diff --git a/arch/arm/src/armv7-m/arm_perf.c b/arch/arm/src/armv7-m/arm_perf.c
index b4e860f789..fdf78196f2 100644
--- a/arch/arm/src/armv7-m/arm_perf.c
+++ b/arch/arm/src/armv7-m/arm_perf.c
@@ -25,7 +25,7 @@
 #include <nuttx/arch.h>
 #include <nuttx/clock.h>
 
-#include "arm_arch.h"
+#include "arm_internal.h"
 #include "dwt.h"
 #include "itm.h"
 #include "nvic.h"
diff --git a/arch/arm/src/armv8-m/arm_perf.c b/arch/arm/src/armv8-m/arm_perf.c
index c6d4523035..0a981a4948 100644
--- a/arch/arm/src/armv8-m/arm_perf.c
+++ b/arch/arm/src/armv8-m/arm_perf.c
@@ -25,7 +25,7 @@
 #include <nuttx/arch.h>
 #include <nuttx/clock.h>
 
-#include "arm_arch.h"
+#include "arm_internal.h"
 #include "dwt.h"
 #include "itm.h"
 #include "nvic.h"