diff --git a/arch/arm/src/sama5/chip.h b/arch/arm/src/sama5/chip.h
index ab2bd4d681..259c8b2e04 100644
--- a/arch/arm/src/sama5/chip.h
+++ b/arch/arm/src/sama5/chip.h
@@ -46,7 +46,7 @@
 #  include <arch/sama5/chip.h>
 #endif
 
-#include "chip/sam_memorymap.h"
+#include "hardware/sam_memorymap.h"
 
 /************************************************************************************
  * Pre-processor Definitions
diff --git a/arch/arm/src/sama5/chip/_sama5d2x_memorymap.h b/arch/arm/src/sama5/hardware/_sama5d2x_memorymap.h
similarity index 99%
rename from arch/arm/src/sama5/chip/_sama5d2x_memorymap.h
rename to arch/arm/src/sama5/hardware/_sama5d2x_memorymap.h
index 03a6ecfee6..ce9bd2263c 100644
--- a/arch/arm/src/sama5/chip/_sama5d2x_memorymap.h
+++ b/arch/arm/src/sama5/hardware/_sama5d2x_memorymap.h
@@ -1,5 +1,5 @@
 /************************************************************************************
- * arch/arm/src/sama5/_sama5d2x_memorymap.h
+ * arch/arm/src/sama5/hardware/_sama5d2x_memorymap.h
  *
  *   Copyright (C) 2015 Gregory Nutt. All rights reserved.
  *   Author: Gregory Nutt <gnutt@nuttx.org>
@@ -33,8 +33,8 @@
  *
  ************************************************************************************/
 
-#ifndef __ARCH_ARM_SRC_SAMA5_CHIP__SAMA5D2X_MEMORYMAP_H
-#define __ARCH_ARM_SRC_SAMA5_CHIP__SAMA5D2X_MEMORYMAP_H
+#ifndef __ARCH_ARM_SRC_SAMA5_HARDWARE__SAMA5D2X_MEMORYMAP_H
+#define __ARCH_ARM_SRC_SAMA5_HARDWARE__SAMA5D2X_MEMORYMAP_H
 
 /************************************************************************************
  * Included Files
@@ -884,4 +884,4 @@
  * Public Functions
  ************************************************************************************/
 
-#endif /* __ARCH_ARM_SRC_SAMA5_CHIP__SAMA5D2X_MEMORYMAP_H */
+#endif /* __ARCH_ARM_SRC_SAMA5_HARDWARE__SAMA5D2X_MEMORYMAP_H */
diff --git a/arch/arm/src/sama5/chip/_sama5d2x_pinmap.h b/arch/arm/src/sama5/hardware/_sama5d2x_pinmap.h
similarity index 99%
rename from arch/arm/src/sama5/chip/_sama5d2x_pinmap.h
rename to arch/arm/src/sama5/hardware/_sama5d2x_pinmap.h
index 1b4553cdc0..1c9d4d5992 100644
--- a/arch/arm/src/sama5/chip/_sama5d2x_pinmap.h
+++ b/arch/arm/src/sama5/hardware/_sama5d2x_pinmap.h
@@ -1,5 +1,5 @@
 /************************************************************************************************************
- * arch/arm/src/sama5/chip/_sama5d2x_pinmap.h
+ * arch/arm/src/sama5/hardware/_sama5d2x_pinmap.h
  *
  *   Copyright (C) 2015 Gregory Nutt. All rights reserved.
  *   Author: Gregory Nutt <gnutt@nuttx.org>
@@ -33,8 +33,8 @@
  *
  ************************************************************************************************************/
 
-#ifndef __ARCH_ARM_SRC_SAMA5_CHIP__SAMA5D2X_PINMAP_H
-#define __ARCH_ARM_SRC_SAMA5_CHIP__SAMA5D2X_PINMAP_H
+#ifndef __ARCH_ARM_SRC_SAMA5_HARDWARE__SAMA5D2X_PINMAP_H
+#define __ARCH_ARM_SRC_SAMA5_HARDWARE__SAMA5D2X_PINMAP_H
 
 /************************************************************************************************************
  * Included Files
@@ -801,4 +801,4 @@
 #define PIO_UTMI_RXERR       (PIO_PERIPHC | PIO_CFG_DEFAULT | PIO_PORT_PIOD | PIO_PIN8)
 #define PIO_UTMI_RXVAL       (PIO_PERIPHC | PIO_CFG_DEFAULT | PIO_PORT_PIOD | PIO_PIN7)
 
-#endif /* __ARCH_ARM_SRC_SAMA5_CHIP__SAMA5D2X_PINMAP_H */
+#endif /* __ARCH_ARM_SRC_SAMA5_HARDWARE__SAMA5D2X_PINMAP_H */
diff --git a/arch/arm/src/sama5/chip/_sama5d2x_pio.h b/arch/arm/src/sama5/hardware/_sama5d2x_pio.h
similarity index 99%
rename from arch/arm/src/sama5/chip/_sama5d2x_pio.h
rename to arch/arm/src/sama5/hardware/_sama5d2x_pio.h
index a821e56d84..48273c0773 100644
--- a/arch/arm/src/sama5/chip/_sama5d2x_pio.h
+++ b/arch/arm/src/sama5/hardware/_sama5d2x_pio.h
@@ -34,8 +34,8 @@
  *
  ****************************************************************************************/
 
-#ifndef __ARCH_ARM_SRC_SAMA5_CHIP__SAMA5D2X_PIO_H
-#define __ARCH_ARM_SRC_SAMA5_CHIP__SAMA5D2X_PIO_H
+#ifndef __ARCH_ARM_SRC_SAMA5_HARDWARE__SAMA5D2X_PIO_H
+#define __ARCH_ARM_SRC_SAMA5_HARDWARE__SAMA5D2X_PIO_H
 
 /****************************************************************************************
  * Included Files
@@ -44,7 +44,7 @@
 #include <nuttx/config.h>
 
 #include "chip.h"
-#include "chip/sam_memorymap.h"
+#include "hardware/sam_memorymap.h"
 
 /****************************************************************************************
  * Pre-processor Definitions
@@ -334,4 +334,4 @@
  * Public Functions
  ****************************************************************************************/
 
-#endif /* __ARCH_ARM_SRC_SAMA5_CHIP__SAMA5D2X_PIO_H */
+#endif /* __ARCH_ARM_SRC_SAMA5_HARDWARE__SAMA5D2X_PIO_H */
diff --git a/arch/arm/src/sama5/chip/_sama5d3x4x_pio.h b/arch/arm/src/sama5/hardware/_sama5d3x4x_pio.h
similarity index 99%
rename from arch/arm/src/sama5/chip/_sama5d3x4x_pio.h
rename to arch/arm/src/sama5/hardware/_sama5d3x4x_pio.h
index 0516d6981e..75668484fb 100644
--- a/arch/arm/src/sama5/chip/_sama5d3x4x_pio.h
+++ b/arch/arm/src/sama5/hardware/_sama5d3x4x_pio.h
@@ -1,5 +1,5 @@
 /****************************************************************************************
- * arch/arm/src/sama5/chip/_sama5d3x4x_pio.h
+ * arch/arm/src/sama5/hardware/_sama5d3x4x_pio.h
  * Parallel Input/Output (PIO) Controller definitions for the SAMA5D3x and SAMA5D4x
  *
  *   Copyright (C) 2013-2014 Gregory Nutt. All rights reserved.
@@ -34,8 +34,8 @@
  *
  ****************************************************************************************/
 
-#ifndef __ARCH_ARM_SRC_SAMA5_CHIP__SAMA5D3DX4X_PIO_H
-#define __ARCH_ARM_SRC_SAMA5_CHIP__SAMA5D3DX4X_PIO_H
+#ifndef __ARCH_ARM_SRC_SAMA5_HARDWARE__SAMA5D3DX4X_PIO_H
+#define __ARCH_ARM_SRC_SAMA5_HARDWARE__SAMA5D3DX4X_PIO_H
 
 /****************************************************************************************
  * Included Files
@@ -44,7 +44,7 @@
 #include <nuttx/config.h>
 
 #include "chip.h"
-#include "chip/sam_memorymap.h"
+#include "hardware/sam_memorymap.h"
 
 /****************************************************************************************
  * Pre-processor Definitions
@@ -645,4 +645,4 @@
  * Public Functions
  ****************************************************************************************/
 
-#endif /* __ARCH_ARM_SRC_SAMA5_CHIP__SAMA5D3DX4X_PIO_H */
+#endif /* __ARCH_ARM_SRC_SAMA5_HARDWARE__SAMA5D3DX4X_PIO_H */
diff --git a/arch/arm/src/sama5/chip/_sama5d3x_memorymap.h b/arch/arm/src/sama5/hardware/_sama5d3x_memorymap.h
similarity index 99%
rename from arch/arm/src/sama5/chip/_sama5d3x_memorymap.h
rename to arch/arm/src/sama5/hardware/_sama5d3x_memorymap.h
index ecac5f2056..a0626540fb 100644
--- a/arch/arm/src/sama5/chip/_sama5d3x_memorymap.h
+++ b/arch/arm/src/sama5/hardware/_sama5d3x_memorymap.h
@@ -1,5 +1,5 @@
 /************************************************************************************
- * arch/arm/src/sama5/_sama5d3x_memorymap.h
+ * arch/arm/src/sama5/hardware/_sama5d3x_memorymap.h
  *
  *   Copyright (C) 2013 Gregory Nutt. All rights reserved.
  *   Author: Gregory Nutt <gnutt@nuttx.org>
@@ -33,8 +33,8 @@
  *
  ************************************************************************************/
 
-#ifndef __ARCH_ARM_SRC_SAMA5_CHIP__SAMA5D3X_MEMORYMAP_H
-#define __ARCH_ARM_SRC_SAMA5_CHIP__SAMA5D3X_MEMORYMAP_H
+#ifndef __ARCH_ARM_SRC_SAMA5_HARDWARE__SAMA5D3X_MEMORYMAP_H
+#define __ARCH_ARM_SRC_SAMA5_HARDWARE__SAMA5D3X_MEMORYMAP_H
 
 /************************************************************************************
  * Included Files
@@ -808,4 +808,4 @@
  * Public Functions
  ************************************************************************************/
 
-#endif /* __ARCH_ARM_SRC_SAMA5_CHIP__SAMA5D3X_MEMORYMAP_H */
+#endif /* __ARCH_ARM_SRC_SAMA5_HARDWARE__SAMA5D3X_MEMORYMAP_H */
diff --git a/arch/arm/src/sama5/chip/_sama5d3x_mpddrc.h b/arch/arm/src/sama5/hardware/_sama5d3x_mpddrc.h
similarity index 99%
rename from arch/arm/src/sama5/chip/_sama5d3x_mpddrc.h
rename to arch/arm/src/sama5/hardware/_sama5d3x_mpddrc.h
index bbf21ce464..85a481fa40 100644
--- a/arch/arm/src/sama5/chip/_sama5d3x_mpddrc.h
+++ b/arch/arm/src/sama5/hardware/_sama5d3x_mpddrc.h
@@ -1,5 +1,5 @@
 /************************************************************************************
- * arch/arm/src/sama5/chip/_sama5d3x_mpddrc.h
+ * arch/arm/src/sama5/hardware/_sama5d3x_mpddrc.h
  *
  *   Copyright (C) 2013-2014 Gregory Nutt. All rights reserved.
  *   Author: Gregory Nutt <gnutt@nuttx.org>
@@ -33,15 +33,15 @@
  *
  ************************************************************************************/
 
-#ifndef __ARCH_ARM_SRC_SAMA5_CHIP__SAMA5D3X_MPDDRC_H
-#define __ARCH_ARM_SRC_SAMA5_CHIP__SAMA5D3X_MPDDRC_H
+#ifndef __ARCH_ARM_SRC_SAMA5_HARDWARE__SAMA5D3X_MPDDRC_H
+#define __ARCH_ARM_SRC_SAMA5_HARDWARE__SAMA5D3X_MPDDRC_H
 
 /************************************************************************************
  * Included Files
  ************************************************************************************/
 
 #include <nuttx/config.h>
-#include "chip/sam_memorymap.h"
+#include "hardware/sam_memorymap.h"
 
 /************************************************************************************
  * Pre-processor Definitions
@@ -402,4 +402,4 @@
 #define MPDDRC_WPSR_WPVSRC_SHIFT        (8)       /* Bits 8-23: Write Protection Violation Source */
 #define MPDDRC_WPSR_WPVSRC_MASK         (0xffff << MPDDRC_WPSR_WPVSRC_SHIFT)
 
-#endif /* __ARCH_ARM_SRC_SAMA5_CHIP__SAMA5D3X_MPDDRC_H */
+#endif /* __ARCH_ARM_SRC_SAMA5_HARDWARE__SAMA5D3X_MPDDRC_H */
diff --git a/arch/arm/src/sama5/chip/_sama5d3x_pinmap.h b/arch/arm/src/sama5/hardware/_sama5d3x_pinmap.h
similarity index 99%
rename from arch/arm/src/sama5/chip/_sama5d3x_pinmap.h
rename to arch/arm/src/sama5/hardware/_sama5d3x_pinmap.h
index a18e7272aa..48b733d5be 100644
--- a/arch/arm/src/sama5/chip/_sama5d3x_pinmap.h
+++ b/arch/arm/src/sama5/hardware/_sama5d3x_pinmap.h
@@ -1,5 +1,5 @@
 /************************************************************************************************************
- * arch/arm/src/sama5/chip/_sama5d3x_pinmap.h
+ * arch/arm/src/sama5/hardware/_sama5d3x_pinmap.h
  *
  *   Copyright (C) 2013 Gregory Nutt. All rights reserved.
  *   Author: Gregory Nutt <gnutt@nuttx.org>
@@ -33,8 +33,8 @@
  *
  ************************************************************************************************************/
 
-#ifndef __ARCH_ARM_SRC_SAMA5_CHIP__SAMA5D3X_PINMAP_H
-#define __ARCH_ARM_SRC_SAMA5_CHIP__SAMA5D3X_PINMAP_H
+#ifndef __ARCH_ARM_SRC_SAMA5_HARDWARE__SAMA5D3X_PINMAP_H
+#define __ARCH_ARM_SRC_SAMA5_HARDWARE__SAMA5D3X_PINMAP_H
 
 /************************************************************************************************************
  * Included Files
@@ -410,4 +410,4 @@
 #define PIO_USART3_SCK    (PIO_PERIPHB | PIO_CFG_DEFAULT | PIO_PORT_PIOE | PIO_PIN15) /* Type: EBI */
 #define PIO_USART3_TXD    (PIO_PERIPHB | PIO_CFG_DEFAULT | PIO_PORT_PIOE | PIO_PIN19) /* Type: EBI */
 
