diff --git a/arch/arm/src/samd5e5/chip/sam_aes.h b/arch/arm/src/samd5e5/hardware/sam_aes.h
similarity index 98%
rename from arch/arm/src/samd5e5/chip/sam_aes.h
rename to arch/arm/src/samd5e5/hardware/sam_aes.h
index c6bab955b8..fc087e5714 100644
--- a/arch/arm/src/samd5e5/chip/sam_aes.h
+++ b/arch/arm/src/samd5e5/hardware/sam_aes.h
@@ -1,5 +1,5 @@
 /********************************************************************************************
- * arch/arm/src/samd5e5/chip/sam_aes.h
+ * arch/arm/src/samd5e5/hardware/sam_aes.h
  *
  *   Copyright (C) 2018 Gregory Nutt. All rights reserved.
  *   Author: Gregory Nutt <gnutt@nuttx.org>
@@ -33,8 +33,8 @@
  *
  ********************************************************************************************/
 
-#ifndef __ARCH_ARM_SRC_SAMD5E5_CHIP_SAM_AES_H
-#define __ARCH_ARM_SRC_SAMD5E5_CHIP_SAM_AES_H
+#ifndef __ARCH_ARM_SRC_SAMD5E5_HARDWARE_SAM_AES_H
+#define __ARCH_ARM_SRC_SAMD5E5_HARDWARE_SAM_AES_H
 
 /********************************************************************************************
  * Included Files
@@ -42,7 +42,7 @@
 
 #include <nuttx/config.h>
 
-#include "chip/sam_memorymap.h"
+#include "hardware/sam_memorymap.h"
 
 /********************************************************************************************
  * Pre-processor Definitions
@@ -208,4 +208,4 @@
  * Public Functions
  ********************************************************************************************/
 
-#endif /* __ARCH_ARM_SRC_SAMD5E5_CHIP_SAM_AES_H */
+#endif /* __ARCH_ARM_SRC_SAMD5E5_HARDWARE_SAM_AES_H */
diff --git a/arch/arm/src/samd5e5/chip/sam_cmcc.h b/arch/arm/src/samd5e5/hardware/sam_cmcc.h
similarity index 97%
rename from arch/arm/src/samd5e5/chip/sam_cmcc.h
rename to arch/arm/src/samd5e5/hardware/sam_cmcc.h
index ce8b53421c..f1fe5a9fbf 100644
--- a/arch/arm/src/samd5e5/chip/sam_cmcc.h
+++ b/arch/arm/src/samd5e5/hardware/sam_cmcc.h
@@ -1,5 +1,5 @@
 /****************************************************************************************
- * arch/arm/src/samd5e5/chip/sam_cmcc.h
+ * arch/arm/src/samd5e5/hardware/sam_cmcc.h
  * Cortex M Cache Controller (CMCC) for the SAMD5/E5
  *
  *   Copyright (C) 2018 Gregory Nutt. All rights reserved.
@@ -34,8 +34,8 @@
  *
  ****************************************************************************************/
 
-#ifndef __ARCH_ARM_SRC_SAMD5E5_CHIP_SAM_CMCC_H
-#define __ARCH_ARM_SRC_SAMD5E5_CHIP_SAM_CMCC_H
+#ifndef __ARCH_ARM_SRC_SAMD5E5_HARDWARE_SAM_CMCC_H
+#define __ARCH_ARM_SRC_SAMD5E5_HARDWARE_SAM_CMCC_H
 
 /****************************************************************************************
  * Included Files
@@ -43,7 +43,7 @@
 
 #include <nuttx/config.h>
 
-#include "chip/sam_memorymap.h"
+#include "hardware/sam_memorymap.h"
 
 /****************************************************************************************
  * Pre-processor Definitions
@@ -193,4 +193,4 @@
  * Public Functions
  ****************************************************************************************/
 
-#endif /* __ARCH_ARM_SRC_SAMD5E5_CHIP_SAM_CMCC_H */
+#endif /* __ARCH_ARM_SRC_SAMD5E5_HARDWARE_SAM_CMCC_H */
diff --git a/arch/arm/src/samd5e5/chip/sam_dmac.h b/arch/arm/src/samd5e5/hardware/sam_dmac.h
similarity index 99%
rename from arch/arm/src/samd5e5/chip/sam_dmac.h
rename to arch/arm/src/samd5e5/hardware/sam_dmac.h
index 50e8f96cc1..763b0e1c4f 100644
--- a/arch/arm/src/samd5e5/chip/sam_dmac.h
+++ b/arch/arm/src/samd5e5/hardware/sam_dmac.h
@@ -1,5 +1,5 @@
 /********************************************************************************************
- * arch/arm/src/samd5e5/chip/sam_dmac.h
+ * arch/arm/src/samd5e5/hardware/sam_dmac.h
  *
  *   Copyright (C) 2018 Gregory Nutt. All rights reserved.
  *   Author: Gregory Nutt <gnutt@nuttx.org>
@@ -33,8 +33,8 @@
  *
  ********************************************************************************************/
 
-#ifndef __ARCH_ARM_SRC_SAMD5E5_CHIP_SAM_DMAC_H
-#define __ARCH_ARM_SRC_SAMD5E5_CHIP_SAM_DMAC_H
+#ifndef __ARCH_ARM_SRC_SAMD5E5_HARDWARE_SAM_DMAC_H
+#define __ARCH_ARM_SRC_SAMD5E5_HARDWARE_SAM_DMAC_H
 
 /********************************************************************************************
  * Included Files
@@ -42,7 +42,7 @@
 
 #include <nuttx/config.h>
 
-#include "chip/sam_memorymap.h"
+#include "hardware/sam_memorymap.h"
 
 /********************************************************************************************
  * Pre-processor Definitions
@@ -471,4 +471,4 @@ struct dma_desc_s
  * Public Functions
  ********************************************************************************************/
 
-#endif /* __ARCH_ARM_SRC_SAMD5E5_CHIP_SAM_DMAC_H */
+#endif /* __ARCH_ARM_SRC_SAMD5E5_HARDWARE_SAM_DMAC_H */
diff --git a/arch/arm/src/samd5e5/chip/sam_eic.h b/arch/arm/src/samd5e5/hardware/sam_eic.h
similarity index 98%
rename from arch/arm/src/samd5e5/chip/sam_eic.h
rename to arch/arm/src/samd5e5/hardware/sam_eic.h
index 5fce8fb225..52fcbda0c4 100644
--- a/arch/arm/src/samd5e5/chip/sam_eic.h
+++ b/arch/arm/src/samd5e5/hardware/sam_eic.h
@@ -1,5 +1,5 @@
 /********************************************************************************************
- * arch/arm/src/samd5e5/chip/sam_eic.h
+ * arch/arm/src/samd5e5/hardware/sam_eic.h
  *
  *   Copyright (C) 2018 Gregory Nutt. All rights reserved.
  *   Author: Gregory Nutt <gnutt@nuttx.org>
@@ -33,8 +33,8 @@
  *
  ********************************************************************************************/
 
-#ifndef __ARCH_ARM_SRC_SAMD5E5_CHIP_SAM_EIC_H
-#define __ARCH_ARM_SRC_SAMD5E5_CHIP_SAM_EIC_H
+#ifndef __ARCH_ARM_SRC_SAMD5E5_HARDWARE_SAM_EIC_H
+#define __ARCH_ARM_SRC_SAMD5E5_HARDWARE_SAM_EIC_H
 
 /********************************************************************************************
  * Included Files
@@ -42,7 +42,7 @@
 
 #include <nuttx/config.h>
 
-#include "chip/sam_memorymap.h"
+#include "hardware/sam_memorymap.h"
 
 /********************************************************************************************
  * Pre-processor Definitions
@@ -252,4 +252,4 @@
  * Public Functions
  ********************************************************************************************/
 
