max326_dma.h"
 #include "max326_dma.h"
 
 #ifdef CONFIG_MAX326XX_DMA
diff --git a/arch/arm/src/max326xx/max32660/max32660_lowputc.c b/arch/arm/src/max326xx/max32660/max32660_lowputc.c
index e0813b8c16..3fa6b42286 100644
--- a/arch/arm/src/max326xx/max32660/max32660_lowputc.c
+++ b/arch/arm/src/max326xx/max32660/max32660_lowputc.c
@@ -45,9 +45,9 @@
 #include "up_arch.h"
 #include "up_internal.h"
 
-#include "chip/max326_memorymap.h"
-#include "chip/max326_pinmux.h"
-#include "chip/max326_uart.h"
+#include "hardware/max326_memorymap.h"
+#include "hardware/max326_pinmux.h"
+#include "hardware/max326_uart.h"
 
 #include "max326_config.h"
 #include "max326_periphclks.h"
diff --git a/arch/arm/src/max326xx/max32660/max32660_periphclks.h b/arch/arm/src/max326xx/max32660/max32660_periphclks.h
index 816cd3953c..25d87d21ac 100644
--- a/arch/arm/src/max326xx/max32660/max32660_periphclks.h
+++ b/arch/arm/src/max326xx/max32660/max32660_periphclks.h
@@ -46,7 +46,7 @@
 #include <stdbool.h>
 
 #include "up_arch.h"
-#include "chip/max326_gcr.h"
+#include "hardware/max326_gcr.h"
 
 /************************************************************************************
  * Pre-processor Definitions
diff --git a/arch/arm/src/max326xx/max32660/max32660_serial.c b/arch/arm/src/max326xx/max32660/max32660_serial.c
index 590cef857d..7d9ea65661 100644
--- a/arch/arm/src/max326xx/max32660/max32660_serial.c
+++ b/arch/arm/src/max326xx/max32660/max32660_serial.c
@@ -59,7 +59,7 @@
 
 #include "chip.h"
 #include "max326_config.h"
-#include "chip/max326_uart.h"
+#include "hardware/max326_uart.h"
 #include "max326_clockconfig.h"
 #include "max326_lowputc.h"
 #include "max326_serial.h"
diff --git a/arch/arm/src/max326xx/max326_dma.h b/arch/arm/src/max326xx/max326_dma.h
index 190847c969..412aa43f01 100644
--- a/arch/arm/src/max326xx/max326_dma.h
+++ b/arch/arm/src/max326xx/max326_dma.h
@@ -45,7 +45,6 @@
 /* Standard DMA is only available for the MAX32660 */
 
 #ifdef CONFIG_ARCH_FAMILY_MAX32660
-#  include "chip/max326_dma.h"
 #  include "max32660/max32660_dma.h"
 #endif
 
diff --git a/arch/arm/src/max326xx/max326_gpio.h b/arch/arm/src/max326xx/max326_gpio.h
index 8b4404adfa..bd4c6e557a 100644
--- a/arch/arm/src/max326xx/max326_gpio.h
+++ b/arch/arm/src/max326xx/max326_gpio.h
@@ -45,7 +45,7 @@
 #include <stdint.h>
 #include <stdbool.h>
 
-#include "chip/max326_gpio.h"
+#include "hardware/max326_gpio.h"
 
 /************************************************************************************
  * Pre-processor Definitions
diff --git a/arch/arm/src/max326xx/max326_icc.h b/arch/arm/src/max326xx/max326_icc.h
index 3c0aa5da07..5f31a7473b 100644
--- a/arch/arm/src/max326xx/max326_icc.h
+++ b/arch/arm/src/max326xx/max326_icc.h
@@ -43,8 +43,6 @@
 #include <nuttx/config.h>
 #include <stdbool.h>
 
-#include "chip/max326_icc.h"
-
 /************************************************************************************
  * Public Function Prototypes
  ************************************************************************************/