-#endif /* __ARCH_ARM_SRC_SAMA5_CHIP__SAMA5D3X_PINMAP_H */
+#endif /* __ARCH_ARM_SRC_SAMA5_HARDWARE__SAMA5D3X_PINMAP_H */
diff --git a/arch/arm/src/sama5/chip/_sama5d4x_memorymap.h b/arch/arm/src/sama5/hardware/_sama5d4x_memorymap.h
similarity index 99%
rename from arch/arm/src/sama5/chip/_sama5d4x_memorymap.h
rename to arch/arm/src/sama5/hardware/_sama5d4x_memorymap.h
index 46c203a293..ceed872f78 100644
--- a/arch/arm/src/sama5/chip/_sama5d4x_memorymap.h
+++ b/arch/arm/src/sama5/hardware/_sama5d4x_memorymap.h
@@ -1,5 +1,5 @@
 /************************************************************************************
- * arch/arm/src/sama5/_sama5d4x_memorymap.h
+ * arch/arm/src/sama5/hardware/_sama5d4x_memorymap.h
  *
  *   Copyright (C) 2014 Gregory Nutt. All rights reserved.
  *   Author: Gregory Nutt <gnutt@nuttx.org>
@@ -33,8 +33,8 @@
  *
  ************************************************************************************/
 
-#ifndef __ARCH_ARM_SRC_SAMA5_CHIP__SAMA5D4X_MEMORYMAP_H
-#define __ARCH_ARM_SRC_SAMA5_CHIP__SAMA5D4X_MEMORYMAP_H
+#ifndef __ARCH_ARM_SRC_SAMA5_HARDWARE__SAMA5D4X_MEMORYMAP_H
+#define __ARCH_ARM_SRC_SAMA5_HARDWARE__SAMA5D4X_MEMORYMAP_H
 
 /************************************************************************************
  * Included Files
@@ -802,4 +802,4 @@
  * Public Functions
  ************************************************************************************/
 
-#endif /* __ARCH_ARM_SRC_SAMA5_CHIP__SAMA5D4X_MEMORYMAP_H */
+#endif /* __ARCH_ARM_SRC_SAMA5_HARDWARE__SAMA5D4X_MEMORYMAP_H */
diff --git a/arch/arm/src/sama5/chip/_sama5d4x_mpddrc.h b/arch/arm/src/sama5/hardware/_sama5d4x_mpddrc.h
similarity index 99%
rename from arch/arm/src/sama5/chip/_sama5d4x_mpddrc.h
rename to arch/arm/src/sama5/hardware/_sama5d4x_mpddrc.h
index 24880165bf..8465ed9fd5 100644
--- a/arch/arm/src/sama5/chip/_sama5d4x_mpddrc.h
+++ b/arch/arm/src/sama5/hardware/_sama5d4x_mpddrc.h
@@ -1,5 +1,5 @@
 /********************************************************************************************
- * arch/arm/src/sama5/chip/_sama5d4x_mpddrc.h
+ * arch/arm/src/sama5/hardware/_sama5d4x_mpddrc.h
  *
  *   Copyright (C) 2014 Gregory Nutt. All rights reserved.
  *   Author: Gregory Nutt <gnutt@nuttx.org>
@@ -33,15 +33,15 @@
  *
  ********************************************************************************************/
 
-#ifndef __ARCH_ARM_SRC_SAMA5_CHIP__SAMA5D4X_MPDDRC_H
-#define __ARCH_ARM_SRC_SAMA5_CHIP__SAMA5D4X_MPDDRC_H
+#ifndef __ARCH_ARM_SRC_SAMA5_HARDWARE__SAMA5D4X_MPDDRC_H
+#define __ARCH_ARM_SRC_SAMA5_HARDWARE__SAMA5D4X_MPDDRC_H
 
 /********************************************************************************************
  * Included Files
  ********************************************************************************************/
 
 #include <nuttx/config.h>
-#include "chip/sam_memorymap.h"
+#include "hardware/sam_memorymap.h"
 
 /********************************************************************************************
  * Pre-processor Definitions
@@ -687,4 +687,4 @@
 #define MPDDRC_DLL_SAD_ADDCNT_MASK           (0xff < MPDDRC_DLL_SAD_ADDCNT_SHIFT)
 #  define MPDDRC_DLL_SAD_ADDCNT(n)           ((uint32_t)(n) < MPDDRC_DLL_SAD_ADDCNT_SHIFT)
 
-#endif /* __ARCH_ARM_SRC_SAMA5_CHIP__SAMA5D4X_MPDDRC_H */
+#endif /* __ARCH_ARM_SRC_SAMA5_HARDWARE__SAMA5D4X_MPDDRC_H */
diff --git a/arch/arm/src/sama5/chip/_sama5d4x_pinmap.h b/arch/arm/src/sama5/hardware/_sama5d4x_pinmap.h
similarity index 99%
rename from arch/arm/src/sama5/chip/_sama5d4x_pinmap.h
rename to arch/arm/src/sama5/hardware/_sama5d4x_pinmap.h
index 1262fa9c15..7582893561 100644
--- a/arch/arm/src/sama5/chip/_sama5d4x_pinmap.h
+++ b/arch/arm/src/sama5/hardware/_sama5d4x_pinmap.h
@@ -1,5 +1,5 @@
 /************************************************************************************************************
- * arch/arm/src/sama5/chip/_sama5d4x_pinmap.h
+ * arch/arm/src/sama5/hardware/_sama5d4x_pinmap.h
  *
  *   Copyright (C) 2014 Gregory Nutt. All rights reserved.
  *   Author: Gregory Nutt <gnutt@nuttx.org>
@@ -33,8 +33,8 @@
  *
  ************************************************************************************************************/
 
-#ifndef __ARCH_ARM_SRC_SAMA5_CHIP__SAMA5D4X_PINMAP_H
-#define __ARCH_ARM_SRC_SAMA5_CHIP__SAMA5D4X_PINMAP_H
+#ifndef __ARCH_ARM_SRC_SAMA5_HARDWARE__SAMA5D4X_PINMAP_H
+#define __ARCH_ARM_SRC_SAMA5_HARDWARE__SAMA5D4X_PINMAP_H
 
 /************************************************************************************************************
  * Included Files
@@ -473,4 +473,4 @@
 #define PIO_USART4_SCK    (PIO_PERIPHB | PIO_CFG_DEFAULT | PIO_PORT_PIOE | PIO_PIN25)
 #define PIO_USART4_TXD    (PIO_PERIPHB | PIO_CFG_DEFAULT | PIO_PORT_PIOE | PIO_PIN27)
 
-#endif /* __ARCH_ARM_SRC_SAMA5_CHIP__SAMA5D4X_PINMAP_H */
+#endif /* __ARCH_ARM_SRC_SAMA5_HARDWARE__SAMA5D4X_PINMAP_H */
diff --git a/arch/arm/src/sama5/chip/sam_adc.h b/arch/arm/src/sama5/hardware/sam_adc.h
similarity index 99%
rename from arch/arm/src/sama5/chip/sam_adc.h
rename to arch/arm/src/sama5/hardware/sam_adc.h
index 3d65aa214e..208d529b72 100644
--- a/arch/arm/src/sama5/chip/sam_adc.h
+++ b/arch/arm/src/sama5/hardware/sam_adc.h
@@ -1,5 +1,5 @@
 /****************************************************************************************
- * arch/arm/src/sama5/chip/sam_adc.h
+ * arch/arm/src/sama5/hardware/sam_adc.h
  *
  *   Copyright (C) 2013 Gregory Nutt. All rights reserved.
  *   Author: Gregory Nutt <gnutt@nuttx.org>
@@ -33,8 +33,8 @@
  *
  ****************************************************************************************/
 
-#ifndef __ARCH_ARM_SRC_SAMA5_CHIP_SAM_ADC_H
-#define __ARCH_ARM_SRC_SAMA5_CHIP_SAM_ADC_H
+#ifndef __ARCH_ARM_SRC_SAMA5_HARDWARE_SAM_ADC_H
+#define __ARCH_ARM_SRC_SAMA5_HARDWARE_SAM_ADC_H
 
 /****************************************************************************************
  * Included Files
@@ -43,7 +43,7 @@
 #include <nuttx/config.h>
 
 #include "chip.h"
-#include "chip/sam_memorymap.h"
+#include "hardware/sam_memorymap.h"
 
 /****************************************************************************************
  * Pre-processor Definitions
@@ -603,4 +603,4 @@
  * Public Functions
  ****************************************************************************************/
 
-#endif /* __ARCH_ARM_SRC_SAMA5_CHIP_SAM_ADC_H */
+#endif /* __ARCH_ARM_SRC_SAMA5_HARDWARE_SAM_ADC_H */
diff --git a/arch/arm/src/sama5/chip/sam_aic.h b/arch/arm/src/sama5/hardware/sam_aic.h
similarity index 97%
rename from arch/arm/src/sama5/chip/sam_aic.h
rename to arch/arm/src/sama5/hardware/sam_aic.h
index 776b74f6c3..372c8de533 100644
--- a/arch/arm/src/sama5/chip/sam_aic.h
+++ b/arch/arm/src/sama5/hardware/sam_aic.h
@@ -1,5 +1,5 @@
 /************************************************************************************
- * arch/arm/src/sama5/chip/sam_aic.h
+ * arch/arm/src/sama5/hardware/sam_aic.h
  *
  *   Copyright (C) 2013 Gregory Nutt. All rights reserved.
  *   Author: Gregory Nutt <gnutt@nuttx.org>
@@ -33,15 +33,15 @@
  *
  ************************************************************************************/
 
-#ifndef __ARCH_ARM_SRC_SAMA5_CHIP_SAM_AIC_H
-#define __ARCH_ARM_SRC_SAMA5_CHIP_SAM_AIC_H
+#ifndef __ARCH_ARM_SRC_SAMA5_HARDWARE_SAM_AIC_H
+#define __ARCH_ARM_SRC_SAMA5_HARDWARE_SAM_AIC_H
 
 /************************************************************************************
  * Included Files
  ************************************************************************************/
 
 #include <nuttx/config.h>
-#include "chip/sam_memorymap.h"
+#include "hardware/sam_memorymap.h"
 
 /************************************************************************************
  * Pre-processor Definitions
@@ -231,4 +231,4 @@
 #define AIC_WPSR_WPVSRC_SHIFT  (8)       /* Bits 8-23: Write Protect Violation Source */
 #define AIC_WPSR_WPVSRC_MASK   (0x0000ffff << AIC_WPSR_WPVSRC_SHIFT)
 
-#endif /* __ARCH_ARM_SRC_SAMA5_CHIP_SAM_AIC_H */
+#endif /* __ARCH_ARM_SRC_SAMA5_HARDWARE_SAM_AIC_H */
diff --git a/arch/arm/src/sama5/chip/sam_aximx.h b/arch/arm/src/sama5/hardware/sam_aximx.h
similarity index 93%
rename from arch/arm/src/sama5/chip/sam_aximx.h
rename to arch/arm/src/sama5/hardware/sam_aximx.h
index 7f86cc15e9..130dbbec5f 100644
--- a/arch/arm/src/sama5/chip/sam_aximx.h
+++ b/arch/arm/src/sama5/hardware/sam_aximx.h
@@ -1,5 +1,5 @@
 /************************************************************************************
- * arch/arm/src/sama5/chip/sam_aximx.h
+ * arch/arm/src/sama5/hardware/sam_aximx.h
  *
  *   Copyright (C) 2013 Gregory Nutt. All rights reserved.
  *   Author: Gregory Nutt <gnutt@nuttx.org>
@@ -33,8 +33,8 @@
  *
  ************************************************************************************/
 
-#ifndef __ARCH_ARM_SRC_SAMA5_CHIP_SAM_AXIMX_H
-#define __ARCH_ARM_SRC_SAMA5_CHIP_SAM_AXIMX_H
+#ifndef __ARCH_ARM_SRC_SAMA5_HARDWARE_SAM_AXIMX_H
+#define __ARCH_ARM_SRC_SAMA5_HARDWARE_SAM_AXIMX_H
 
 /************************************************************************************
  * Included Files
@@ -43,7 +43,7 @@
 #include <nuttx/config.h>
 
 #include <arch/sama5/chip.h>
-#include "chip/sam_memorymap.h"
+#include "hardware/sam_memorymap.h"
 
 /************************************************************************************
  * Pre-processor Definitions
@@ -73,4 +73,4 @@
 #  define AXIMX_REMAP_REMAP1   (1 << 1) /* Remap State 1 */
 #endif
 
-#endif /* __ARCH_ARM_SRC_SAMA5_CHIP_SAM_AXIMX_H */
+#endif /* __ARCH_ARM_SRC_SAMA5_HARDWARE_SAM_AXIMX_H */
diff --git a/arch/arm/src/sama5/chip/sam_bsc.h b/arch/arm/src/sama5/hardware/sam_bsc.h
similarity index 92%
rename from arch/arm/src/sama5/chip/sam_bsc.h
rename to arch/arm/src/sama5/hardware/sam_bsc.h
index c51710feda..9a464047f7 100644
--- a/arch/arm/src/sama5/chip/sam_bsc.h
+++ b/arch/arm/src/sama5/hardware/sam_bsc.h
@@ -1,5 +1,5 @@
 /************************************************************************************
- * arch/arm/src/sama5/chip/sam_bsc.h
+ * arch/arm/src/sama5/hardware/sam_bsc.h
  *
  *   Copyright (C) 2013 Gregory Nutt. All rights reserved.
  *   Author: Gregory Nutt <gnutt@nuttx.org>
@@ -33,15 +33,15 @@
  *
  ************************************************************************************/
 
-#ifndef __ARCH_ARM_SRC_SAMA5_CHIP_SAM_BSC_H
-#define __ARCH_ARM_SRC_SAMA5_CHIP_SAM_BSC_H
+#ifndef __ARCH_ARM_SRC_SAMA5_HARDWARE_SAM_BSC_H
+#define __ARCH_ARM_SRC_SAMA5_HARDWARE_SAM_BSC_H
 
 /************************************************************************************
  * Included Files
  ************************************************************************************/
 
 #include <nuttx/config.h>
-#include "chip/sam_memorymap.h"
+#include "hardware/sam_memorymap.h"
 
 /************************************************************************************
  * Pre-processor Definitions
@@ -64,4 +64,4 @@
 #define BSC_CR_BOOTKEY_MASK  (0xffff << BSC_CR_BOOTKEY_SHIFT)
 #  define BSC_CR_BOOTKEY     (0x6683 << BSC_CR_BOOTKEY_SHIFT)
 