-#endif /* __ARCH_ARM_SRC_SAMD5E5_CHIP_SAM_EIC_H */
+#endif /* __ARCH_ARM_SRC_SAMD5E5_HARDWARE_SAM_EIC_H */
diff --git a/arch/arm/src/samd5e5/chip/sam_evsys.h b/arch/arm/src/samd5e5/hardware/sam_evsys.h
similarity index 98%
rename from arch/arm/src/samd5e5/chip/sam_evsys.h
rename to arch/arm/src/samd5e5/hardware/sam_evsys.h
index f03691eec8..ee7f513b1d 100644
--- a/arch/arm/src/samd5e5/chip/sam_evsys.h
+++ b/arch/arm/src/samd5e5/hardware/sam_evsys.h
@@ -1,5 +1,5 @@
 /********************************************************************************************
- * arch/arm/src/samd5e5/chip/sam_evsys.h
+ * arch/arm/src/samd5e5/hardware/sam_evsys.h
  *
  *   Copyright (C) 2018 Gregory Nutt. All rights reserved.
  *   Author: Gregory Nutt <gnutt@nuttx.org>
@@ -33,8 +33,8 @@
  *
  ********************************************************************************************/
 
-#ifndef __ARCH_ARM_SRC_SAMD5E5_CHIP_SAM_EVSYS_H
-#define __ARCH_ARM_SRC_SAMD5E5_CHIP_SAM_EVSYS_H
+#ifndef __ARCH_ARM_SRC_SAMD5E5_HARDWARE_SAM_EVSYS_H
+#define __ARCH_ARM_SRC_SAMD5E5_HARDWARE_SAM_EVSYS_H
 
 /********************************************************************************************
  * Included Files
@@ -42,7 +42,7 @@
 
 #include <nuttx/config.h>
 
-#include "chip/sam_memorymap.h"
+#include "hardware/sam_memorymap.h"
 
 /********************************************************************************************
  * Pre-processor Definitions
@@ -366,4 +366,4 @@
  * Public Functions
  ********************************************************************************************/
 
-#endif /* __ARCH_ARM_SRC_SAMD5E5_CHIP_SAM_EVSYS_H */
+#endif /* __ARCH_ARM_SRC_SAMD5E5_HARDWARE_SAM_EVSYS_H */
diff --git a/arch/arm/src/samd5e5/chip/sam_fuses.h b/arch/arm/src/samd5e5/hardware/sam_fuses.h
similarity index 98%
rename from arch/arm/src/samd5e5/chip/sam_fuses.h
rename to arch/arm/src/samd5e5/hardware/sam_fuses.h
index eb3843e7f8..091daa2729 100644
--- a/arch/arm/src/samd5e5/chip/sam_fuses.h
+++ b/arch/arm/src/samd5e5/hardware/sam_fuses.h
@@ -1,5 +1,5 @@
 /********************************************************************************************
- * arch/arm/src/samd5e5/chip/sam_fuses.h
+ * arch/arm/src/samd5e5/hardware/sam_fuses.h
  *
  *   Copyright (C) 2018 Gregory Nutt. All rights reserved.
  *   Author: Gregory Nutt <gnutt@nuttx.org>
@@ -33,8 +33,8 @@
  *
  ****************************************************************************************************/
 
-#ifndef __ARCH_ARM_SRC_SAMD5E5_CHIP_SAM_FUSES_H
-#define __ARCH_ARM_SRC_SAMD5E5_CHIP_SAM_FUSES_H
+#ifndef __ARCH_ARM_SRC_SAMD5E5_HARDWARE_SAM_FUSES_H
+#define __ARCH_ARM_SRC_SAMD5E5_HARDWARE_SAM_FUSES_H
 
 /********************************************************************************************
  * Included Files
@@ -273,4 +273,4 @@
  * Public Functions
  ********************************************************************************************/
 
-#endif /* __ARCH_ARM_SRC_SAMD5E5_CHIP_SAM_FUSES_H */
+#endif /* __ARCH_ARM_SRC_SAMD5E5_HARDWARE_SAM_FUSES_H */
diff --git a/arch/arm/src/samd5e5/chip/sam_gclk.h b/arch/arm/src/samd5e5/hardware/sam_gclk.h
similarity index 98%
rename from arch/arm/src/samd5e5/chip/sam_gclk.h
rename to arch/arm/src/samd5e5/hardware/sam_gclk.h
index 1773fb20ad..e1a32fad4d 100644
--- a/arch/arm/src/samd5e5/chip/sam_gclk.h
+++ b/arch/arm/src/samd5e5/hardware/sam_gclk.h
@@ -1,5 +1,5 @@
 /********************************************************************************************
- * arch/arm/src/samd5e5/chip/sam_gclk.h
+ * arch/arm/src/samd5e5/hardware/sam_gclk.h
  *
  *   Copyright (C) 2015 Gregory Nutt. All rights reserved.
  *   Author: Gregory Nutt <gnutt@nuttx.org>
@@ -33,8 +33,8 @@
  *
  ********************************************************************************************/
 
-#ifndef __ARCH_ARM_SRC_SAMD5E5_CHIP_SAM_GCLK_H
-#define __ARCH_ARM_SRC_SAMD5E5_CHIP_SAM_GCLK_H
+#ifndef __ARCH_ARM_SRC_SAMD5E5_HARDWARE_SAM_GCLK_H
+#define __ARCH_ARM_SRC_SAMD5E5_HARDWARE_SAM_GCLK_H
 
 /********************************************************************************************
  * Included Files
@@ -42,7 +42,7 @@
 
 #include <nuttx/config.h>
 
-#include "chip/sam_memorymap.h"
+#include "hardware/sam_memorymap.h"
 
 /********************************************************************************************
  * Pre-processor Definitions
@@ -220,4 +220,4 @@
  * Public Functions
  ********************************************************************************************/
 
-#endif /* __ARCH_ARM_SRC_SAMD5E5_CHIP_SAM_GCLK_H */
+#endif /* __ARCH_ARM_SRC_SAMD5E5_HARDWARE_SAM_GCLK_H */
diff --git a/arch/arm/src/samd5e5/chip/sam_i2c_master.h b/arch/arm/src/samd5e5/hardware/sam_i2c_master.h
similarity index 98%
rename from arch/arm/src/samd5e5/chip/sam_i2c_master.h
rename to arch/arm/src/samd5e5/hardware/sam_i2c_master.h
index e03bca43e2..8298f5fe41 100644
--- a/arch/arm/src/samd5e5/chip/sam_i2c_master.h
+++ b/arch/arm/src/samd5e5/hardware/sam_i2c_master.h
@@ -1,5 +1,5 @@
 /********************************************************************************************
- * arch/arm/src/samd5e5/chip/sam_i2c_master.h
+ * arch/arm/src/samd5e5/hardware/sam_i2c_master.h
  *
  *   Copyright (C) 2018 Gregory Nutt. All rights reserved.
  *   Author: Gregory Nutt <gnutt@nuttx.org>
@@ -33,8 +33,8 @@
  *
  ********************************************************************************************/
 
-#ifndef __ARCH_ARM_SRC_SAMD5E5_CHIP_SAM_I2C_MASTER_H
-#define __ARCH_ARM_SRC_SAMD5E5_CHIP_SAM_I2C_MASTER_H
+#ifndef __ARCH_ARM_SRC_SAMD5E5_HARDWARE_SAM_I2C_MASTER_H
+#define __ARCH_ARM_SRC_SAMD5E5_HARDWARE_SAM_I2C_MASTER_H
 
 /********************************************************************************************
  * Included Files
@@ -42,7 +42,7 @@
 
 #include <nuttx/config.h>
 
-#include "chip/sam_memorymap.h"
+#include "hardware/sam_memorymap.h"
 
 /********************************************************************************************
  * Pre-processor Definitions
@@ -304,4 +304,4 @@
  * Public Functions
  ********************************************************************************************/
 
-#endif /* __ARCH_ARM_SRC_SAMD5E5_CHIP_SAM_I2C_MASTER_H */
+#endif /* __ARCH_ARM_SRC_SAMD5E5_HARDWARE_SAM_I2C_MASTER_H */
diff --git a/arch/arm/src/samd5e5/chip/sam_i2c_slave.h b/arch/arm/src/samd5e5/hardware/sam_i2c_slave.h
similarity index 98%
rename from arch/arm/src/samd5e5/chip/sam_i2c_slave.h
rename to arch/arm/src/samd5e5/hardware/sam_i2c_slave.h
index 5066df85f3..2d968f41df 100644
--- a/arch/arm/src/samd5e5/chip/sam_i2c_slave.h
+++ b/arch/arm/src/samd5e5/hardware/sam_i2c_slave.h
@@ -1,5 +1,5 @@
 /********************************************************************************************
- * arch/arm/src/samd5e5/chip/sam_i2c_slave.h
+ * arch/arm/src/samd5e5/hardware/sam_i2c_slave.h
  *
  *   Copyright (C) 2018 Gregory Nutt. All rights reserved.
  *   Author: Gregory Nutt <gnutt@nuttx.org>
@@ -33,8 +33,8 @@
  *
  ********************************************************************************************/
 
-#ifndef __ARCH_ARM_SRC_SAMD5E5_CHIP_SAM_I2C_SLAVE_H
-#define __ARCH_ARM_SRC_SAMD5E5_CHIP_SAM_I2C_SLAVE_H
+#ifndef __ARCH_ARM_SRC_SAMD5E5_HARDWARE_SAM_I2C_SLAVE_H
+#define __ARCH_ARM_SRC_SAMD5E5_HARDWARE_SAM_I2C_SLAVE_H
 
 /********************************************************************************************
  * Included Files
@@ -42,7 +42,7 @@
 
 #include <nuttx/config.h>
 
-#include "chip/sam_memorymap.h"
+#include "hardware/sam_memorymap.h"
 
 /********************************************************************************************
  * Pre-processor Definitions
@@ -280,4 +280,4 @@
  * Public Functions
  ********************************************************************************************/
 
-#endif /* __ARCH_ARM_SRC_SAMD5E5_CHIP_SAM_I2C_SLAVE_H */
+#endif /* __ARCH_ARM_SRC_SAMD5E5_HARDWARE_SAM_I2C_SLAVE_H */
diff --git a/arch/arm/src/samd5e5/chip/sam_mclk.h b/arch/arm/src/samd5e5/hardware/sam_mclk.h
similarity index 98%
rename from arch/arm/src/samd5e5/chip/sam_mclk.h
rename to arch/arm/src/samd5e5/hardware/sam_mclk.h
index 0000f249b9..6f3eca6c0e 100644
--- a/arch/arm/src/samd5e5/chip/sam_mclk.h
+++ b/arch/arm/src/samd5e5/hardware/sam_mclk.h
@@ -1,5 +1,5 @@
 /************************************************************************************
- * arch/arm/src/samd5e5/chip/sam_mclk.h
+ * arch/arm/src/samd5e5/hardware/sam_mclk.h
  *
  *   Copyright (C) 2018 Gregory Nutt. All rights reserved.
  *   Author: Gregory Nutt <gnutt@nuttx.org>
@@ -33,8 +33,8 @@
  *
  ************************************************************************************/
 
-#ifndef __ARCH_ARM_SRC_SAMD5E5_CHIP_SAM_MCLK_H
-#define __ARCH_ARM_SRC_SAMD5E5_CHIP_SAM_MCLK_H
+#ifndef __ARCH_ARM_SRC_SAMD5E5_HARDWARE_SAM_MCLK_H
+#define __ARCH_ARM_SRC_SAMD5E5_HARDWARE_SAM_MCLK_H
 
 /************************************************************************************
  * Included Files
@@ -42,7 +42,7 @@
 
 #include <nuttx/config.h>
 
-#include "chip/sam_memorymap.h"
+#include "hardware/sam_memorymap.h"
 
 /************************************************************************************
  * Pre-processor Definitions
@@ -202,4 +202,4 @@
  * Public Functions
  ************************************************************************************/
 
-#endif /* __ARCH_ARM_SRC_SAMD5E5_CHIP_SAM_MCLK_H */
+#endif /* __ARCH_ARM_SRC_SAMD5E5_HARDWARE_SAM_MCLK_H */
diff --git a/arch/arm/src/samd5e5/chip/sam_memorymap.h b/arch/arm/src/samd5e5/hardware/sam_memorymap.h
similarity index 88%
rename from arch/arm/src/samd5e5/chip/sam_memorymap.h
rename to arch/arm/src/samd5e5/hardware/sam_memorymap.h
index ef034711f0..ef08130b63 100644
--- a/arch/arm/src/samd5e5/chip/sam_memorymap.h
+++ b/arch/arm/src/samd5e5/hardware/sam_memorymap.h
@@ -1,5 +1,5 @@
 /************************************************************************************
- * arch/arm/src/samd5e5/chip/sam_memorymap.h
+ * arch/arm/src/samd5e5/hardware/sam_memorymap.h
  *
  *   Copyright (C) 2018 Gregory Nutt. All rights reserved.
  *   Author: Gregory Nutt <gnutt@nuttx.org>
@@ -33,8 +33,8 @@
  *
  ************************************************************************************/
 
-#ifndef __ARCH_ARM_SRC_SAMD5E5_CHIP_SAM_MEMORYMAP_H
-#define __ARCH_ARM_SRC_SAMD5E5_CHIP_SAM_MEMORYMAP_H
+#ifndef __ARCH_ARM_SRC_SAMD5E5_HARDWARE_SAM_MEMORYMAP_H
+#define __ARCH_ARM_SRC_SAMD5E5_HARDWARE_SAM_MEMORYMAP_H
 
 /************************************************************************************
  * Included Files
@@ -43,10 +43,10 @@
 #include <nuttx/config.h>
 
 #if defined(CONFIG_ARCH_CHIP_SAMD5X) || defined(ARCH_CHIP_SAME5X)
-#  include "chip/samd5e5_memorymap.h"
+#  include "hardware/samd5e5_memorymap.h"
 #else
 #  error "Unsupported SAMD5/E5 family"
 #endif
 
-#endif /* __ARCH_ARM_SRC_SAMD5E5_CHIP_SAM_MEMORYMAP_H */
+#endif /* __ARCH_ARM_SRC_SAMD5E5_HARDWARE_SAM_MEMORYMAP_H */
 
diff --git a/arch/arm/src/samd5e5/chip/sam_nvmctrl.h b/arch/arm/src/samd5e5/hardware/sam_nvmctrl.h
similarity index 98%
rename from arch/arm/src/samd5e5/chip/sam_nvmctrl.h
rename to arch/arm/src/samd5e5/hardware/sam_nvmctrl.h
index f526bc152a..1d3ab602d4 100644
--- a/arch/arm/src/samd5e5/chip/sam_nvmctrl.h
+++ b/arch/arm/src/samd5e5/hardware/sam_nvmctrl.h
@@ -1,5 +1,5 @@
 /********************************************************************************************
- * arch/arm/src/samd5e5/chip/sam_nvmctrl.h
+ * arch/arm/src/samd5e5/hardware/sam_nvmctrl.h
  *
  *   Copyright (C) 2018 Gregory Nutt. All rights reserved.
  *   Author: Gregory Nutt <gnutt@nuttx.org>
@@ -33,8 +33,8 @@
  *
  ********************************************************************************************/
 
-#ifndef __ARCH_ARM_SRC_SAMD5E5_CHIP_SAM_NVMCTRL_H
-#define __ARCH_ARM_SRC_SAMD5E5_CHIP_SAM_NVMCTRL_H
+#ifndef __ARCH_ARM_SRC_SAMD5E5_HARDWARE_SAM_NVMCTRL_H
+#define __ARCH_ARM_SRC_SAMD5E5_HARDWARE_SAM_NVMCTRL_H
 
 /********************************************************************************************
  * Included Files
@@ -42,7 +42,7 @@
 
 #include <nuttx/config.h>
 
-#include "chip/sam_memorymap.h"
+#include "hardware/sam_memorymap.h"
 