-#endif /* __ARCH_ARM_SRC_SAMA5_CHIP_SAM_BSC_H */
+#endif /* __ARCH_ARM_SRC_SAMA5_HARDWARE_SAM_BSC_H */
diff --git a/arch/arm/src/sama5/chip/sam_can.h b/arch/arm/src/sama5/hardware/sam_can.h
similarity index 98%
rename from arch/arm/src/sama5/chip/sam_can.h
rename to arch/arm/src/sama5/hardware/sam_can.h
index 8efbbd51c6..05313d9afa 100644
--- a/arch/arm/src/sama5/chip/sam_can.h
+++ b/arch/arm/src/sama5/hardware/sam_can.h
@@ -1,5 +1,5 @@
 /************************************************************************************
- * arch/arm/src/sama5/chip/sam_can.h
+ * arch/arm/src/sama5/hardware/sam_can.h
  *
  *   Copyright (C) 2013 Gregory Nutt. All rights reserved.
  *   Author: Gregory Nutt <gnutt@nuttx.org>
@@ -33,15 +33,15 @@
  *
  ************************************************************************************/
 
-#ifndef __ARCH_ARM_SRC_SAMA5_CHIP_SAM_CAN_H
-#define __ARCH_ARM_SRC_SAMA5_CHIP_SAM_CAN_H
+#ifndef __ARCH_ARM_SRC_SAMA5_HARDWARE_SAM_CAN_H
+#define __ARCH_ARM_SRC_SAMA5_HARDWARE_SAM_CAN_H
 
 /************************************************************************************
  * Included Files
  ************************************************************************************/
 
 #include <nuttx/config.h>
-#include "chip/sam_memorymap.h"
+#include "hardware/sam_memorymap.h"
 
 /************************************************************************************
  * Pre-processor Definitions
@@ -374,4 +374,4 @@
 #define CAN_MCR_MACR             (1 << 22) /* Bit 22: Abort Request for Mailbox n */
 #define CAN_MCR_MTCR             (1 << 23) /* Bit 23: Mailbox Transfer Command */
 
-#endif /* __ARCH_ARM_SRC_SAMA5_CHIP_SAM_CAN_H */
+#endif /* __ARCH_ARM_SRC_SAMA5_HARDWARE_SAM_CAN_H */
diff --git a/arch/arm/src/sama5/chip/sam_dbgu.h b/arch/arm/src/sama5/hardware/sam_dbgu.h
similarity index 98%
rename from arch/arm/src/sama5/chip/sam_dbgu.h
rename to arch/arm/src/sama5/hardware/sam_dbgu.h
index a2a11d18c4..1d7b041175 100644
--- a/arch/arm/src/sama5/chip/sam_dbgu.h
+++ b/arch/arm/src/sama5/hardware/sam_dbgu.h
@@ -1,5 +1,5 @@
 /************************************************************************************************
- * arch/arm/src/sama5/chip/sam3u_uart.h
+ * arch/arm/src/sama5/hardware/sam3u_uart.h
  * Debug Unit (DBGU) definitions for the SAMA5D3
  *
  *   Copyright (C) 2014 Gregory Nutt. All rights reserved.
@@ -34,8 +34,8 @@
  *
  ************************************************************************************************/
 
-#ifndef __ARCH_ARM_SRC_SAMA5_CHIP_SAM_DBGU_H
-#define __ARCH_ARM_SRC_SAMA5_CHIP_SAM_DBGU_H
+#ifndef __ARCH_ARM_SRC_SAMA5_HARDWARE_SAM_DBGU_H
+#define __ARCH_ARM_SRC_SAMA5_HARDWARE_SAM_DBGU_H
 
 /************************************************************************************************
  * Included Files
@@ -44,7 +44,7 @@
 #include <nuttx/config.h>
 
 #include "chip.h"
-#include "chip/sam_memorymap.h"
+#include "hardware/sam_memorymap.h"
 
 /************************************************************************************************
  * Pre-processor Definitions
@@ -264,4 +264,4 @@
  * Public Functions
  ************************************************************************************************/
 
-#endif /* __ARCH_ARM_SRC_SAMA5_CHIP_SAM_DBGU_H */
+#endif /* __ARCH_ARM_SRC_SAMA5_HARDWARE_SAM_DBGU_H */
diff --git a/arch/arm/src/sama5/chip/sam_dmac.h b/arch/arm/src/sama5/hardware/sam_dmac.h
similarity index 99%
rename from arch/arm/src/sama5/chip/sam_dmac.h
rename to arch/arm/src/sama5/hardware/sam_dmac.h
index 3dc39d3d4d..f037819689 100644
--- a/arch/arm/src/sama5/chip/sam_dmac.h
+++ b/arch/arm/src/sama5/hardware/sam_dmac.h
@@ -1,5 +1,5 @@
 /****************************************************************************************
- * arch/arm/src/sama5/chip/sam_dmac.h
+ * arch/arm/src/sama5/hardware/sam_dmac.h
  *
  *   Copyright (C) 2013 Gregory Nutt. All rights reserved.
  *   Author: Gregory Nutt <gnutt@nuttx.org>
@@ -33,8 +33,8 @@
  *
  ****************************************************************************************/
 
-#ifndef __ARCH_ARM_SRC_SAMA5_CHIP_SAM_DMAC_H
-#define __ARCH_ARM_SRC_SAMA5_CHIP_SAM_DMAC_H
+#ifndef __ARCH_ARM_SRC_SAMA5_HARDWARE_SAM_DMAC_H
+#define __ARCH_ARM_SRC_SAMA5_HARDWARE_SAM_DMAC_H
 
 /****************************************************************************************
  * Included Files
@@ -43,7 +43,7 @@
 #include <nuttx/config.h>
 
 #include "chip.h"
-#include "chip/sam_memorymap.h"
+#include "hardware/sam_memorymap.h"
 
 /****************************************************************************************
  * Pre-processor Definitions
@@ -839,4 +839,4 @@ struct dma_crc16_linklist_s
  * Public Functions
  ****************************************************************************************/
 
-#endif /* __ARCH_ARM_SRC_SAMA5_CHIP_SAM_DMAC_H */
+#endif /* __ARCH_ARM_SRC_SAMA5_HARDWARE_SAM_DMAC_H */
diff --git a/arch/arm/src/sama5/chip/sam_ehci.h b/arch/arm/src/sama5/hardware/sam_ehci.h
similarity index 94%
rename from arch/arm/src/sama5/chip/sam_ehci.h
rename to arch/arm/src/sama5/hardware/sam_ehci.h
index e564b1ecc3..b06511dbac 100644
--- a/arch/arm/src/sama5/chip/sam_ehci.h
+++ b/arch/arm/src/sama5/hardware/sam_ehci.h
@@ -1,5 +1,5 @@
 /****************************************************************************
- * arch/arm/src/sama5/chip/sam_ehci.h
+ * arch/arm/src/sama5/hardware/sam_ehci.h
  *
  *   Copyright (C) 2013 Gregory Nutt. All rights reserved.
  *   Author: Gregory Nutt <gnutt@nuttx.org>
@@ -33,8 +33,8 @@
  *
  ****************************************************************************/
 
-#ifndef __ARCH_ARM_SRC_SAMA5_CHIP_SAM_EHCI_H
-#define __ARCH_ARM_SRC_SAMA5_CHIP_SAM_EHCI_H
+#ifndef __ARCH_ARM_SRC_SAMA5_HARDWARE_SAM_EHCI_H
+#define __ARCH_ARM_SRC_SAMA5_HARDWARE_SAM_EHCI_H
 
 /****************************************************************************
  * Included Files
@@ -44,7 +44,7 @@
 #include <nuttx/usb/ohci.h>
 
 #include "chip.h"
-#include "chip/sam_memorymap.h"
+#include "hardware/sam_memorymap.h"
 
 /****************************************************************************
  * Pre-processor Definitions
@@ -93,4 +93,4 @@
  * Public Functions
  ****************************************************************************/
 
-#endif /* __ARCH_ARM_SRC_SAMA5_CHIP_SAM_EHCI_H */
+#endif /* __ARCH_ARM_SRC_SAMA5_HARDWARE_SAM_EHCI_H */
diff --git a/arch/arm/src/sama5/chip/sam_emac.h b/arch/arm/src/sama5/hardware/sam_emac.h
similarity index 90%
rename from arch/arm/src/sama5/chip/sam_emac.h
rename to arch/arm/src/sama5/hardware/sam_emac.h
index d131e51dc7..9174dac52d 100644
--- a/arch/arm/src/sama5/chip/sam_emac.h
+++ b/arch/arm/src/sama5/hardware/sam_emac.h
@@ -1,5 +1,5 @@
 /************************************************************************************
- * arch/arm/src/sama5/chip/sam_emac.h
+ * arch/arm/src/sama5/hardware/sam_emac.h
  *
  *   Copyright (C) 2013-2014 Gregory Nutt. All rights reserved.
  *   Author: Gregory Nutt <gnutt@nuttx.org>
@@ -33,8 +33,8 @@
  *
  ************************************************************************************/
 
-#ifndef __ARCH_ARM_SRC_SAMA5_CHIP_SAM_EMAC_H
-#define __ARCH_ARM_SRC_SAMA5_CHIP_SAM_EMAC_H
+#ifndef __ARCH_ARM_SRC_SAMA5_HARDWARE_SAM_EMAC_H
+#define __ARCH_ARM_SRC_SAMA5_HARDWARE_SAM_EMAC_H
 
 /************************************************************************************
  * Included Files
@@ -50,9 +50,9 @@
  */
 
 #if defined(CONFIG_SAMA5_EMACA)
-#  include "chip/sam_emaca.h"
+#  include "hardware/sam_emaca.h"
 #elif defined(CONFIG_SAMA5_EMACB)
-#  include "chip/sam_emacb.h"
+#  include "hardware/sam_emacb.h"
 #endif
 
-#endif /* __ARCH_ARM_SRC_SAMA5_CHIP_SAM_EMAC_H */
+#endif /* __ARCH_ARM_SRC_SAMA5_HARDWARE_SAM_EMAC_H */
diff --git a/arch/arm/src/sama5/chip/sam_emaca.h b/arch/arm/src/sama5/hardware/sam_emaca.h
similarity index 99%
rename from arch/arm/src/sama5/chip/sam_emaca.h
rename to arch/arm/src/sama5/hardware/sam_emaca.h
index 3e4bb7409c..aea425c700 100644
--- a/arch/arm/src/sama5/chip/sam_emaca.h
+++ b/arch/arm/src/sama5/hardware/sam_emaca.h
@@ -1,5 +1,5 @@
 /************************************************************************************
- * arch/arm/src/sama5/chip/sam_emaca.h
+ * arch/arm/src/sama5/hardware/sam_emaca.h
  * This is the form of the EMAC interface used the SAMA5D3
  *
  *   Copyright (C) 2013-2014 Gregory Nutt. All rights reserved.
@@ -34,15 +34,15 @@
  *
  ************************************************************************************/
 
-#ifndef __ARCH_ARM_SRC_SAMA5_CHIP_SAM_EMACA_H
-#define __ARCH_ARM_SRC_SAMA5_CHIP_SAM_EMACA_H
+#ifndef __ARCH_ARM_SRC_SAMA5_HARDWARE_SAM_EMACA_H
+#define __ARCH_ARM_SRC_SAMA5_HARDWARE_SAM_EMACA_H
 
 /************************************************************************************
  * Included Files
  ************************************************************************************/
 
 #include <nuttx/config.h>
-#include "chip/sam_memorymap.h"
+#include "hardware/sam_memorymap.h"
 
 /************************************************************************************
  * Pre-processor Definitions
@@ -454,4 +454,4 @@ struct emac_txdesc_s
   uint32_t status;   /* TX status and controls */
 };
 
-#endif /* __ARCH_ARM_SRC_SAMA5_CHIP_SAM_EMACA_H */
+#endif /* __ARCH_ARM_SRC_SAMA5_HARDWARE_SAM_EMACA_H */
diff --git a/arch/arm/src/sama5/chip/sam_emacb.h b/arch/arm/src/sama5/hardware/sam_emacb.h
similarity index 99%
rename from arch/arm/src/sama5/chip/sam_emacb.h
rename to arch/arm/src/sama5/hardware/sam_emacb.h
index 7cbc75d6af..d8779e06e9 100644
--- a/arch/arm/src/sama5/chip/sam_emacb.h
+++ b/arch/arm/src/sama5/hardware/sam_emacb.h
@@ -1,5 +1,5 @@
 /************************************************************************************
- * arch/arm/src/sama5/chip/sam_emacb.h
+ * arch/arm/src/sama5/hardware/sam_emacb.h
  * This is the form of the EMAC interface used the SAMA5D4 (and also the SAM43).
  * This is referred as GMAC in the documentation even though it does not support
  * Gibabit Ethernet.
@@ -36,15 +36,15 @@
  *
  ************************************************************************************/
 
-#ifndef __ARCH_ARM_SRC_SAMA5_CHIP_SAM_EMACB_H
-#define __ARCH_ARM_SRC_SAMA5_CHIP_SAM_EMACB_H
+#ifndef __ARCH_ARM_SRC_SAMA5_HARDWARE_SAM_EMACB_H
+#define __ARCH_ARM_SRC_SAMA5_HARDWARE_SAM_EMACB_H
 
 /************************************************************************************
  * Included Files
  ************************************************************************************/
 
 #include <nuttx/config.h>
-#include "chip/sam_memorymap.h"
+#include "hardware/sam_memorymap.h"
 
 /************************************************************************************
  * Pre-processor Definitions
@@ -789,4 +789,4 @@ struct emac_txdesc_s
   uint32_t status;   /* TX status and controls */
 };
 
-#endif /* __ARCH_ARM_SRC_SAMA5_CHIP_SAM_EMACB_H */
+#endif /* __ARCH_ARM_SRC_SAMA5_HARDWARE_SAM_EMACB_H */
diff --git a/arch/arm/src/sama5/chip/sam_flexcom.h b/arch/arm/src/sama5/hardware/sam_flexcom.h
similarity index 93%
rename from arch/arm/src/sama5/chip/sam_flexcom.h
rename to arch/arm/src/sama5/hardware/sam_flexcom.h
index 990a73b1c7..c18bc6df32 100644
--- a/arch/arm/src/sama5/chip/sam_flexcom.h
+++ b/arch/arm/src/sama5/hardware/sam_flexcom.h
@@ -1,5 +1,5 @@
 /************************************************************************************
- * arch/arm/src/sama5/chip/sam_flexcom.h
+ * arch/arm/src/sama5/hardware/sam_flexcom.h
  *
  *   Copyright (C) 2015 Gregory Nutt. All rights reserved.
  *   Author: Gregory Nutt <gnutt@nuttx.org>
@@ -33,8 +33,8 @@
  *
  ************************************************************************************/
 
-#ifndef __ARCH_ARM_SRC_SAMA5_CHIP_SAM_FLEXCOM_H
-#define __ARCH_ARM_SRC_SAMA5_CHIP_SAM_FLEXCOM_H
+#ifndef __ARCH_ARM_SRC_SAMA5_HARDWARE_SAM_FLEXCOM_H
+#define __ARCH_ARM_SRC_SAMA5_HARDWARE_SAM_FLEXCOM_H
 