 /********************************************************************************************
  * Pre-processor Definitions
@@ -250,4 +250,4 @@
  * Public Functions
  ********************************************************************************************/
 
-#endif /* __ARCH_ARM_SRC_SAMD5E5_CHIP_SAM_NVMCTRL_H */
+#endif /* __ARCH_ARM_SRC_SAMD5E5_HARDWARE_SAM_NVMCTRL_H */
diff --git a/arch/arm/src/samd5e5/chip/sam_osc32kctrl.h b/arch/arm/src/samd5e5/hardware/sam_osc32kctrl.h
similarity index 97%
rename from arch/arm/src/samd5e5/chip/sam_osc32kctrl.h
rename to arch/arm/src/samd5e5/hardware/sam_osc32kctrl.h
index 2ae23569cb..263dc4910b 100644
--- a/arch/arm/src/samd5e5/chip/sam_osc32kctrl.h
+++ b/arch/arm/src/samd5e5/hardware/sam_osc32kctrl.h
@@ -1,5 +1,5 @@
 /********************************************************************************************
- * arch/arm/src/samd5e5/chip/sam_osc32kctrl.h
+ * arch/arm/src/samd5e5/hardware/sam_osc32kctrl.h
  *
  *   Copyright (C) 2018 Gregory Nutt. All rights reserved.
  *   Author: Gregory Nutt <gnutt@nuttx.org>
@@ -33,8 +33,8 @@
  *
  ********************************************************************************************/
 
-#ifndef __ARCH_ARM_SRC_SAMD5E5_CHIP_SAM_OSC32KCTRL_H
-#define __ARCH_ARM_SRC_SAMD5E5_CHIP_SAM_OSC32KCTRL_H
+#ifndef __ARCH_ARM_SRC_SAMD5E5_HARDWARE_SAM_OSC32KCTRL_H
+#define __ARCH_ARM_SRC_SAMD5E5_HARDWARE_SAM_OSC32KCTRL_H
 
 /********************************************************************************************
  * Included Files
@@ -42,7 +42,7 @@
 
 #include <nuttx/config.h>
 
-#include "chip/sam_memorymap.h"
+#include "hardware/sam_memorymap.h"
 
 /********************************************************************************************
  * Pre-processor Definitions
@@ -149,4 +149,4 @@
  * Public Functions
  ********************************************************************************************/
 
-#endif /* __ARCH_ARM_SRC_SAMD5E5_CHIP_SAM_OSC32KCTRL_H */
+#endif /* __ARCH_ARM_SRC_SAMD5E5_HARDWARE_SAM_OSC32KCTRL_H */
diff --git a/arch/arm/src/samd5e5/chip/sam_oscctrl.h b/arch/arm/src/samd5e5/hardware/sam_oscctrl.h
similarity index 98%
rename from arch/arm/src/samd5e5/chip/sam_oscctrl.h
rename to arch/arm/src/samd5e5/hardware/sam_oscctrl.h
index e975dcb13b..9528608eea 100644
--- a/arch/arm/src/samd5e5/chip/sam_oscctrl.h
+++ b/arch/arm/src/samd5e5/hardware/sam_oscctrl.h
@@ -1,5 +1,5 @@
 /********************************************************************************************
- * arch/arm/src/samd5e5/chip/sam_oscctrl.h
+ * arch/arm/src/samd5e5/hardware/sam_oscctrl.h
  *
  *   Copyright (C) 2018 Gregory Nutt. All rights reserved.
  *   Author: Gregory Nutt <gnutt@nuttx.org>
@@ -33,8 +33,8 @@
  *
  ********************************************************************************************/
 
-#ifndef __ARCH_ARM_SRC_SAMD5E5_CHIP_SAM_OSCCTRL_H
-#define __ARCH_ARM_SRC_SAMD5E5_CHIP_SAM_OSCCTRL_H
+#ifndef __ARCH_ARM_SRC_SAMD5E5_HARDWARE_SAM_OSCCTRL_H
+#define __ARCH_ARM_SRC_SAMD5E5_HARDWARE_SAM_OSCCTRL_H
 
 /********************************************************************************************
  * Included Files
@@ -42,7 +42,7 @@
 
 #include <nuttx/config.h>
 
-#include "chip/sam_memorymap.h"
+#include "hardware/sam_memorymap.h"
 
 /********************************************************************************************
  * Pre-processor Definitions
@@ -329,4 +329,4 @@
  * Public Functions
  ********************************************************************************************/
 
-#endif /* __ARCH_ARM_SRC_SAMD5E5_CHIP_SAM_OSCCTRL_H */
+#endif /* __ARCH_ARM_SRC_SAMD5E5_HARDWARE_SAM_OSCCTRL_H */
diff --git a/arch/arm/src/samd5e5/chip/sam_pac.h b/arch/arm/src/samd5e5/hardware/sam_pac.h
similarity index 98%
rename from arch/arm/src/samd5e5/chip/sam_pac.h
rename to arch/arm/src/samd5e5/hardware/sam_pac.h
index cb76c78428..1985ef427f 100644
--- a/arch/arm/src/samd5e5/chip/sam_pac.h
+++ b/arch/arm/src/samd5e5/hardware/sam_pac.h
@@ -1,5 +1,5 @@
 /********************************************************************************************
- * arch/arm/src/samd5e5/chip/sam_pac.h
+ * arch/arm/src/samd5e5/hardware/sam_pac.h
  *
  *   Copyright (C) 2015 Gregory Nutt. All rights reserved.
  *   Author: Gregory Nutt <gnutt@nuttx.org>
@@ -33,8 +33,8 @@
  *
  ********************************************************************************************/
 
-#ifndef __ARCH_ARM_SRC_SAMD5E5_CHIP_SAM_PAC_H
-#define __ARCH_ARM_SRC_SAMD5E5_CHIP_SAM_PAC_H
+#ifndef __ARCH_ARM_SRC_SAMD5E5_HARDWARE_SAM_PAC_H
+#define __ARCH_ARM_SRC_SAMD5E5_HARDWARE_SAM_PAC_H
 
 /********************************************************************************************
  * Included Files
@@ -42,7 +42,7 @@
 
 #include <nuttx/config.h>
 
-#include "chip/sam_memorymap.h"
+#include "hardware/sam_memorymap.h"
 
 /********************************************************************************************
  * Pre-processor Definitions
@@ -265,4 +265,4 @@
  * Public Functions
  ********************************************************************************************/
 
-#endif /* __ARCH_ARM_SRC_SAMD5E5_CHIP_SAM_PAC_H */
+#endif /* __ARCH_ARM_SRC_SAMD5E5_HARDWARE_SAM_PAC_H */
diff --git a/arch/arm/src/samd5e5/chip/sam_pinmap.h b/arch/arm/src/samd5e5/hardware/sam_pinmap.h
similarity index 89%
rename from arch/arm/src/samd5e5/chip/sam_pinmap.h
rename to arch/arm/src/samd5e5/hardware/sam_pinmap.h
index 7bdc469634..ac72745021 100644
--- a/arch/arm/src/samd5e5/chip/sam_pinmap.h
+++ b/arch/arm/src/samd5e5/hardware/sam_pinmap.h
@@ -1,5 +1,5 @@
 /************************************************************************************
- * arch/arm/src/samd5e5/chip/sam_memorymap.h
+ * arch/arm/src/samd5e5/hardware/sam_memorymap.h
  *
  *   Copyright (C) 2018 Gregory Nutt. All rights reserved.
  *   Author: Gregory Nutt <gnutt@nuttx.org>
@@ -33,8 +33,8 @@
  *
  ************************************************************************************/
 
-#ifndef __ARCH_ARM_SRC_SAMD5E5_CHIP_SAM_PINMAP_H
-#define __ARCH_ARM_SRC_SAMD5E5_CHIP_SAM_PINMAP_H
+#ifndef __ARCH_ARM_SRC_SAMD5E5_HARDWARE_SAM_PINMAP_H
+#define __ARCH_ARM_SRC_SAMD5E5_HARDWARE_SAM_PINMAP_H
 
 /************************************************************************************
  * Included Files
@@ -43,9 +43,9 @@
 #include <nuttx/config.h>
 
 #if defined(CONFIG_ARCH_CHIP_SAMD5X) || defined(ARCH_CHIP_SAME5X)
-#  include "chip/samd5e5_pinmap.h"
+#  include "hardware/samd5e5_pinmap.h"
 #else
 #  error "Unsupported SAMD5/E5 family"
 #endif
 
-#endif /* __ARCH_ARM_SRC_SAMD5E5_CHIP_SAM_PINMAP_H */
+#endif /* __ARCH_ARM_SRC_SAMD5E5_HARDWARE_SAM_PINMAP_H */
diff --git a/arch/arm/src/samd5e5/chip/sam_pm.h b/arch/arm/src/samd5e5/hardware/sam_pm.h
similarity index 97%
rename from arch/arm/src/samd5e5/chip/sam_pm.h
rename to arch/arm/src/samd5e5/hardware/sam_pm.h
index f229565fd1..d1963b4789 100644
--- a/arch/arm/src/samd5e5/chip/sam_pm.h
+++ b/arch/arm/src/samd5e5/hardware/sam_pm.h
@@ -1,5 +1,5 @@
 /****************************************************************************************************
- * arch/arm/src/samd5e5/chip/sam_pm.h
+ * arch/arm/src/samd5e5/hardware/sam_pm.h
  *
  *   Copyright (C) 2018 Gregory Nutt. All rights reserved.
  *   Author: Gregory Nutt <gnutt@nuttx.org>
@@ -33,8 +33,8 @@
  *
  ****************************************************************************************************/
 
-#ifndef __ARCH_ARM_SRC_SAMD5E5_CHIP_SAM_PM_H
-#define __ARCH_ARM_SRC_SAMD5E5_CHIP_SAM_PM_H
+#ifndef __ARCH_ARM_SRC_SAMD5E5_HARDWARE_SAM_PM_H
+#define __ARCH_ARM_SRC_SAMD5E5_HARDWARE_SAM_PM_H
 
 /****************************************************************************************************
  * Included Files
@@ -42,7 +42,7 @@
 
 #include <nuttx/config.h>
 
-#include "chip/sam_memorymap.h"
+#include "hardware/sam_memorymap.h"
 
 /****************************************************************************************************
  * Pre-processor Definitions
@@ -144,4 +144,4 @@
  * Public Functions
  ****************************************************************************************************/
 
-#endif /* __ARCH_ARM_SRC_SAMD5E5_CHIP_SAM_PM_H */
+#endif /* __ARCH_ARM_SRC_SAMD5E5_HARDWARE_SAM_PM_H */
diff --git a/arch/arm/src/samd5e5/chip/sam_port.h b/arch/arm/src/samd5e5/hardware/sam_port.h
similarity index 99%
rename from arch/arm/src/samd5e5/chip/sam_port.h
rename to arch/arm/src/samd5e5/hardware/sam_port.h
index 4b684c6eae..664fe02e15 100644
--- a/arch/arm/src/samd5e5/chip/sam_port.h
+++ b/arch/arm/src/samd5e5/hardware/sam_port.h
@@ -1,5 +1,5 @@
 /********************************************************************************************
- * arch/arm/src/samd5e5/chip/sam_port.h
+ * arch/arm/src/samd5e5/hardware/sam_port.h
  *
  *   Copyright (C) 2015 Gregory Nutt. All rights reserved.
  *   Author: Gregory Nutt <gnutt@nuttx.org>
@@ -33,8 +33,8 @@
  *
  ********************************************************************************************/
 
-#ifndef __ARCH_ARM_SRC_SAMD5E5_CHIP_SAM_PORT_H
-#define __ARCH_ARM_SRC_SAMD5E5_CHIP_SAM_PORT_H
+#ifndef __ARCH_ARM_SRC_SAMD5E5_HARDWARE_SAM_PORT_H
+#define __ARCH_ARM_SRC_SAMD5E5_HARDWARE_SAM_PORT_H
 
 /********************************************************************************************
  * Included Files
@@ -42,7 +42,7 @@
 
 #include <nuttx/config.h>
 
-#include "chip/sam_memorymap.h"
+#include "hardware/sam_memorymap.h"
 
 /********************************************************************************************
  * Pre-processor Definitions
@@ -523,4 +523,4 @@
  * Public Functions
  ********************************************************************************************/
 
-#endif /* __ARCH_ARM_SRC_SAMD5E5_CHIP_SAM_PORT_H */
+#endif /* __ARCH_ARM_SRC_SAMD5E5_HARDWARE_SAM_PORT_H */
diff --git a/arch/arm/src/samd5e5/chip/sam_rstc.h b/arch/arm/src/samd5e5/hardware/sam_rstc.h
similarity index 94%
rename from arch/arm/src/samd5e5/chip/sam_rstc.h
rename to arch/arm/src/samd5e5/hardware/sam_rstc.h
index e984c3c4ed..0be89ceb84 100644
--- a/arch/arm/src/samd5e5/chip/sam_rstc.h
+++ b/arch/arm/src/samd5e5/hardware/sam_rstc.h
@@ -1,5 +1,5 @@
 /********************************************************************************************
- * arch/arm/src/samd5e5/chip/sam_rstc.h
+ * arch/arm/src/samd5e5/hardware/sam_rstc.h
  *
  *   Copyright (C) 2015 Gregory Nutt. All rights reserved.
  *   Author: Gregory Nutt <gnutt@nuttx.org>
@@ -33,8 +33,8 @@
  *
  ********************************************************************************************/
 
-#ifndef __ARCH_ARM_SRC_SAMD5E5_CHIP_SAM_RSTC_H
-#define __ARCH_ARM_SRC_SAMD5E5_CHIP_SAM_RSTC_H
+#ifndef __ARCH_ARM_SRC_SAMD5E5_HARDWARE_SAM_RSTC_H
+#define __ARCH_ARM_SRC_SAMD5E5_HARDWARE_SAM_RSTC_H
 
 /********************************************************************************************
  * Included Files
@@ -42,7 +42,7 @@
 
 #include <nuttx/config.h>
 
-#include "chip/sam_memorymap.h"
+#include "hardware/sam_memorymap.h"
 
 /********************************************************************************************
  * Pre-processor Definitions
@@ -88,4 +88,4 @@
  * Public Functions
  ********************************************************************************************/
 
-#endif /* __ARCH_ARM_SRC_SAMD5E5_CHIP_SAM_RSTC_H */
+#endif /* __ARCH_ARM_SRC_SAMD5E5_HARDWARE_SAM_RSTC_H */
diff --git a/arch/arm/src/samd5e5/chip/sam_spi.h b/arch/arm/src/samd5e5/hardware/sam_spi.h
similarity index 98%
rename from arch/arm/src/samd5e5/chip/sam_spi.h
rename to arch/arm/src/samd5e5/hardware/sam_spi.h
index fe5ff0287e..bd71206212 100644
--- a/arch/arm/src/samd5e5/chip/sam_spi.h
+++ b/arch/arm/src/samd5e5/hardware/sam_spi.h
@@ -1,5 +1,5 @@
 /********************************************************************************************
- * arch/arm/src/samd5e5/chip/sam_spi.h
+ * arch/arm/src/samd5e5/hardware/sam_spi.h
  *
  *   Copyright (C) 2018 Gregory Nutt. All rights reserved.
  *   Author: Gregory Nutt <gnutt@nuttx.org>
@@ -33,8 +33,8 @@
  *
  ********************************************************************************************/
 
-#ifndef __ARCH_ARM_SRC_SAMD5E5_CHIP_SAM_SPI_H
-#define __ARCH_ARM_SRC_SAMD5E5_CHIP_SAM_SPI_H
+#ifndef __ARCH_ARM_SRC_SAMD5E5_HARDWARE_SAM_SPI_H
+#define __ARCH_ARM_SRC_SAMD5E5_HARDWARE_SAM_SPI_H
 