 /************************************************************************************
  * Included Files
@@ -43,7 +43,7 @@
 #include <nuttx/config.h>
 
 #include "chip.h"
-#include "chip/sam_memorymap.h"
+#include "hardware/sam_memorymap.h"
 
 /************************************************************************************
  * Pre-processor Definitions
@@ -114,14 +114,14 @@
 
 /* Flexcom USART Register Definitions ***********************************************/
 
-#include "chip/sam_flexcom_usart.h"
+#include "hardware/sam_flexcom_usart.h"
 
 /* Flexcom SPI Register Definitions *************************************************/
 
-#include "chip/sam_flexcom_spi.h"
+#include "hardware/sam_flexcom_spi.h"
 
 /* Flexcom TWI Register Definitions *************************************************/
 
-#include "chip/sam_flexcom_twi.h"
+#include "hardware/sam_flexcom_twi.h"
 
-#endif /* __ARCH_ARM_SRC_SAMA5_CHIP_SAM_FLEXCOM_H */
+#endif /* __ARCH_ARM_SRC_SAMA5_HARDWARE_SAM_FLEXCOM_H */
diff --git a/arch/arm/src/sama5/chip/sam_flexcom_spi.h b/arch/arm/src/sama5/hardware/sam_flexcom_spi.h
similarity index 90%
rename from arch/arm/src/sama5/chip/sam_flexcom_spi.h
rename to arch/arm/src/sama5/hardware/sam_flexcom_spi.h
index 4dc4ccc873..13c5ac1fe8 100644
--- a/arch/arm/src/sama5/chip/sam_flexcom_spi.h
+++ b/arch/arm/src/sama5/hardware/sam_flexcom_spi.h
@@ -1,5 +1,5 @@
 /************************************************************************************
- * arch/arm/src/sama5/chip/sam_flexcom_spi.h
+ * arch/arm/src/sama5/hardware/sam_flexcom_spi.h
  *
  *   Copyright (C) 2015 Gregory Nutt. All rights reserved.
  *   Author: Gregory Nutt <gnutt@nuttx.org>
@@ -33,8 +33,8 @@
  *
  ************************************************************************************/
 
-#ifndef __ARCH_ARM_SRC_SAMA5_CHIP_SAM_FLEXCOM_SPI_H
-#define __ARCH_ARM_SRC_SAMA5_CHIP_SAM_FLEXCOM_SPI_H
+#ifndef __ARCH_ARM_SRC_SAMA5_HARDWARE_SAM_FLEXCOM_SPI_H
+#define __ARCH_ARM_SRC_SAMA5_HARDWARE_SAM_FLEXCOM_SPI_H
 
 /************************************************************************************
  * Included Files
@@ -43,7 +43,7 @@
 #include <nuttx/config.h>
 
 #include "chip.h"
-#include "chip/sam_memorymap.h"
+#include "hardware/sam_memorymap.h"
 
 /************************************************************************************
  * Pre-processor Definitions
@@ -55,4 +55,4 @@
 
 /* Flexcom SPI Register Bit Field Definitions ***************************************/
 
-#endif /* __ARCH_ARM_SRC_SAMA5_CHIP_SAM_FLEXCOM_SPI_H */
+#endif /* __ARCH_ARM_SRC_SAMA5_HARDWARE_SAM_FLEXCOM_SPI_H */
diff --git a/arch/arm/src/sama5/chip/sam_flexcom_twi.h b/arch/arm/src/sama5/hardware/sam_flexcom_twi.h
similarity index 90%
rename from arch/arm/src/sama5/chip/sam_flexcom_twi.h
rename to arch/arm/src/sama5/hardware/sam_flexcom_twi.h
index 69345a6dec..8cfd5bcb46 100644
--- a/arch/arm/src/sama5/chip/sam_flexcom_twi.h
+++ b/arch/arm/src/sama5/hardware/sam_flexcom_twi.h
@@ -1,5 +1,5 @@
 /************************************************************************************
- * arch/arm/src/sama5/chip/sam_flexcom_twi.h
+ * arch/arm/src/sama5/hardware/sam_flexcom_twi.h
  *
  *   Copyright (C) 2015 Gregory Nutt. All rights reserved.
  *   Author: Gregory Nutt <gnutt@nuttx.org>
@@ -33,8 +33,8 @@
  *
  ************************************************************************************/
 
-#ifndef __ARCH_ARM_SRC_SAMA5_CHIP_SAM_FLEXCOM_TWI_H
-#define __ARCH_ARM_SRC_SAMA5_CHIP_SAM_FLEXCOM_TWI_H
+#ifndef __ARCH_ARM_SRC_SAMA5_HARDWARE_SAM_FLEXCOM_TWI_H
+#define __ARCH_ARM_SRC_SAMA5_HARDWARE_SAM_FLEXCOM_TWI_H
 
 /************************************************************************************
  * Included Files
@@ -43,7 +43,7 @@
 #include <nuttx/config.h>
 
 #include "chip.h"
-#include "chip/sam_memorymap.h"
+#include "hardware/sam_memorymap.h"
 
 /************************************************************************************
  * Pre-processor Definitions
@@ -55,4 +55,4 @@
 
 /* Flexcom TWI Register Bit Field Definitions ***************************************/
 
-#endif /* __ARCH_ARM_SRC_SAMA5_CHIP_SAM_FLEXCOM_TWI_H */
+#endif /* __ARCH_ARM_SRC_SAMA5_HARDWARE_SAM_FLEXCOM_TWI_H */
diff --git a/arch/arm/src/sama5/chip/sam_flexcom_usart.h b/arch/arm/src/sama5/hardware/sam_flexcom_usart.h
similarity index 99%
rename from arch/arm/src/sama5/chip/sam_flexcom_usart.h
rename to arch/arm/src/sama5/hardware/sam_flexcom_usart.h
index 6331e06fb6..302eada4cd 100644
--- a/arch/arm/src/sama5/chip/sam_flexcom_usart.h
+++ b/arch/arm/src/sama5/hardware/sam_flexcom_usart.h
@@ -1,5 +1,5 @@
 /************************************************************************************************
- * arch/arm/src/sama5/chip/sam3u_uart.h
+ * arch/arm/src/sama5/hardware/sam3u_uart.h
  * Universal Synchronous Asynchronous Receiver Transmitter (FLEXUS) definitions for the SAMA5D2
  *
  *   Copyright (C) 2013 Gregory Nutt. All rights reserved.
@@ -34,8 +34,8 @@
  *
  ************************************************************************************************/
 
-#ifndef __ARCH_ARM_SRC_SAMA5_CHIP_SAM_FLEXCOM_FLEXUS_H
-#define __ARCH_ARM_SRC_SAMA5_CHIP_SAM_FLEXCOM_FLEXUS_H
+#ifndef __ARCH_ARM_SRC_SAMA5_HARDWARE_SAM_FLEXCOM_FLEXUS_H
+#define __ARCH_ARM_SRC_SAMA5_HARDWARE_SAM_FLEXCOM_FLEXUS_H
 
 /************************************************************************************************
  * Included Files
@@ -44,7 +44,7 @@
 #include <nuttx/config.h>
 
 #include "chip.h"
-#include "chip/sam_memorymap.h"
+#include "hardware/sam_memorymap.h"
 
 /************************************************************************************************
  * Pre-processor Definitions
@@ -577,4 +577,4 @@
  * Public Functions
  ************************************************************************************************/
 
-#endif /* __ARCH_ARM_SRC_SAMA5_CHIP_SAM_FLEXCOM_FLEXUS_H */
+#endif /* __ARCH_ARM_SRC_SAMA5_HARDWARE_SAM_FLEXCOM_FLEXUS_H */
diff --git a/arch/arm/src/sama5/chip/sam_gmac.h b/arch/arm/src/sama5/hardware/sam_gmac.h
similarity index 99%
rename from arch/arm/src/sama5/chip/sam_gmac.h
rename to arch/arm/src/sama5/hardware/sam_gmac.h
index 27496fec2a..64ed40af5d 100644
--- a/arch/arm/src/sama5/chip/sam_gmac.h
+++ b/arch/arm/src/sama5/hardware/sam_gmac.h
@@ -1,5 +1,5 @@
 /************************************************************************************
- * arch/arm/src/sama5/chip/sam_gmac.h
+ * arch/arm/src/sama5/hardware/sam_gmac.h
  *
  *   Copyright (C) 2013 Gregory Nutt. All rights reserved.
  *   Author: Gregory Nutt <gnutt@nuttx.org>
@@ -33,15 +33,15 @@
  *
  ************************************************************************************/
 
-#ifndef __ARCH_ARM_SRC_SAMA5_CHIP_SAM_GMAC_H
-#define __ARCH_ARM_SRC_SAMA5_CHIP_SAM_GMAC_H
+#ifndef __ARCH_ARM_SRC_SAMA5_HARDWARE_SAM_GMAC_H
+#define __ARCH_ARM_SRC_SAMA5_HARDWARE_SAM_GMAC_H
 
 /************************************************************************************
  * Included Files
  ************************************************************************************/
 
 #include <nuttx/config.h>
-#include "chip/sam_memorymap.h"
+#include "hardware/sam_memorymap.h"
 
 /************************************************************************************
  * Pre-processor Definitions
@@ -1011,4 +1011,4 @@ struct gmac_txdesc_s
   uint32_t status;   /* TX status and controls */
 };
 
-#endif /* __ARCH_ARM_SRC_SAMA5_CHIP_SAM_GMAC_H */
+#endif /* __ARCH_ARM_SRC_SAMA5_HARDWARE_SAM_GMAC_H */
diff --git a/arch/arm/src/sama5/chip/sam_gpbr.h b/arch/arm/src/sama5/hardware/sam_gpbr.h
similarity index 93%
rename from arch/arm/src/sama5/chip/sam_gpbr.h
rename to arch/arm/src/sama5/hardware/sam_gpbr.h
index e9e65880f3..697b828d7e 100644
--- a/arch/arm/src/sama5/chip/sam_gpbr.h
+++ b/arch/arm/src/sama5/hardware/sam_gpbr.h
@@ -1,5 +1,5 @@
 /************************************************************************************
- * arch/arm/src/sama5/chip/sam_gpbr.h
+ * arch/arm/src/sama5/hardware/sam_gpbr.h
  *
  *   Copyright (C) 2013 Gregory Nutt. All rights reserved.
  *   Author: Gregory Nutt <gnutt@nuttx.org>
@@ -33,15 +33,15 @@
  *
  ************************************************************************************/
 
-#ifndef __ARCH_ARM_SRC_SAMA5_CHIP_SAM_GPBR_H
-#define __ARCH_ARM_SRC_SAMA5_CHIP_SAM_GPBR_H
+#ifndef __ARCH_ARM_SRC_SAMA5_HARDWARE_SAM_GPBR_H
+#define __ARCH_ARM_SRC_SAMA5_HARDWARE_SAM_GPBR_H
 
 /************************************************************************************
  * Included Files
  ************************************************************************************/
 
 #include <nuttx/config.h>
-#include "chip/sam_memorymap.h"
+#include "hardware/sam_memorymap.h"
 
 /************************************************************************************
  * Pre-processor Definitions
@@ -65,4 +65,4 @@
 /* GPBR Register Bit Definitions ****************************************************/
 /* All GPBR registers hold user-defined, 32-bit values */
 
-#endif /* __ARCH_ARM_SRC_SAMA5_CHIP_SAM_GPBR_H */
+#endif /* __ARCH_ARM_SRC_SAMA5_HARDWARE_SAM_GPBR_H */
diff --git a/arch/arm/src/sama5/chip/sam_hsmc.h b/arch/arm/src/sama5/hardware/sam_hsmc.h
similarity index 99%
rename from arch/arm/src/sama5/chip/sam_hsmc.h
rename to arch/arm/src/sama5/hardware/sam_hsmc.h
index 20b06294ca..cee2a3e437 100644
--- a/arch/arm/src/sama5/chip/sam_hsmc.h
+++ b/arch/arm/src/sama5/hardware/sam_hsmc.h
@@ -1,5 +1,5 @@
 /************************************************************************************
- * arch/arm/src/sama5/chip/sam_hsmc.h
+ * arch/arm/src/sama5/hardware/sam_hsmc.h
  *
  *   Copyright (C) 2013-2014 Gregory Nutt. All rights reserved.
  *   Author: Gregory Nutt <gnutt@nuttx.org>
@@ -33,15 +33,15 @@
  *
  ************************************************************************************/
 
-#ifndef __ARCH_ARM_SRC_SAMA5_CHIP_SAM_HSMC_H
-#define __ARCH_ARM_SRC_SAMA5_CHIP_SAM_HSMC_H
+#ifndef __ARCH_ARM_SRC_SAMA5_HARDWARE_SAM_HSMC_H
+#define __ARCH_ARM_SRC_SAMA5_HARDWARE_SAM_HSMC_H
 
 /************************************************************************************
  * Included Files
  ************************************************************************************/
 
 #include <nuttx/config.h>
-#include "chip/sam_memorymap.h"
+#include "hardware/sam_memorymap.h"
 
 /************************************************************************************
  * Pre-processor Definitions
@@ -637,4 +637,4 @@
 #define NFCDATA_ADDT_CYCLE4_MASK      (0xff << NFCDATA_ADDT_CYCLE4_SHIFT)
 #  define NFCDATA_ADDT_CYCLE4(n)      ((uint32_t)(n) << NFCDATA_ADDT_CYCLE4_SHIFT)
 
-#endif /* __ARCH_ARM_SRC_SAMA5_CHIP_SAM_HSMC_H */
+#endif /* __ARCH_ARM_SRC_SAMA5_HARDWARE_SAM_HSMC_H */
diff --git a/arch/arm/src/sama5/chip/sam_hsmci.h b/arch/arm/src/sama5/hardware/sam_hsmci.h
similarity index 99%
rename from arch/arm/src/sama5/chip/sam_hsmci.h
rename to arch/arm/src/sama5/hardware/sam_hsmci.h
index 6617343684..3dfc888b63 100644
--- a/arch/arm/src/sama5/chip/sam_hsmci.h
+++ b/arch/arm/src/sama5/hardware/sam_hsmci.h
@@ -1,5 +1,5 @@
 /****************************************************************************************
- * arch/arm/src/sama5/chip/sam_hsmci.h
+ * arch/arm/src/sama5/hardware/sam_hsmci.h
  *
  *   Copyright (C) 2013-2014 Gregory Nutt. All rights reserved.
  *   Author: Gregory Nutt <gnutt@nuttx.org>
@@ -33,8 +33,8 @@
  *
  ****************************************************************************************/
 
-#ifndef __ARCH_ARM_SRC_SAMA5_CHIP_SAM_HSMCI_H
-#define __ARCH_ARM_SRC_SAMA5_CHIP_SAM_HSMCI_H
+#ifndef __ARCH_ARM_SRC_SAMA5_HARDWARE_SAM_HSMCI_H
+#define __ARCH_ARM_SRC_SAMA5_HARDWARE_SAM_HSMCI_H
 