 /********************************************************************************************
  * Included Files
@@ -42,7 +42,7 @@
 
 #include <nuttx/config.h>
 
-#include "chip/sam_memorymap.h"
+#include "hardware/sam_memorymap.h"
 
 /********************************************************************************************
  * Pre-processor Definitions
@@ -302,4 +302,4 @@
  * Public Functions
  ********************************************************************************************/
 
-#endif /* __ARCH_ARM_SRC_SAMD5E5_CHIP_SAM_SPI_H */
+#endif /* __ARCH_ARM_SRC_SAMD5E5_HARDWARE_SAM_SPI_H */
diff --git a/arch/arm/src/samd5e5/chip/sam_supc.h b/arch/arm/src/samd5e5/hardware/sam_supc.h
similarity index 98%
rename from arch/arm/src/samd5e5/chip/sam_supc.h
rename to arch/arm/src/samd5e5/hardware/sam_supc.h
index fda43b75f0..a47c2d707c 100644
--- a/arch/arm/src/samd5e5/chip/sam_supc.h
+++ b/arch/arm/src/samd5e5/hardware/sam_supc.h
@@ -1,5 +1,5 @@
 /********************************************************************************************
- * arch/arm/src/samd5e5/chip/sam_supc.h
+ * arch/arm/src/samd5e5/hardware/sam_supc.h
  *
  *   Copyright (C) 2018 Gregory Nutt. All rights reserved.
  *   Author: Gregory Nutt <gnutt@nuttx.org>
@@ -33,8 +33,8 @@
  *
  ********************************************************************************************/
 
-#ifndef __ARCH_ARM_SRC_SAMD5E5_CHIP_SAM_SUPC_H
-#define __ARCH_ARM_SRC_SAMD5E5_CHIP_SAM_SUPC_H
+#ifndef __ARCH_ARM_SRC_SAMD5E5_HARDWARE_SAM_SUPC_H
+#define __ARCH_ARM_SRC_SAMD5E5_HARDWARE_SAM_SUPC_H
 
 /********************************************************************************************
  * Included Files
@@ -228,4 +228,4 @@
  * Public Functions
  ********************************************************************************************/
 
-#endif /* __ARCH_ARM_SRC_SAMD5E5_CHIP_SAM_SUPC_H */
+#endif /* __ARCH_ARM_SRC_SAMD5E5_HARDWARE_SAM_SUPC_H */
diff --git a/arch/arm/src/samd5e5/chip/sam_trng.h b/arch/arm/src/samd5e5/hardware/sam_trng.h
similarity index 94%
rename from arch/arm/src/samd5e5/chip/sam_trng.h
rename to arch/arm/src/samd5e5/hardware/sam_trng.h
index b3b7d8a528..71cff01fd2 100644
--- a/arch/arm/src/samd5e5/chip/sam_trng.h
+++ b/arch/arm/src/samd5e5/hardware/sam_trng.h
@@ -1,5 +1,5 @@
 /********************************************************************************************
- * arch/arm/src/samd5e5/chip/sam_trng.h
+ * arch/arm/src/samd5e5/hardware/sam_trng.h
  *
  *   Copyright (C) 2018 Gregory Nutt. All rights reserved.
  *   Author: Gregory Nutt <gnutt@nuttx.org>
@@ -33,8 +33,8 @@
  *
  ********************************************************************************************/
 
-#ifndef __ARCH_ARM_SRC_SAMD5E5_CHIP_SAM_TRNG_H
-#define __ARCH_ARM_SRC_SAMD5E5_CHIP_SAM_TRNG_H
+#ifndef __ARCH_ARM_SRC_SAMD5E5_HARDWARE_SAM_TRNG_H
+#define __ARCH_ARM_SRC_SAMD5E5_HARDWARE_SAM_TRNG_H
 
 /********************************************************************************************
  * Included Files
@@ -42,7 +42,7 @@
 
 #include <nuttx/config.h>
 
-#include "chip/sam_memorymap.h"
+#include "hardware/sam_memorymap.h"
 
 /********************************************************************************************
  * Pre-processor Definitions
@@ -93,4 +93,4 @@
  * Public Functions
  ********************************************************************************************/
 
-#endif /* __ARCH_ARM_SRC_SAMD5E5_CHIP_SAM_TRNG_H */
+#endif /* __ARCH_ARM_SRC_SAMD5E5_HARDWARE_SAM_TRNG_H */
diff --git a/arch/arm/src/samd5e5/chip/sam_usart.h b/arch/arm/src/samd5e5/hardware/sam_usart.h
similarity index 99%
rename from arch/arm/src/samd5e5/chip/sam_usart.h
rename to arch/arm/src/samd5e5/hardware/sam_usart.h
index ca82859366..981dc7b4c0 100644
--- a/arch/arm/src/samd5e5/chip/sam_usart.h
+++ b/arch/arm/src/samd5e5/hardware/sam_usart.h
@@ -1,5 +1,5 @@
 /********************************************************************************************
- * arch/arm/src/samd5e5/chip/sam_usart.h
+ * arch/arm/src/samd5e5/hardware/sam_usart.h
  *
  *   Copyright (C) 2018 Gregory Nutt. All rights reserved.
  *   Author: Gregory Nutt <gnutt@nuttx.org>
@@ -33,8 +33,8 @@
  *
  ********************************************************************************************/
 
-#ifndef __ARCH_ARM_SRC_SAMD5E5_CHIP_SAM_USART_H
-#define __ARCH_ARM_SRC_SAMD5E5_CHIP_SAM_USART_H
+#ifndef __ARCH_ARM_SRC_SAMD5E5_HARDWARE_SAM_USART_H
+#define __ARCH_ARM_SRC_SAMD5E5_HARDWARE_SAM_USART_H
 
 /********************************************************************************************
  * Included Files
@@ -42,7 +42,7 @@
 
 #include <nuttx/config.h>
 
-#include "chip/sam_memorymap.h"
+#include "hardware/sam_memorymap.h"
 
 /********************************************************************************************
  * Pre-processor Definitions
@@ -388,4 +388,4 @@
  * Public Functions
  ********************************************************************************************/
 
-#endif /* __ARCH_ARM_SRC_SAMD5E5_CHIP_SAM_USART_H */
+#endif /* __ARCH_ARM_SRC_SAMD5E5_HARDWARE_SAM_USART_H */
diff --git a/arch/arm/src/samd5e5/chip/sam_usb.h b/arch/arm/src/samd5e5/hardware/sam_usb.h
similarity index 99%
rename from arch/arm/src/samd5e5/chip/sam_usb.h
rename to arch/arm/src/samd5e5/hardware/sam_usb.h
index a64a1ff1f8..5c100e34f0 100644
--- a/arch/arm/src/samd5e5/chip/sam_usb.h
+++ b/arch/arm/src/samd5e5/hardware/sam_usb.h
@@ -1,5 +1,5 @@
 /********************************************************************************************
- * arch/arm/src/samd5e5/chip/sam_usb.h
+ * arch/arm/src/samd5e5/hardware/sam_usb.h
  *
  *   Copyright (C) 2018 Gregory Nutt. All rights reserved.
  *   Author: Gregory Nutt <gnutt@nuttx.org>
@@ -34,8 +34,8 @@
  ********************************************************************************************/
 
 
-#ifndef __ARCH_ARM_SRC_SAMD5E5_CHIP_SAM_USB_H
-#define __ARCH_ARM_SRC_SAMD5E5_CHIP_SAM_USB_H
+#ifndef __ARCH_ARM_SRC_SAMD5E5_HARDWARE_SAM_USB_H
+#define __ARCH_ARM_SRC_SAMD5E5_HARDWARE_SAM_USB_H
 
 /********************************************************************************************
  * Included Files
@@ -630,4 +630,4 @@ struct usbhost_pipedesc_s
  * Public Functions
  ********************************************************************************************/
 
-#endif /* __ARCH_ARM_SRC_SAMD5E5_CHIP_SAM_USB_H */
+#endif /* __ARCH_ARM_SRC_SAMD5E5_HARDWARE_SAM_USB_H */
diff --git a/arch/arm/src/samd5e5/chip/sam_wdt.h b/arch/arm/src/samd5e5/hardware/sam_wdt.h
similarity index 97%
rename from arch/arm/src/samd5e5/chip/sam_wdt.h
rename to arch/arm/src/samd5e5/hardware/sam_wdt.h
index 443aa160f1..53e2afd03f 100644
--- a/arch/arm/src/samd5e5/chip/sam_wdt.h
+++ b/arch/arm/src/samd5e5/hardware/sam_wdt.h
@@ -1,5 +1,5 @@
 /********************************************************************************************
- * arch/arm/src/samd5e5/chip/sam_wdt.h
+ * arch/arm/src/samd5e5/hardware/sam_wdt.h
  *
  *   Copyright (C) 2018 Gregory Nutt. All rights reserved.
  *   Author: Gregory Nutt <gnutt@nuttx.org>
@@ -33,8 +33,8 @@
  *
  ********************************************************************************************/
 
-#ifndef __ARCH_ARM_SRC_SAMD5E5_CHIP_SAM_WDT_H
-#define __ARCH_ARM_SRC_SAMD5E5_CHIP_SAM_WDT_H
+#ifndef __ARCH_ARM_SRC_SAMD5E5_HARDWARE_SAM_WDT_H
+#define __ARCH_ARM_SRC_SAMD5E5_HARDWARE_SAM_WDT_H
 
 /********************************************************************************************
  * Included Files
@@ -42,7 +42,7 @@
 
 #include <nuttx/config.h>
 
-#include "chip/sam_memorymap.h"
+#include "hardware/sam_memorymap.h"
 
 /********************************************************************************************
  * Pre-processor Definitions
@@ -157,4 +157,4 @@
  * Public Functions
  ********************************************************************************************/
 
-#endif /* __ARCH_ARM_SRC_SAMD5E5_CHIP_SAM_WDT_H */
+#endif /* __ARCH_ARM_SRC_SAMD5E5_HARDWARE_SAM_WDT_H */
diff --git a/arch/arm/src/samd5e5/chip/samd5e5_memorymap.h b/arch/arm/src/samd5e5/hardware/samd5e5_memorymap.h
similarity index 97%
rename from arch/arm/src/samd5e5/chip/samd5e5_memorymap.h
rename to arch/arm/src/samd5e5/hardware/samd5e5_memorymap.h
index 992a190177..28d4ed6460 100644
--- a/arch/arm/src/samd5e5/chip/samd5e5_memorymap.h
+++ b/arch/arm/src/samd5e5/hardware/samd5e5_memorymap.h
@@ -1,5 +1,5 @@
 /********************************************************************************************
- * arch/arm/src/samd5e5/chip/samd5e5_memorymap.h
+ * arch/arm/src/samd5e5/hardware/samd5e5_memorymap.h
  *
  *   Copyright (C) 2018 Gregory Nutt. All rights reserved.
  *   Author: Gregory Nutt <gnutt@nuttx.org>
@@ -33,8 +33,8 @@
  *
  ********************************************************************************************/
 
-#ifndef __ARCH_ARM_SRC_SAMD5E5_CHIP_SAMD5E5_MEMORYMAP_H
-#define __ARCH_ARM_SRC_SAMD5E5_CHIP_SAMD5E5_MEMORYMAP_H
+#ifndef __ARCH_ARM_SRC_SAMD5E5_HARDWARE_SAMD5E5_MEMORYMAP_H
+#define __ARCH_ARM_SRC_SAMD5E5_HARDWARE_SAMD5E5_MEMORYMAP_H
 
 /********************************************************************************************
  * Included Files
@@ -163,4 +163,4 @@
  * Public Functions
  ********************************************************************************************/
 
-#endif /* __ARCH_ARM_SRC_SAMD5E5_CHIP_SAMD5E5_MEMORYMAP_H */
+#endif /* __ARCH_ARM_SRC_SAMD5E5_HARDWARE_SAMD5E5_MEMORYMAP_H */
diff --git a/arch/arm/src/samd5e5/chip/samd5e5_pinmap.h b/arch/arm/src/samd5e5/hardware/samd5e5_pinmap.h
similarity index 99%
rename from arch/arm/src/samd5e5/chip/samd5e5_pinmap.h
rename to arch/arm/src/samd5e5/hardware/samd5e5_pinmap.h
index f4d75df451..59133ffccc 100644
--- a/arch/arm/src/samd5e5/chip/samd5e5_pinmap.h
+++ b/arch/arm/src/samd5e5/hardware/samd5e5_pinmap.h
@@ -1,5 +1,5 @@
 /********************************************************************************************
- * arch/arm/src/samd5e5/chip/samd5e5_pinmap.h
+ * arch/arm/src/samd5e5/hardware/samd5e5_pinmap.h
  *
  *   Copyright (C) 2018 Gregory Nutt. All rights reserved.
  *   Author: Gregory Nutt <gnutt@nuttx.org>
@@ -33,8 +33,8 @@
  *
  ********************************************************************************************/
 
-#ifndef __ARCH_ARM_SRC_SAMD5E5_CHIP_SAMD5E5_PINMAP_H
-#define __ARCH_ARM_SRC_SAMD5E5_CHIP_SAMD5E5_PINMAP_H
+#ifndef __ARCH_ARM_SRC_SAMD5E5_HARDWARE_SAMD5E5_PINMAP_H
+#define __ARCH_ARM_SRC_SAMD5E5_HARDWARE_SAMD5E5_PINMAP_H
 
 /********************************************************************************************
  * Included Files
@@ -787,4 +787,4 @@
  * Public Functions
  ********************************************************************************************/
 
-#endif /* __ARCH_ARM_SRC_SAMD5E5_CHIP_SAMD5E5_PINMAP_H */
+#endif /* __ARCH_ARM_SRC_SAMD5E5_HARDWARE_SAMD5E5_PINMAP_H */
diff --git a/arch/arm/src/samd5e5/sam_clockconfig.c b/arch/arm/src/samd5e5/sam_clockconfig.c
index 9704758e03..716d745f15 100644
--- a/arch/arm/src/samd5e5/sam_clockconfig.c
+++ b/arch/arm/src/samd5e5/sam_clockconfig.c
@@ -45,12 +45,12 @@
 
 #include "up_arch.h"
 
-#include "chip/sam_pm.h"
-#include "chip/sam_supc.h"
-#include "chip/sam_oscctrl.h"
-#include "chip/sam_osc32kctrl.h"
-#include "chip/sam_gclk.h"
-#include "chip/sam_nvmctrl.h"
+#include "hardware/sam_pm.h"
+#include "hardware/sam_supc.h"
+#include "hardware/sam_oscctrl.h"
+#include "hardware/sam_osc32kctrl.h"
+#include "hardware/sam_gclk.h"
+#include "hardware/sam_nvmctrl.h"
 #include "sam_gclk.h"
 
 #include "sam_periphclks.h"
diff --git a/arch/arm/src/samd5e5/sam_cmcc.c b/arch/arm/src/samd5e5/sam_cmcc.c
index 182a237c8a..747c0d0bdd 100644
--- a/arch/arm/src/samd5e5/sam_cmcc.c
+++ b/arch/arm/src/samd5e5/sam_cmcc.c
@@ -44,7 +44,7 @@
 #include <assert.h>
 
 #include "up_arch.h"
-#include "chip/sam_cmcc.h"
+#include "hardware/sam_cmcc.h"
 #include "sam_cmcc.h"
 
 #ifdef CONFIG_SAMD5E5_CMCC
diff --git a/arch/arm/src/samd5e5/sam_dmac.h b/arch/arm/src/samd5e5/sam_dmac.h
index 64b60b8e87..2feebc96ff 100644
--- a/arch/arm/src/samd5e5/sam_dmac.h
+++ b/arch/arm/src/samd5e5/sam_dmac.h
@@ -44,7 +44,7 @@
 