 /****************************************************************************************
  * Included Files
@@ -43,7 +43,7 @@
 #include <nuttx/config.h>
 
 #include "chip.h"
-#include "chip/sam_memorymap.h"
+#include "hardware/sam_memorymap.h"
 
 /****************************************************************************************
  * Pre-processor Definitions
@@ -373,4 +373,4 @@
  * Public Functions
  ****************************************************************************************/
 
-#endif /* __ARCH_ARM_SRC_SAMA5_CHIP_SAM_HSMCI_H */
+#endif /* __ARCH_ARM_SRC_SAMA5_HARDWARE_SAM_HSMCI_H */
diff --git a/arch/arm/src/sama5/chip/sam_isi.h b/arch/arm/src/sama5/hardware/sam_isi.h
similarity index 98%
rename from arch/arm/src/sama5/chip/sam_isi.h
rename to arch/arm/src/sama5/hardware/sam_isi.h
index 5c7605a2ad..40ef6d90c1 100644
--- a/arch/arm/src/sama5/chip/sam_isi.h
+++ b/arch/arm/src/sama5/hardware/sam_isi.h
@@ -1,5 +1,5 @@
 /************************************************************************************
- * arch/arm/src/sama5/chip/sam_isi.h
+ * arch/arm/src/sama5/hardware/sam_isi.h
  *
  *   Copyright (C) 2013-2014 Gregory Nutt. All rights reserved.
  *   Author: Gregory Nutt <gnutt@nuttx.org>
@@ -33,15 +33,15 @@
  *
  ************************************************************************************/
 
-#ifndef __ARCH_ARM_SRC_SAMA5_CHIP_SAM_ISI_H
-#define __ARCH_ARM_SRC_SAMA5_CHIP_SAM_ISI_H
+#ifndef __ARCH_ARM_SRC_SAMA5_HARDWARE_SAM_ISI_H
+#define __ARCH_ARM_SRC_SAMA5_HARDWARE_SAM_ISI_H
 
 /************************************************************************************
  * Included Files
  ************************************************************************************/
 
 #include <nuttx/config.h>
-#include "chip/sam_memorymap.h"
+#include "hardware/sam_memorymap.h"
 
 /************************************************************************************
  * Pre-processor Definitions
@@ -341,4 +341,4 @@ struct isi_dscr_s
   uint32_t dscr;  /* Next descriptor address */
 };
 
-#endif /* __ARCH_ARM_SRC_SAMA5_CHIP_SAM_ISI_H */
+#endif /* __ARCH_ARM_SRC_SAMA5_HARDWARE_SAM_ISI_H */
diff --git a/arch/arm/src/sama5/chip/sam_lcdc.h b/arch/arm/src/sama5/hardware/sam_lcdc.h
similarity index 99%
rename from arch/arm/src/sama5/chip/sam_lcdc.h
rename to arch/arm/src/sama5/hardware/sam_lcdc.h
index 8d311e06f9..2115599761 100644
--- a/arch/arm/src/sama5/chip/sam_lcdc.h
+++ b/arch/arm/src/sama5/hardware/sam_lcdc.h
@@ -1,5 +1,5 @@
 /************************************************************************************
- * arch/arm/src/sama5/chip/sam_lcdc.h
+ * arch/arm/src/sama5/hardware/sam_lcdc.h
  *
  *   Copyright (C) 2013-2014 Gregory Nutt. All rights reserved.
  *   Author: Gregory Nutt <gnutt@nuttx.org>
@@ -33,15 +33,15 @@
  *
  ************************************************************************************/
 
-#ifndef __ARCH_ARM_SRC_SAMA5_CHIP_SAM_LCDC_H
-#define __ARCH_ARM_SRC_SAMA5_CHIP_SAM_LCDC_H
+#ifndef __ARCH_ARM_SRC_SAMA5_HARDWARE_SAM_LCDC_H
+#define __ARCH_ARM_SRC_SAMA5_HARDWARE_SAM_LCDC_H
 
 /************************************************************************************
  * Included Files
  ************************************************************************************/
 
 #include <nuttx/config.h>
-#include "chip/sam_memorymap.h"
+#include "hardware/sam_memorymap.h"
 
 /************************************************************************************
  * Pre-processor Definitions
@@ -1993,4 +1993,4 @@ struct sam_dscr_s
 };
 #define SIZEOF_SAM_DSCR_S 16
 
-#endif /* __ARCH_ARM_SRC_SAMA5_CHIP_SAM_LCDC_H */
+#endif /* __ARCH_ARM_SRC_SAMA5_HARDWARE_SAM_LCDC_H */
diff --git a/arch/arm/src/sama5/chip/sam_matrix.h b/arch/arm/src/sama5/hardware/sam_matrix.h
similarity index 99%
rename from arch/arm/src/sama5/chip/sam_matrix.h
rename to arch/arm/src/sama5/hardware/sam_matrix.h
index f1da282685..94bbac1aaa 100644
--- a/arch/arm/src/sama5/chip/sam_matrix.h
+++ b/arch/arm/src/sama5/hardware/sam_matrix.h
@@ -1,5 +1,5 @@
 /****************************************************************************************
- * arch/arm/src/sama5/chip/sam_matrix.h
+ * arch/arm/src/sama5/hardware/sam_matrix.h
  * Bux matrix definitions for the SAMA5
  *
  *   Copyright (C) 2013 Gregory Nutt. All rights reserved.
@@ -34,8 +34,8 @@
  *
  ****************************************************************************************/
 
-#ifndef __ARCH_ARM_SRC_SAMA5_CHIP_SAM_MATRIX_H
-#define __ARCH_ARM_SRC_SAMA5_CHIP_SAM_MATRIX_H
+#ifndef __ARCH_ARM_SRC_SAMA5_HARDWARE_SAM_MATRIX_H
+#define __ARCH_ARM_SRC_SAMA5_HARDWARE_SAM_MATRIX_H
 
 /****************************************************************************************
  * Included Files
@@ -44,7 +44,7 @@
 #include <nuttx/config.h>
 
 #include "chip.h"
-#include "chip/sam_memorymap.h"
+#include "hardware/sam_memorymap.h"
 
 /****************************************************************************************
  * Pre-processor Definitions
@@ -1006,4 +1006,4 @@
  * Public Functions
  ****************************************************************************************/
 
-#endif /* __ARCH_ARM_SRC_SAMA5_CHIP_SAM_MATRIX_H */
+#endif /* __ARCH_ARM_SRC_SAMA5_HARDWARE_SAM_MATRIX_H */
diff --git a/arch/arm/src/sama5/chip/sam_memorymap.h b/arch/arm/src/sama5/hardware/sam_memorymap.h
similarity index 86%
rename from arch/arm/src/sama5/chip/sam_memorymap.h
rename to arch/arm/src/sama5/hardware/sam_memorymap.h
index 73ecf13aec..ed91269299 100644
--- a/arch/arm/src/sama5/chip/sam_memorymap.h
+++ b/arch/arm/src/sama5/hardware/sam_memorymap.h
@@ -1,5 +1,5 @@
 /************************************************************************************
- * arch/arm/src/sama5/chip/sam_memorymap.h
+ * arch/arm/src/sama5/hardware/sam_memorymap.h
  *
  *   Copyright (C) 2013-2015 Gregory Nutt. All rights reserved.
  *   Author: Gregory Nutt <gnutt@nuttx.org>
@@ -33,8 +33,8 @@
  *
  ************************************************************************************/
 
-#ifndef __ARCH_ARM_SRC_SAMA5_CHIP_SAM_MEMORYMAP_H
-#define __ARCH_ARM_SRC_SAMA5_CHIP_SAM_MEMORYMAP_H
+#ifndef __ARCH_ARM_SRC_SAMA5_HARDWARE_SAM_MEMORYMAP_H
+#define __ARCH_ARM_SRC_SAMA5_HARDWARE_SAM_MEMORYMAP_H
 
 /************************************************************************************
  * Included Files
@@ -44,13 +44,13 @@
 #include <arch/sama5/chip.h>
 
 #if defined(ATSAMA5D2)
-#  include "chip/_sama5d2x_memorymap.h"
+#  include "hardware/_sama5d2x_memorymap.h"
 #elif defined(ATSAMA5D3)
-#  include "chip/_sama5d3x_memorymap.h"
+#  include "hardware/_sama5d3x_memorymap.h"
 #elif defined(ATSAMA5D4)
-#  include "chip/_sama5d4x_memorymap.h"
+#  include "hardware/_sama5d4x_memorymap.h"
 #else
 #  error Unrecognized SAMA5 architecture
 #endif
 
-#endif /* __ARCH_ARM_SRC_SAMA5_CHIP_SAM_MEMORYMAP_H */
+#endif /* __ARCH_ARM_SRC_SAMA5_HARDWARE_SAM_MEMORYMAP_H */
diff --git a/arch/arm/src/sama5/chip/sam_mpddrc.h b/arch/arm/src/sama5/hardware/sam_mpddrc.h
similarity index 88%
rename from arch/arm/src/sama5/chip/sam_mpddrc.h
rename to arch/arm/src/sama5/hardware/sam_mpddrc.h
index 06b217d8aa..e8ba3515b7 100644
--- a/arch/arm/src/sama5/chip/sam_mpddrc.h
+++ b/arch/arm/src/sama5/hardware/sam_mpddrc.h
@@ -1,5 +1,5 @@
 /************************************************************************************
- * arch/arm/src/sama5/chip/sam_mpddrc.h
+ * arch/arm/src/sama5/hardware/sam_mpddrc.h
  *
  *   Copyright (C) 2013-2014 Gregory Nutt. All rights reserved.
  *   Author: Gregory Nutt <gnutt@nuttx.org>
@@ -33,8 +33,8 @@
  *
  ************************************************************************************/
 
-#ifndef __ARCH_ARM_SRC_SAMA5_CHIP_SAM_MPDDRC_H
-#define __ARCH_ARM_SRC_SAMA5_CHIP_SAM_MPDDRC_H
+#ifndef __ARCH_ARM_SRC_SAMA5_HARDWARE_SAM_MPDDRC_H
+#define __ARCH_ARM_SRC_SAMA5_HARDWARE_SAM_MPDDRC_H
 
 /************************************************************************************
  * Included Files
@@ -44,11 +44,11 @@
 #include <arch/sama5/chip.h>
 
 #if defined(ATSAMA5D3)
-#  include "chip/_sama5d3x_mpddrc.h"
+#  include "hardware/_sama5d3x_mpddrc.h"
 #elif defined(ATSAMA5D4)
-#  include "chip/_sama5d4x_mpddrc.h"
+#  include "hardware/_sama5d4x_mpddrc.h"
 #else
 #  error Unrecognized SAMA5 architecture
 #endif
 
-#endif /* __ARCH_ARM_SRC_SAMA5_CHIP_SAM_MPDDRC_H */
+#endif /* __ARCH_ARM_SRC_SAMA5_HARDWARE_SAM_MPDDRC_H */
diff --git a/arch/arm/src/sama5/chip/sam_ohci.h b/arch/arm/src/sama5/hardware/sam_ohci.h
similarity index 95%
rename from arch/arm/src/sama5/chip/sam_ohci.h
rename to arch/arm/src/sama5/hardware/sam_ohci.h
index 4d3681de39..b5aaa9d27f 100644
--- a/arch/arm/src/sama5/chip/sam_ohci.h
+++ b/arch/arm/src/sama5/hardware/sam_ohci.h
@@ -1,5 +1,5 @@
 /****************************************************************************
- * arch/arm/src/sama5/chip/sam_ohci.h
+ * arch/arm/src/sama5/hardware/sam_ohci.h
  *
  *   Copyright (C) 2013 Gregory Nutt. All rights reserved.
  *   Author: Gregory Nutt <gnutt@nuttx.org>
@@ -33,8 +33,8 @@
  *
  ****************************************************************************/
 
-#ifndef __ARCH_ARM_SRC_SAMA5_CHIP_SAM_OHCI_H
-#define __ARCH_ARM_SRC_SAMA5_CHIP_SAM_OHCI_H
+#ifndef __ARCH_ARM_SRC_SAMA5_HARDWARE_SAM_OHCI_H
+#define __ARCH_ARM_SRC_SAMA5_HARDWARE_SAM_OHCI_H
 
 /****************************************************************************
  * Included Files
@@ -44,7 +44,7 @@
 #include <nuttx/usb/ohci.h>
 
 #include "chip.h"
-#include "chip/sam_memorymap.h"
+#include "hardware/sam_memorymap.h"
 
 /****************************************************************************
  * Pre-processor Definitions
@@ -109,4 +109,4 @@
  * Public Functions
  ****************************************************************************/
 
-#endif /* __ARCH_ARM_SRC_SAMA5_CHIP_SAM_OHCI_H */
+#endif /* __ARCH_ARM_SRC_SAMA5_HARDWARE_SAM_OHCI_H */
diff --git a/arch/arm/src/sama5/chip/sam_pinmap.h b/arch/arm/src/sama5/hardware/sam_pinmap.h
similarity index 86%
rename from arch/arm/src/sama5/chip/sam_pinmap.h
rename to arch/arm/src/sama5/hardware/sam_pinmap.h
index 461fb1f545..52dd494545 100644
--- a/arch/arm/src/sama5/chip/sam_pinmap.h
+++ b/arch/arm/src/sama5/hardware/sam_pinmap.h
@@ -1,5 +1,5 @@
 /************************************************************************************
- * arch/arm/src/sama5/chip/sam_pinmap.h
+ * arch/arm/src/sama5/hardware/sam_pinmap.h
  *
  *   Copyright (C) 2013-2014 Gregory Nutt. All rights reserved.
  *   Author: Gregory Nutt <gnutt@nuttx.org>
@@ -33,8 +33,8 @@
  *
  ************************************************************************************/
 
-#ifndef __ARCH_ARM_SRC_SAMA5_CHIP_SAM_PINMAP_H
-#define __ARCH_ARM_SRC_SAMA5_CHIP_SAM_PINMAP_H
+#ifndef __ARCH_ARM_SRC_SAMA5_HARDWARE_SAM_PINMAP_H
+#define __ARCH_ARM_SRC_SAMA5_HARDWARE_SAM_PINMAP_H
 
 /************************************************************************************
  * Included Files
@@ -44,13 +44,13 @@
 #include <arch/sama5/chip.h>
 
 #if defined(ATSAMA5D2)
-#  include "chip/_sama5d2x_pinmap.h"
+#  include "hardware/_sama5d2x_pinmap.h"
 #elif defined(ATSAMA5D3)
-#  include "chip/_sama5d3x_pinmap.h"
+#  include "hardware/_sama5d3x_pinmap.h"
 #elif defined(ATSAMA5D4)
-#  include "chip/_sama5d4x_pinmap.h"
+#  include "hardware/_sama5d4x_pinmap.h"
 #else
 #  error Unrecognized SAMA5 architecture
 #endif
 