 #include <stdint.h>
 
-#include "chip/sam_dmac.h"
+#include "hardware/sam_dmac.h"
 
 /************************************************************************************
  * Pre-processor Definitions
diff --git a/arch/arm/src/samd5e5/sam_eic.h b/arch/arm/src/samd5e5/sam_eic.h
index 54084fa0df..6b32abd40b 100644
--- a/arch/arm/src/samd5e5/sam_eic.h
+++ b/arch/arm/src/samd5e5/sam_eic.h
@@ -47,7 +47,7 @@
 
 #include "sam_config.h"
 #include "sam_port.h"
-#include "chip/sam_eic.h"
+#include "hardware/sam_eic.h"
 
 #ifdef CONFIG_SAMD5E5_EIC
 
diff --git a/arch/arm/src/samd5e5/sam_gclk.h b/arch/arm/src/samd5e5/sam_gclk.h
index 58391a5813..dbfa61692a 100644
--- a/arch/arm/src/samd5e5/sam_gclk.h
+++ b/arch/arm/src/samd5e5/sam_gclk.h
@@ -47,7 +47,7 @@
 
 #include "up_arch.h"
 #include "sam_config.h"
-#include "chip/sam_gclk.h"
+#include "hardware/sam_gclk.h"
 
 /****************************************************************************
  * Pre-processor Definitions
diff --git a/arch/arm/src/samd5e5/sam_i2c_master.c b/arch/arm/src/samd5e5/sam_i2c_master.c
index 3f9f283296..66ef69adfe 100644
--- a/arch/arm/src/samd5e5/sam_i2c_master.c
+++ b/arch/arm/src/samd5e5/sam_i2c_master.c
@@ -60,8 +60,8 @@
 #include "up_internal.h"
 #include "up_arch.h"
 
-#include "chip/sam_i2c_master.h"
-#include "chip/sam_pinmap.h"
+#include "hardware/sam_i2c_master.h"
+#include "hardware/sam_pinmap.h"
 #include "sam_gclk.h"
 #include "sam_port.h"
 #include "sam_sercom.h"
diff --git a/arch/arm/src/samd5e5/sam_lowputc.c b/arch/arm/src/samd5e5/sam_lowputc.c
index 1eebdd7017..b6e3424cb9 100644
--- a/arch/arm/src/samd5e5/sam_lowputc.c
+++ b/arch/arm/src/samd5e5/sam_lowputc.c
@@ -46,7 +46,7 @@
 #include <nuttx/irq.h>
 
 #include "up_arch.h"
-#include "chip/sam_pm.h"
+#include "hardware/sam_pm.h"
 #include "sam_config.h"
 #include "sam_gclk.h"
 #include "sam_sercom.h"
diff --git a/arch/arm/src/samd5e5/sam_periphclks.h b/arch/arm/src/samd5e5/sam_periphclks.h
index 1e05931380..30cb1364f7 100644
--- a/arch/arm/src/samd5e5/sam_periphclks.h
+++ b/arch/arm/src/samd5e5/sam_periphclks.h
@@ -42,7 +42,7 @@
 
 #include <nuttx/config.h>
 
-#include "chip/sam_mclk.h"
+#include "hardware/sam_mclk.h"
 
 /****************************************************************************
  * Pre-processor Definitions
diff --git a/arch/arm/src/samd5e5/sam_port.h b/arch/arm/src/samd5e5/sam_port.h
index b3fe29e292..89af653813 100644
--- a/arch/arm/src/samd5e5/sam_port.h
+++ b/arch/arm/src/samd5e5/sam_port.h
@@ -49,7 +49,7 @@
 
 #include <nuttx/irq.h>
 
-#include "chip/sam_port.h"
+#include "hardware/sam_port.h"
 
 /****************************************************************************
  * Pre-processor Declarations
diff --git a/arch/arm/src/samd5e5/sam_sercom.c b/arch/arm/src/samd5e5/sam_sercom.c
index a50d1a61e8..584ebe5844 100644
--- a/arch/arm/src/samd5e5/sam_sercom.c
+++ b/arch/arm/src/samd5e5/sam_sercom.c
@@ -48,7 +48,7 @@
 #include "sam_config.h"
 
 #include "chip.h"
-#include "chip/sam_pm.h"
+#include "hardware/sam_pm.h"
 #include "sam_gclk.h"
 #include "sam_sercom.h"
 
diff --git a/arch/arm/src/samd5e5/sam_spi.c b/arch/arm/src/samd5e5/sam_spi.c
index 6bd0409918..9d3e7e6779 100644
--- a/arch/arm/src/samd5e5/sam_spi.c
+++ b/arch/arm/src/samd5e5/sam_spi.c
@@ -58,7 +58,7 @@
 #include "up_internal.h"
 #include "up_arch.h"
 
-#include "chip/sam_pinmap.h"
+#include "hardware/sam_pinmap.h"
 #include "sam_gclk.h"
 #include "sam_port.h"
 #include "sam_sercom.h"
diff --git a/arch/arm/src/samd5e5/sam_spi.h b/arch/arm/src/samd5e5/sam_spi.h
index b1b1838205..dba7a6ab13 100644
--- a/arch/arm/src/samd5e5/sam_spi.h
+++ b/arch/arm/src/samd5e5/sam_spi.h
@@ -40,7 +40,7 @@
 
 #include <stdint.h>
 #include <stdbool.h>
-#include "chip/sam_spi.h"
+#include "hardware/sam_spi.h"
 
 #ifdef SAMD5E5_HAVE_SPI
 
diff --git a/arch/arm/src/samd5e5/sam_usart.c b/arch/arm/src/samd5e5/sam_usart.c
index 0752681931..2f6b273ab2 100644
--- a/arch/arm/src/samd5e5/sam_usart.c
+++ b/arch/arm/src/samd5e5/sam_usart.c
@@ -45,8 +45,8 @@
 #include <arch/irq.h>
 #include <arch/samd5e5/chip.h>
 
-#include "chip/sam_memorymap.h"
-#include "chip/sam_pinmap.h"
+#include "hardware/sam_memorymap.h"
+#include "hardware/sam_pinmap.h"
 #include "sam_gclk.h"
 #include "sam_sercom.h"
 #include "sam_usart.h"
diff --git a/arch/arm/src/samd5e5/sam_usart.h b/arch/arm/src/samd5e5/sam_usart.h
index 78259ec8d5..b88f6f8ad1 100644
--- a/arch/arm/src/samd5e5/sam_usart.h
+++ b/arch/arm/src/samd5e5/sam_usart.h
@@ -48,7 +48,7 @@
 #include <arch/chip/chip.h>
 
 #include "up_arch.h"
-#include "chip/sam_usart.h"
+#include "hardware/sam_usart.h"
 
 #include "sam_config.h"
 #include "sam_port.h"
diff --git a/arch/arm/src/samd5e5/sam_usb.c b/arch/arm/src/samd5e5/sam_usb.c
index 983feb761f..41f9a28b02 100644
--- a/arch/arm/src/samd5e5/sam_usb.c
+++ b/arch/arm/src/samd5e5/sam_usb.c
@@ -106,8 +106,8 @@
 #include "up_internal.h"
 
 #include "chip.h"
-#include "chip/sam_pinmap.h"
-#include "chip/sam_fuses.h"
+#include "hardware/sam_pinmap.h"
+#include "hardware/sam_fuses.h"
 #include "sam_gclk.h"
 #include "sam_port.h"
 #include "sam_periphclks.h"
diff --git a/arch/arm/src/samd5e5/sam_usb.h b/arch/arm/src/samd5e5/sam_usb.h
index 50e6fb357f..490827d4f2 100644
--- a/arch/arm/src/samd5e5/sam_usb.h
+++ b/arch/arm/src/samd5e5/sam_usb.h
@@ -49,7 +49,7 @@
 #include <stdint.h>
 
 #include "chip.h"
-#include "chip/sam_usb.h"
+#include "hardware/sam_usb.h"
 
 /*****************************************************************************
  * Public Function Prototypes