-#endif /* __ARCH_ARM_SRC_SAMA5_CHIP_SAM_PINMAP_H */
+#endif /* __ARCH_ARM_SRC_SAMA5_HARDWARE_SAM_PINMAP_H */
diff --git a/arch/arm/src/sama5/chip/sam_pio.h b/arch/arm/src/sama5/hardware/sam_pio.h
similarity index 88%
rename from arch/arm/src/sama5/chip/sam_pio.h
rename to arch/arm/src/sama5/hardware/sam_pio.h
index 7a37fe6cfa..5fa606597b 100644
--- a/arch/arm/src/sama5/chip/sam_pio.h
+++ b/arch/arm/src/sama5/hardware/sam_pio.h
@@ -1,5 +1,5 @@
 /************************************************************************************
- * arch/arm/src/sama5/chip/sam_pio.h
+ * arch/arm/src/sama5/hardware/sam_pio.h
  *
  *   Copyright (C) 2015 Gregory Nutt. All rights reserved.
  *   Author: Gregory Nutt <gnutt@nuttx.org>
@@ -33,8 +33,8 @@
  *
  ************************************************************************************/
 
-#ifndef __ARCH_ARM_SRC_SAMA5_CHIP_SAM_PIO_H
-#define __ARCH_ARM_SRC_SAMA5_CHIP_SAM_PIO_H
+#ifndef __ARCH_ARM_SRC_SAMA5_HARDWARE_SAM_PIO_H
+#define __ARCH_ARM_SRC_SAMA5_HARDWARE_SAM_PIO_H
 
 /************************************************************************************
  * Included Files
@@ -44,11 +44,11 @@
 #include <arch/sama5/chip.h>
 
 #if defined(ATSAMA5D2)
-#  include "chip/_sama5d2x_pio.h"
+#  include "hardware/_sama5d2x_pio.h"
 #elif defined(ATSAMA5D3) || defined(ATSAMA5D4)
-#  include "chip/_sama5d3x4x_pio.h"
+#  include "hardware/_sama5d3x4x_pio.h"
 #else
 #  error Unrecognized SAMA5 architecture
 #endif
 
-#endif /* __ARCH_ARM_SRC_SAMA5_CHIP_SAM_PIO_H */
+#endif /* __ARCH_ARM_SRC_SAMA5_HARDWARE_SAM_PIO_H */
diff --git a/arch/arm/src/sama5/chip/sam_pit.h b/arch/arm/src/sama5/hardware/sam_pit.h
similarity index 94%
rename from arch/arm/src/sama5/chip/sam_pit.h
rename to arch/arm/src/sama5/hardware/sam_pit.h
index 1f93f4b75c..be1adfb9b0 100644
--- a/arch/arm/src/sama5/chip/sam_pit.h
+++ b/arch/arm/src/sama5/hardware/sam_pit.h
@@ -1,5 +1,5 @@
 /************************************************************************************
- * arch/arm/src/sama5/chip/sam_pit.h
+ * arch/arm/src/sama5/hardware/sam_pit.h
  *
  *   Copyright (C) 2013 Gregory Nutt. All rights reserved.
  *   Author: Gregory Nutt <gnutt@nuttx.org>
@@ -33,15 +33,15 @@
  *
  ************************************************************************************/
 
-#ifndef __ARCH_ARM_SRC_SAMA5_CHIP_SAM_PIT_H
-#define __ARCH_ARM_SRC_SAMA5_CHIP_SAM_PIT_H
+#ifndef __ARCH_ARM_SRC_SAMA5_HARDWARE_SAM_PIT_H
+#define __ARCH_ARM_SRC_SAMA5_HARDWARE_SAM_PIT_H
 
 /************************************************************************************
  * Included Files
  ************************************************************************************/
 
 #include <nuttx/config.h>
-#include "chip/sam_memorymap.h"
+#include "hardware/sam_memorymap.h"
 
 /************************************************************************************
  * Pre-processor Definitions
@@ -82,4 +82,4 @@
 #define PIT_PICNT_SHIFT     (20) /* Bits 20-31: Periodic Interval Counter */
 #define PIT_PICNT_MASK      (0xfff << PIT_PIVR_PICNT_SHIFT)
 
-#endif /* __ARCH_ARM_SRC_SAMA5_CHIP_SAM_PIT_H */
+#endif /* __ARCH_ARM_SRC_SAMA5_HARDWARE_SAM_PIT_H */
diff --git a/arch/arm/src/sama5/chip/sam_pmc.h b/arch/arm/src/sama5/hardware/sam_pmc.h
similarity index 99%
rename from arch/arm/src/sama5/chip/sam_pmc.h
rename to arch/arm/src/sama5/hardware/sam_pmc.h
index abe06ed86b..aa5e9ee56a 100644
--- a/arch/arm/src/sama5/chip/sam_pmc.h
+++ b/arch/arm/src/sama5/hardware/sam_pmc.h
@@ -1,5 +1,5 @@
 /********************************************************************************************
- * arch/arm/src/sama5/chip/sam_pmc.h
+ * arch/arm/src/sama5/hardware/sam_pmc.h
  * Power Management Controller (PMC) for the SAMA5
  *
  *   Copyright (C) 2013-2014 Gregory Nutt. All rights reserved.
@@ -34,8 +34,8 @@
  *
  ********************************************************************************************/
 
-#ifndef __ARCH_ARM_SRC_SAMA5_CHIP_SAM_PMC_H
-#define __ARCH_ARM_SRC_SAMA5_CHIP_SAM_PMC_H
+#ifndef __ARCH_ARM_SRC_SAMA5_HARDWARE_SAM_PMC_H
+#define __ARCH_ARM_SRC_SAMA5_HARDWARE_SAM_PMC_H
 
 /********************************************************************************************
  * Included Files
@@ -44,7 +44,7 @@
 #include <nuttx/config.h>
 
 #include "chip.h"
-#include "chip/sam_memorymap.h"
+#include "hardware/sam_memorymap.h"
 
 /********************************************************************************************
  * Pre-processor Definitions
@@ -680,4 +680,4 @@
  * Public Functions
  ********************************************************************************************/
 
-#endif /* __ARCH_ARM_SRC_SAMA5_CHIP_SAM_PMC_H */
+#endif /* __ARCH_ARM_SRC_SAMA5_HARDWARE_SAM_PMC_H */
diff --git a/arch/arm/src/sama5/chip/sam_pwm.h b/arch/arm/src/sama5/hardware/sam_pwm.h
similarity index 99%
rename from arch/arm/src/sama5/chip/sam_pwm.h
rename to arch/arm/src/sama5/hardware/sam_pwm.h
index 8aef808f29..307dc74117 100644
--- a/arch/arm/src/sama5/chip/sam_pwm.h
+++ b/arch/arm/src/sama5/hardware/sam_pwm.h
@@ -1,5 +1,5 @@
 /************************************************************************************
- * arch/arm/src/sama5/chip/sam_pwm.h
+ * arch/arm/src/sama5/hardware/sam_pwm.h
  *
  *   Copyright (C) 2013 Gregory Nutt. All rights reserved.
  *   Author: Gregory Nutt <gnutt@nuttx.org>
@@ -33,15 +33,15 @@
  *
  ************************************************************************************/
 
-#ifndef __ARCH_ARM_SRC_SAMA5_CHIP_SAM_PWM_H
-#define __ARCH_ARM_SRC_SAMA5_CHIP_SAM_PWM_H
+#ifndef __ARCH_ARM_SRC_SAMA5_HARDWARE_SAM_PWM_H
+#define __ARCH_ARM_SRC_SAMA5_HARDWARE_SAM_PWM_H
 
 /************************************************************************************
  * Included Files
  ************************************************************************************/
 
 #include <nuttx/config.h>
-#include "chip/sam_memorymap.h"
+#include "hardware/sam_memorymap.h"
 
 /************************************************************************************
  * Pre-processor Definitions
@@ -750,4 +750,4 @@
 #  define PWM_CMUPD_CPOLINVUP      (1 << 13) /* Bit 13: Channel Polarity Inversion Update */
 #endif
 
-#endif /* __ARCH_ARM_SRC_SAMA5_CHIP_SAM_PWM_H */
+#endif /* __ARCH_ARM_SRC_SAMA5_HARDWARE_SAM_PWM_H */
diff --git a/arch/arm/src/sama5/chip/sam_rtc.h b/arch/arm/src/sama5/hardware/sam_rtc.h
similarity index 98%
rename from arch/arm/src/sama5/chip/sam_rtc.h
rename to arch/arm/src/sama5/hardware/sam_rtc.h
index c6d81a8c30..0affabba93 100644
--- a/arch/arm/src/sama5/chip/sam_rtc.h
+++ b/arch/arm/src/sama5/hardware/sam_rtc.h
@@ -1,5 +1,5 @@
 /****************************************************************************************
- * arch/arm/src/sama5d/chip/sam_rtc.h
+ * arch/arm/src/sama5/hardware/sam_rtc.h
  * Real-time Clock (RTC) definitions for the SAMA5D3
  *
  *   Copyright (C) 2013-2014 Gregory Nutt. All rights reserved.
@@ -34,8 +34,8 @@
  *
  ****************************************************************************************/
 
-#ifndef __ARCH_ARM_SRC_SAMA5_CHIP_SAM_RTC_H
-#define __ARCH_ARM_SRC_SAMA5_CHIP_SAM_RTC_H
+#ifndef __ARCH_ARM_SRC_SAMA5_HARDWARE_SAM_RTC_H
+#define __ARCH_ARM_SRC_SAMA5_HARDWARE_SAM_RTC_H
 
 /****************************************************************************************
  * Included Files
@@ -44,7 +44,7 @@
 #include <nuttx/config.h>
 
 #include "chip.h"
-#include "chip/sam_memorymap.h"
+#include "hardware/sam_memorymap.h"
 
 /****************************************************************************************
  * Pre-processor Definitions
@@ -348,4 +348,4 @@
  * Public Functions
  ****************************************************************************************/
 
-#endif /* __ARCH_ARM_SRC_SAMA5_CHIP_SAM_RTC_H */
+#endif /* __ARCH_ARM_SRC_SAMA5_HARDWARE_SAM_RTC_H */
diff --git a/arch/arm/src/sama5/chip/sam_rxlp.h b/arch/arm/src/sama5/hardware/sam_rxlp.h
similarity index 96%
rename from arch/arm/src/sama5/chip/sam_rxlp.h
rename to arch/arm/src/sama5/hardware/sam_rxlp.h
index b9bebee443..bb31ff3bd5 100644
--- a/arch/arm/src/sama5/chip/sam_rxlp.h
+++ b/arch/arm/src/sama5/hardware/sam_rxlp.h
@@ -1,5 +1,5 @@
 /************************************************************************************************
- * arch/arm/src/sama5/chip/sam_RXLP.h
+ * arch/arm/src/sama5/hardware/sam_RXLP.h
  * Low Power Asynchronous Receiver (RXLP) definitions for the SAMA5D3
  * and SAMAD4
  *
@@ -35,8 +35,8 @@
  *
  ************************************************************************************************/
 
-#ifndef __ARCH_ARM_SRC_SAMA5_CHIP_SAM_RXLP_H
-#define __ARCH_ARM_SRC_SAMA5_CHIP_SAM_RXLP_H
+#ifndef __ARCH_ARM_SRC_SAMA5_HARDWARE_SAM_RXLP_H
+#define __ARCH_ARM_SRC_SAMA5_HARDWARE_SAM_RXLP_H
 
 /************************************************************************************************
  * Included Files
@@ -45,7 +45,7 @@
 #include <nuttx/config.h>
 
 #include "chip.h"
-#include "chip/sam_memorymap.h"
+#include "hardware/sam_memorymap.h"
 
 /************************************************************************************************
  * Pre-processor Definitions
@@ -131,4 +131,4 @@
  * Public Functions
  ************************************************************************************************/
 
-#endif /* __ARCH_ARM_SRC_SAMA5_CHIP_SAM_RXLP_H */
+#endif /* __ARCH_ARM_SRC_SAMA5_HARDWARE_SAM_RXLP_H */
diff --git a/arch/arm/src/sama5/chip/sam_sckc.h b/arch/arm/src/sama5/hardware/sam_sckc.h
similarity index 92%
rename from arch/arm/src/sama5/chip/sam_sckc.h
rename to arch/arm/src/sama5/hardware/sam_sckc.h
index e9071585ae..136cb865aa 100644
--- a/arch/arm/src/sama5/chip/sam_sckc.h
+++ b/arch/arm/src/sama5/hardware/sam_sckc.h
@@ -1,5 +1,5 @@
 /************************************************************************************
- * arch/arm/src/sama5/chip/sam_sckc.h
+ * arch/arm/src/sama5/hardware/sam_sckc.h
  *
  *   Copyright (C) 2014 Gregory Nutt. All rights reserved.
  *   Author: Gregory Nutt <gnutt@nuttx.org>
@@ -33,15 +33,15 @@
  *
  ************************************************************************************/
 
-#ifndef __ARCH_ARM_SRC_SAMA5_CHIP_SAM_SCKC_H
-#define __ARCH_ARM_SRC_SAMA5_CHIP_SAM_SCKC_H
+#ifndef __ARCH_ARM_SRC_SAMA5_HARDWARE_SAM_SCKC_H
+#define __ARCH_ARM_SRC_SAMA5_HARDWARE_SAM_SCKC_H
 
 /************************************************************************************
  * Included Files
  ************************************************************************************/
 
 #include <nuttx/config.h>
-#include "chip/sam_memorymap.h"
+#include "hardware/sam_memorymap.h"
 
 /************************************************************************************
  * Pre-processor Definitions
@@ -66,4 +66,4 @@
 
 #define SCKC_CR_OSCSEL        (1 << 3)  /* Bit 3:  Slow Clock Selector */
 
-#endif /* __ARCH_ARM_SRC_SAMA5_CHIP_SAM_SCKC_H */
+#endif /* __ARCH_ARM_SRC_SAMA5_HARDWARE_SAM_SCKC_H */
diff --git a/arch/arm/src/sama5/chip/sam_sfr.h b/arch/arm/src/sama5/hardware/sam_sfr.h
similarity index 98%
rename from arch/arm/src/sama5/chip/sam_sfr.h
rename to arch/arm/src/sama5/hardware/sam_sfr.h
index 03926e7bd6..fbd731ec16 100644
--- a/arch/arm/src/sama5/chip/sam_sfr.h
+++ b/arch/arm/src/sama5/hardware/sam_sfr.h
@@ -1,5 +1,5 @@
 /************************************************************************************
- * arch/arm/src/sama5/chip/sam_sfr.h
+ * arch/arm/src/sama5/hardware/sam_sfr.h
  *
  *   Copyright (C) 2013-2015 Gregory Nutt. All rights reserved.
  *   Author: Gregory Nutt <gnutt@nuttx.org>
@@ -33,15 +33,15 @@
  *
  ************************************************************************************/
 
-#ifndef __ARCH_ARM_SRC_SAMA5_CHIP_SAM_SFR_H
-#define __ARCH_ARM_SRC_SAMA5_CHIP_SAM_SFR_H
+#ifndef __ARCH_ARM_SRC_SAMA5_HARDWARE_SAM_SFR_H
+#define __ARCH_ARM_SRC_SAMA5_HARDWARE_SAM_SFR_H
 
 /************************************************************************************
  * Included Files
  ************************************************************************************/
 
 #include <nuttx/config.h>
-#include "chip/sam_memorymap.h"
+#include "hardware/sam_memorymap.h"
 
 /************************************************************************************
  * Pre-processor Definitions
@@ -310,4 +310,4 @@
 #    define SFR_QSPICLK_3p3V        (1 << 0)  /* Bit 0: 1=3.3V */
 #endif
 
-#endif /* __ARCH_ARM_SRC_SAMA5_CHIP_SAM_SFR_H */
+#endif /* __ARCH_ARM_SRC_SAMA5_HARDWARE_SAM_SFR_H */
diff --git a/arch/arm/src/sama5/chip/sam_spi.h b/arch/arm/src/sama5/hardware/sam_spi.h
similarity index 98%
rename from arch/arm/src/sama5/chip/sam_spi.h
rename to arch/arm/src/sama5/hardware/sam_spi.h
index b9a7bcf17c..a2dde6dd01 100644
--- a/arch/arm/src/sama5/chip/sam_spi.h
+++ b/arch/arm/src/sama5/hardware/sam_spi.h
@@ -1,5 +1,5 @@
 /****************************************************************************************
- * arch/arm/src/sama5/chip/sam_spi.h
+ * arch/arm/src/sama5/hardware/sam_spi.h
  * Serial Peripheral Interface (SPI) definitions for the SAMA5
  *
  *   Copyright (C) 2013-2014 Gregory Nutt. All rights reserved.
@@ -34,8 +34,8 @@
  *
  ****************************************************************************************/
 
-#ifndef __ARCH_ARM_SRC_SAMA5_CHIP_SAM_SPI_H
-#define __ARCH_ARM_SRC_SAMA5_CHIP_SAM_SPI_H
+#ifndef __ARCH_ARM_SRC_SAMA5_HARDWARE_SAM_SPI_H
+#define __ARCH_ARM_SRC_SAMA5_HARDWARE_SAM_SPI_H
 
 /****************************************************************************************
  * Included Files
@@ -44,7 +44,7 @@
 #include <nuttx/config.h>
 
 #include "chip.h"
-#include "chip/sam_memorymap.h"
+#include "hardware/sam_memorymap.h"
 
 /****************************************************************************************
  * Pre-processor Definitions
@@ -238,4 +238,4 @@
  * Public Functions
  ****************************************************************************************/
 
-#endif /* __ARCH_ARM_SRC_SAMA5_CHIP_SAM_SPI_H */
+#endif /* __ARCH_ARM_SRC_SAMA5_HARDWARE_SAM_SPI_H */
diff --git a/arch/arm/src/sama5/chip/sam_ssc.h b/arch/arm/src/sama5/hardware/sam_ssc.h
similarity index 98%
rename from arch/arm/src/sama5/chip/sam_ssc.h
rename to arch/arm/src/sama5/hardware/sam_ssc.h
index 558805027c..bc13c23835 100644
--- a/arch/arm/src/sama5/chip/sam_ssc.h
+++ b/arch/arm/src/sama5/hardware/sam_ssc.h
@@ -1,5 +1,5 @@
 /************************************************************************************
- * arch/arm/src/sama5/chip/sam_ssc.h
+ * arch/arm/src/sama5/hardware/sam_ssc.h
  *
  *   Copyright (C) 2013-2014 Gregory Nutt. All rights reserved.
  *   Author: Gregory Nutt <gnutt@nuttx.org>
@@ -33,15 +33,15 @@
  *
  ************************************************************************************/
 
-#ifndef __ARCH_ARM_SRC_SAMA5_CHIP_SAM_SSC_H
-#define __ARCH_ARM_SRC_SAMA5_CHIP_SAM_SSC_H
+#ifndef __ARCH_ARM_SRC_SAMA5_HARDWARE_SAM_SSC_H
+#define __ARCH_ARM_SRC_SAMA5_HARDWARE_SAM_SSC_H
 
 /************************************************************************************
  * Included Files
  ************************************************************************************/
 
 #include <nuttx/config.h>
-#include "chip/sam_memorymap.h"
+#include "hardware/sam_memorymap.h"
 
 /************************************************************************************
  * Pre-processor Definitions
@@ -304,4 +304,4 @@
 #define SSC_WPSR_WPVSRC_SHIFT      (8)       /* Bits 8-23: Write Protect Violation Source */
 #define SSC_WPSR_WPVSRC_MASK       (0xffff << SSC_WPSR_WPVSRC_SHIFT)
 
-#endif /* __ARCH_ARM_SRC_SAMA5_CHIP_SAM_SSC_H */
+#endif /* __ARCH_ARM_SRC_SAMA5_HARDWARE_SAM_SSC_H */
diff --git a/arch/arm/src/sama5/chip/sam_tc.h b/arch/arm/src/sama5/hardware/sam_tc.h
similarity index 99%
rename from arch/arm/src/sama5/chip/sam_tc.h
rename to arch/arm/src/sama5/hardware/sam_tc.h
index 0ecc9fab44..9fb7dc026f 100644
--- a/arch/arm/src/sama5/chip/sam_tc.h
+++ b/arch/arm/src/sama5/hardware/sam_tc.h
@@ -1,5 +1,5 @@
 /************************************************************************************
- * arch/arm/src/sama5/chip/sam_tc.h
+ * arch/arm/src/sama5/hardware/sam_tc.h
  *
  *   Copyright (C) 2013-2014 Gregory Nutt. All rights reserved.
  *   Author: Gregory Nutt <gnutt@nuttx.org>
@@ -33,15 +33,15 @@
  *
  ************************************************************************************/
 
-#ifndef __ARCH_ARM_SRC_SAMA5_CHIP_SAM_TC_H
-#define __ARCH_ARM_SRC_SAMA5_CHIP_SAM_TC_H
+#ifndef __ARCH_ARM_SRC_SAMA5_HARDWARE_SAM_TC_H
+#define __ARCH_ARM_SRC_SAMA5_HARDWARE_SAM_TC_H
 
 /************************************************************************************
  * Included Files
  ************************************************************************************/
 
 #include <nuttx/config.h>
-#include "chip/sam_memorymap.h"
+#include "hardware/sam_memorymap.h"
 
 /************************************************************************************
  * Pre-processor Definitions
@@ -642,4 +642,4 @@
 #define TC_WPMR_WPKEY_MASK       (0xffffff << TC_WPMR_WPKEY_SHIFT)
 #  define TC_WPMR_WPKEY          (0x54494d << TC_WPMR_WPKEY_SHIFT) /* "TIM" in ASCII */
 
-#endif /* __ARCH_ARM_SRC_SAMA5_CHIP_SAM_TC_H */
+#endif /* __ARCH_ARM_SRC_SAMA5_HARDWARE_SAM_TC_H */
diff --git a/arch/arm/src/sama5/chip/sam_trng.h b/arch/arm/src/sama5/hardware/sam_trng.h
similarity index 94%
rename from arch/arm/src/sama5/chip/sam_trng.h
rename to arch/arm/src/sama5/hardware/sam_trng.h
index 15ac49cb10..131c3a6255 100644
--- a/arch/arm/src/sama5/chip/sam_trng.h
+++ b/arch/arm/src/sama5/hardware/sam_trng.h
@@ -1,5 +1,5 @@
 /************************************************************************************
- * arch/arm/src/sama5/chip/sam_trng.h
+ * arch/arm/src/sama5/hardware/sam_trng.h
  *
  *   Copyright (C) 2013 Gregory Nutt. All rights reserved.
  *   Author: Gregory Nutt <gnutt@nuttx.org>
@@ -33,15 +33,15 @@
  *
  ************************************************************************************/
 
-#ifndef __ARCH_ARM_SRC_SAMA5_CHIP_SAM_TRNG_H
-#define __ARCH_ARM_SRC_SAMA5_CHIP_SAM_TRNG_H
+#ifndef __ARCH_ARM_SRC_SAMA5_HARDWARE_SAM_TRNG_H
+#define __ARCH_ARM_SRC_SAMA5_HARDWARE_SAM_TRNG_H
 
 /************************************************************************************
  * Included Files
  ************************************************************************************/
 
 #include <nuttx/config.h>
-#include "chip/sam_memorymap.h"
+#include "hardware/sam_memorymap.h"
 
 /************************************************************************************
  * Pre-processor Definitions
@@ -82,4 +82,4 @@
 
 /* Output Data Register (32-bit output data) */
 
-#endif /* __ARCH_ARM_SRC_SAMA5_CHIP_SAM_TRNG_H */
+#endif /* __ARCH_ARM_SRC_SAMA5_HARDWARE_SAM_TRNG_H */
diff --git a/arch/arm/src/sama5/chip/sam_twi.h b/arch/arm/src/sama5/hardware/sam_twi.h
similarity index 98%
rename from arch/arm/src/sama5/chip/sam_twi.h
rename to arch/arm/src/sama5/hardware/sam_twi.h
index daf1181be5..536b0c721b 100644
--- a/arch/arm/src/sama5/chip/sam_twi.h
+++ b/arch/arm/src/sama5/hardware/sam_twi.h
@@ -1,5 +1,5 @@
 /****************************************************************************************
- * arch/arm/src/sama5/chip/sam_twi.h
+ * arch/arm/src/sama5/hardware/sam_twi.h
  * Two-wire Interface (TWI) definitions for the SAMA5
  *
  *   Copyright (C) 2013-2014 Gregory Nutt. All rights reserved.
@@ -34,8 +34,8 @@
  *
  ****************************************************************************************/
 
-#ifndef __ARCH_ARM_SRC_SAMA5_CHIP_SAM_TWI_H
-#define __ARCH_ARM_SRC_SAMA5_CHIP_SAM_TWI_H
+#ifndef __ARCH_ARM_SRC_SAMA5_HARDWARE_SAM_TWI_H
+#define __ARCH_ARM_SRC_SAMA5_HARDWARE_SAM_TWI_H
 
 /****************************************************************************************
  * Included Files
@@ -44,7 +44,7 @@
 #include <nuttx/config.h>
 
 #include "chip.h"
-#include "chip/sam_memorymap.h"
+#include "hardware/sam_memorymap.h"
 
 /****************************************************************************************
  * Pre-processor Definitions
@@ -239,4 +239,4 @@
  * Public Functions
  ****************************************************************************************/
 
-#endif /* __ARCH_ARM_SRC_SAMA5_CHIP_SAM_TWI_H */
+#endif /* __ARCH_ARM_SRC_SAMA5_HARDWARE_SAM_TWI_H */
diff --git a/arch/arm/src/sama5/chip/sam_uart.h b/arch/arm/src/sama5/hardware/sam_uart.h
similarity index 99%
rename from arch/arm/src/sama5/chip/sam_uart.h
rename to arch/arm/src/sama5/hardware/sam_uart.h
index 2ce0abbbf1..a7e16a4dd2 100644
--- a/arch/arm/src/sama5/chip/sam_uart.h
+++ b/arch/arm/src/sama5/hardware/sam_uart.h
@@ -1,5 +1,5 @@
 /************************************************************************************************
- * arch/arm/src/sama5/chip/sam_uart.h
+ * arch/arm/src/sama5/hardware/sam_uart.h
  * Universal Asynchronous Receiver Transmitter (UART) for the SAMA5D2, SAMA5D3, and SAMA5D4 and
  * Universal Synchronous Asynchronous Receiver Transmitter (USART) definitions for the SAMA5D3
  * and SAMAD4
@@ -36,8 +36,8 @@
  *
  ************************************************************************************************/
 
-#ifndef __ARCH_ARM_SRC_SAMA5_CHIP_SAM_UART_H
-#define __ARCH_ARM_SRC_SAMA5_CHIP_SAM_UART_H
+#ifndef __ARCH_ARM_SRC_SAMA5_HARDWARE_SAM_UART_H
+#define __ARCH_ARM_SRC_SAMA5_HARDWARE_SAM_UART_H
 
 /************************************************************************************************
  * Included Files
@@ -46,7 +46,7 @@
 #include <nuttx/config.h>
 
 #include "chip.h"
-#include "chip/sam_memorymap.h"
+#include "hardware/sam_memorymap.h"
 
 /************************************************************************************************
  * Pre-processor Definitions
@@ -572,4 +572,4 @@
  * Public Functions
  ************************************************************************************************/
 
-#endif /* __ARCH_ARM_SRC_SAMA5_CHIP_SAM_UART_H */
+#endif /* __ARCH_ARM_SRC_SAMA5_HARDWARE_SAM_UART_H */
diff --git a/arch/arm/src/sama5/chip/sam_udphs.h b/arch/arm/src/sama5/hardware/sam_udphs.h
similarity index 99%
rename from arch/arm/src/sama5/chip/sam_udphs.h
rename to arch/arm/src/sama5/hardware/sam_udphs.h
index 5b5becbfa4..6045d2ee14 100644
--- a/arch/arm/src/sama5/chip/sam_udphs.h
+++ b/arch/arm/src/sama5/hardware/sam_udphs.h
@@ -1,5 +1,5 @@
 /********************************************************************************************
- * arch/arm/src/sama5/chip/sam_udphs.h
+ * arch/arm/src/sama5/hardware/sam_udphs.h
  *
  *   Copyright (C) 2013 Gregory Nutt. All rights reserved.
  *   Author: Gregory Nutt <gnutt@nuttx.org>
@@ -36,8 +36,8 @@
  *
  ********************************************************************************************/
 
-#ifndef __ARCH_ARM_SRC_SAMA5_CHIP_SAM_UDPHS_H
-#define __ARCH_ARM_SRC_SAMA5_CHIP_SAM_UDPHS_H
+#ifndef __ARCH_ARM_SRC_SAMA5_HARDWARE_SAM_UDPHS_H
+#define __ARCH_ARM_SRC_SAMA5_HARDWARE_SAM_UDPHS_H
 
 /********************************************************************************************
  * Included Files
@@ -46,7 +46,7 @@
 #include <nuttx/config.h>
 
 #include "chip.h"
-#include "chip/sam_memorymap.h"
+#include "hardware/sam_memorymap.h"
 
 /********************************************************************************************
  * Pre-processor Definitions
@@ -478,4 +478,4 @@ struct udphs_dtd_s
  * Public Functions
  ********************************************************************************************/
 
-#endif /* __ARCH_ARM_SRC_SAMA5_CHIP_SAM_UDPHS_H */
+#endif /* __ARCH_ARM_SRC_SAMA5_HARDWARE_SAM_UDPHS_H */
diff --git a/arch/arm/src/sama5/chip/sam_wdt.h b/arch/arm/src/sama5/hardware/sam_wdt.h
similarity index 95%
rename from arch/arm/src/sama5/chip/sam_wdt.h
rename to arch/arm/src/sama5/hardware/sam_wdt.h
index 657da36987..6074612546 100644
--- a/arch/arm/src/sama5/chip/sam_wdt.h
+++ b/arch/arm/src/sama5/hardware/sam_wdt.h
@@ -1,5 +1,5 @@
 /****************************************************************************************
- * arch/arm/src/sama5/chip/sam_wdt.h
+ * arch/arm/src/sama5/hardware/sam_wdt.h
  * Watchdog Timer (WDT) definitions for the SAMA5D3
  *
  *   Copyright (C) 2013, 2015 Gregory Nutt. All rights reserved.
@@ -34,8 +34,8 @@
  *
  ****************************************************************************************/
 
-#ifndef __ARCH_ARM_SRC_SAMA5_CHIP_SAM_WDT_H
-#define __ARCH_ARM_SRC_SAMA5_CHIP_SAM_WDT_H
+#ifndef __ARCH_ARM_SRC_SAMA5_HARDWARE_SAM_WDT_H
+#define __ARCH_ARM_SRC_SAMA5_HARDWARE_SAM_WDT_H
 
 /****************************************************************************************
  * Included Files
@@ -44,7 +44,7 @@
 #include <nuttx/config.h>
 
 #include "chip.h"
-#include "chip/sam_memorymap.h"
+#include "hardware/sam_memorymap.h"
 
 /****************************************************************************************
  * Pre-processor Definitions
@@ -111,4 +111,4 @@
  * Public Functions
  ****************************************************************************************/
 
-#endif /* __ARCH_ARM_SRC_SAMA5_CHIP_SAM_WDT_H */
+#endif /* __ARCH_ARM_SRC_SAMA5_HARDWARE_SAM_WDT_H */
diff --git a/arch/arm/src/sama5/chip/sam_xdmac.h b/arch/arm/src/sama5/hardware/sam_xdmac.h
similarity index 99%
rename from arch/arm/src/sama5/chip/sam_xdmac.h
rename to arch/arm/src/sama5/hardware/sam_xdmac.h
index 41ed95453e..a31ef737a7 100644
--- a/arch/arm/src/sama5/chip/sam_xdmac.h
+++ b/arch/arm/src/sama5/hardware/sam_xdmac.h
@@ -1,5 +1,5 @@
 /************************************************************************************
- * arch/arm/src/sama5/chip/sam_xdmac.h
+ * arch/arm/src/sama5/hardware/sam_xdmac.h
  *
  *   Copyright (C) 2014 Gregory Nutt. All rights reserved.
  *   Author: Gregory Nutt <gnutt@nuttx.org>
@@ -33,8 +33,8 @@
  *
  ************************************************************************************/
 
-#ifndef __ARCH_ARM_SRC_SAMA5_CHIP_SAM_XDMAC_H
-#define __ARCH_ARM_SRC_SAMA5_CHIP_SAM_XDMAC_H
+#ifndef __ARCH_ARM_SRC_SAMA5_HARDWARE_SAM_XDMAC_H
+#define __ARCH_ARM_SRC_SAMA5_HARDWARE_SAM_XDMAC_H
 
 /************************************************************************************
  * Included Files
@@ -541,4 +541,4 @@ struct chnext_view3_s
   uint32_t cdus; /* Destination Microblock Stride */
 };
 
-#endif /* __ARCH_ARM_SRC_SAMA5_CHIP_SAM_XDMAC_H */
+#endif /* __ARCH_ARM_SRC_SAMA5_HARDWARE_SAM_XDMAC_H */
diff --git a/arch/arm/src/sama5/sam_adc.c b/arch/arm/src/sama5/sam_adc.c
index b9c3c92d84..ce5072eefd 100644
--- a/arch/arm/src/sama5/sam_adc.c
+++ b/arch/arm/src/sama5/sam_adc.c
@@ -71,9 +71,9 @@
 #include "up_arch.h"
 
 #include "chip.h"
-#include "chip/sam_adc.h"
-#include "chip/sam_pmc.h"
-#include "chip/sam_pinmap.h"
+#include "hardware/sam_adc.h"
+#include "hardware/sam_pmc.h"
+#include "hardware/sam_pinmap.h"
 
 #include "sam_periphclks.h"
 #include "sam_memories.h"
diff --git a/arch/arm/src/sama5/sam_adc.h b/arch/arm/src/sama5/sam_adc.h
index 187fbf15e9..dcddc15741 100644
--- a/arch/arm/src/sama5/sam_adc.h
+++ b/arch/arm/src/sama5/sam_adc.h
@@ -44,7 +44,7 @@
 
 #include <nuttx/analog/adc.h>
 
-#include "chip/sam_adc.h"
+#include "hardware/sam_adc.h"
 
 #ifdef CONFIG_SAMA5_ADC
 
diff --git a/arch/arm/src/sama5/sam_boot.c b/arch/arm/src/sama5/sam_boot.c
index 0a46bc6b2b..3138559692 100644
--- a/arch/arm/src/sama5/sam_boot.c
+++ b/arch/arm/src/sama5/sam_boot.c
@@ -57,9 +57,9 @@
 #include "up_internal.h"
 #include "up_arch.h"
 
-#include "chip/sam_wdt.h"
-#include "chip/sam_aximx.h"
-#include "chip/sam_sfr.h"
+#include "hardware/sam_wdt.h"
+#include "hardware/sam_aximx.h"
+#include "hardware/sam_sfr.h"
 
 #include "sam_clockconfig.h"
 #include "sam_memorymap.h"
diff --git a/arch/arm/src/sama5/sam_can.c b/arch/arm/src/sama5/sam_can.c
index b124666e19..1a3ac577a8 100644
--- a/arch/arm/src/sama5/sam_can.c
+++ b/arch/arm/src/sama5/sam_can.c
@@ -66,7 +66,7 @@
 #include "up_arch.h"
 
 
-#include "chip/sam_pinmap.h"
+#include "hardware/sam_pinmap.h"
 #include "sam_periphclks.h"
 #include "sam_pio.h"
 #include "sam_can.h"
diff --git a/arch/arm/src/sama5/sam_can.h b/arch/arm/src/sama5/sam_can.h
index bff7c1efbf..1f96747dcb 100644
--- a/arch/arm/src/sama5/sam_can.h
+++ b/arch/arm/src/sama5/sam_can.h
@@ -43,7 +43,7 @@
 #include <nuttx/config.h>
 
 #include "chip.h"
-#include "chip/sam_can.h"
+#include "hardware/sam_can.h"
 
 #include <nuttx/can/can.h>
 
diff --git a/arch/arm/src/sama5/sam_clockconfig.c b/arch/arm/src/sama5/sam_clockconfig.c
index f743c7ae9a..17d8272fbb 100644
--- a/arch/arm/src/sama5/sam_clockconfig.c
+++ b/arch/arm/src/sama5/sam_clockconfig.c
@@ -51,8 +51,8 @@
 
 #include "sam_periphclks.h"
 #include "sam_clockconfig.h"
-#include "chip/sam_pmc.h"
-#include "chip/sam_sfr.h"
+#include "hardware/sam_pmc.h"
+#include "hardware/sam_sfr.h"
 
 /****************************************************************************
  * Pre-processor Definitions
diff --git a/arch/arm/src/sama5/sam_dbgu.c b/arch/arm/src/sama5/sam_dbgu.c
index a136c9bd44..18f3503370 100644
--- a/arch/arm/src/sama5/sam_dbgu.c
+++ b/arch/arm/src/sama5/sam_dbgu.c
@@ -59,8 +59,8 @@
 #include "up_internal.h"
 
 #include "chip.h"
-#include "chip/sam_dbgu.h"
-#include "chip/sam_pinmap.h"
+#include "hardware/sam_dbgu.h"
+#include "hardware/sam_pinmap.h"
 #include "sam_pio.h"
 #include "sam_dbgu.h"
 
diff --git a/arch/arm/src/sama5/sam_dmac.c b/arch/arm/src/sama5/sam_dmac.c
index c136641951..46aec6b848 100644
--- a/arch/arm/src/sama5/sam_dmac.c
+++ b/arch/arm/src/sama5/sam_dmac.c
@@ -57,8 +57,8 @@
 #include "sam_dmac.h"
 #include "sam_periphclks.h"
 #include "sam_memories.h"
-#include "chip/sam_pmc.h"
-#include "chip/sam_dmac.h"
+#include "hardware/sam_pmc.h"
+#include "hardware/sam_dmac.h"
 
 /****************************************************************************
  * Pre-processor Definitions
diff --git a/arch/arm/src/sama5/sam_ehci.c b/arch/arm/src/sama5/sam_ehci.c
index 92367c8bbd..6f631946b9 100644
--- a/arch/arm/src/sama5/sam_ehci.c
+++ b/arch/arm/src/sama5/sam_ehci.c
@@ -65,8 +65,8 @@
 #include "sam_periphclks.h"
 #include "sam_memories.h"
 #include "sam_usbhost.h"
-#include "chip/sam_sfr.h"
-#include "chip/sam_ehci.h"
+#include "hardware/sam_sfr.h"
+#include "hardware/sam_ehci.h"
 
 #ifdef CONFIG_SAMA5_EHCI
 
diff --git a/arch/arm/src/sama5/sam_emaca.c b/arch/arm/src/sama5/sam_emaca.c
index a77c7090e9..ddbc185d9b 100644
--- a/arch/arm/src/sama5/sam_emaca.c
+++ b/arch/arm/src/sama5/sam_emaca.c
@@ -79,7 +79,7 @@
 #include "up_internal.h"
 
 #include "chip.h"
-#include "chip/sam_pinmap.h"
+#include "hardware/sam_pinmap.h"
 #include "sam_pio.h"
 #include "sam_periphclks.h"
 #include "sam_memories.h"
diff --git a/arch/arm/src/sama5/sam_emacb.c b/arch/arm/src/sama5/sam_emacb.c
index 3d102b83cc..ff39f84ab5 100644
--- a/arch/arm/src/sama5/sam_emacb.c
+++ b/arch/arm/src/sama5/sam_emacb.c
@@ -93,7 +93,7 @@
 #include "up_internal.h"
 
 #include "chip.h"
-#include "chip/sam_pinmap.h"
+#include "hardware/sam_pinmap.h"
 #include "sam_pio.h"
 #include "sam_periphclks.h"
 #include "sam_memories.h"
diff --git a/arch/arm/src/sama5/sam_ethernet.h b/arch/arm/src/sama5/sam_ethernet.h
index 4625556c45..3b09839292 100644
--- a/arch/arm/src/sama5/sam_ethernet.h
+++ b/arch/arm/src/sama5/sam_ethernet.h
@@ -43,8 +43,8 @@
 #include <nuttx/config.h>
 
 #include "chip.h"
-#include "chip/sam_emac.h"
-#include "chip/sam_gmac.h"
+#include "hardware/sam_emac.h"
+#include "hardware/sam_gmac.h"
 
 /************************************************************************************
  * Pre-processor Definitions
diff --git a/arch/arm/src/sama5/sam_flexcom_serial.c b/arch/arm/src/sama5/sam_flexcom_serial.c
index 58c4121cac..8a36fff8ec 100644
--- a/arch/arm/src/sama5/sam_flexcom_serial.c
+++ b/arch/arm/src/sama5/sam_flexcom_serial.c
@@ -63,7 +63,7 @@
 #include "up_internal.h"
 
 #include "chip.h"
-#include "chip/sam_flexcom.h"
+#include "hardware/sam_flexcom.h"
 #include "sam_config.h"
 #include "sam_dbgu.h"
 #include "sam_serial.h"
diff --git a/arch/arm/src/sama5/sam_gmac.c b/arch/arm/src/sama5/sam_gmac.c
index 95ef7e65e3..a845c6ba6f 100644
--- a/arch/arm/src/sama5/sam_gmac.c
+++ b/arch/arm/src/sama5/sam_gmac.c
@@ -76,7 +76,7 @@
 #include "up_internal.h"
 
 #include "chip.h"
-#include "chip/sam_pinmap.h"
+#include "hardware/sam_pinmap.h"
 #include "sam_pio.h"
 #include "sam_periphclks.h"
 #include "sam_memories.h"
diff --git a/arch/arm/src/sama5/sam_hsmci.c b/arch/arm/src/sama5/sam_hsmci.c
index 8ce3a251a0..966c0f442d 100644
--- a/arch/arm/src/sama5/sam_hsmci.c
+++ b/arch/arm/src/sama5/sam_hsmci.c
@@ -66,10 +66,10 @@
 #include "sam_periphclks.h"
 #include "sam_memories.h"
 #include "sam_hsmci.h"
-#include "chip/sam_dmac.h"
-#include "chip/sam_pmc.h"
-#include "chip/sam_hsmci.h"
-#include "chip/sam_pinmap.h"
+#include "hardware/sam_dmac.h"
+#include "hardware/sam_pmc.h"
+#include "hardware/sam_hsmci.h"
+#include "hardware/sam_pinmap.h"
 
 #if defined(CONFIG_SAMA5_HSMCI0) || defined(CONFIG_SAMA5_HSMCI1) || \
     defined(CONFIG_SAMA5_HSMCI2)
diff --git a/arch/arm/src/sama5/sam_hsmci_clkdiv.c b/arch/arm/src/sama5/sam_hsmci_clkdiv.c
index 4a56bed140..b6fa5e84f0 100644
--- a/arch/arm/src/sama5/sam_hsmci_clkdiv.c
+++ b/arch/arm/src/sama5/sam_hsmci_clkdiv.c
@@ -48,7 +48,7 @@
 #include <arch/board/board.h>
 
 #include "chip.h"
-#include "chip/sam_hsmci.h"
+#include "hardware/sam_hsmci.h"
 #include "sam_hsmci.h"
 
 #if defined(CONFIG_SAMA5_HSMCI0) || defined(CONFIG_SAMA5_HSMCI1) || \
diff --git a/arch/arm/src/sama5/sam_irq.c b/arch/arm/src/sama5/sam_irq.c
index 44cce23e13..81b56bf671 100644
--- a/arch/arm/src/sama5/sam_irq.c
+++ b/arch/arm/src/sama5/sam_irq.c
@@ -57,10 +57,10 @@
 #include "mmu.h"
 #include "cp15_cacheops.h"
 #include "sctlr.h"
-#include "chip/sam_aic.h"
-#include "chip/sam_matrix.h"
-#include "chip/sam_aximx.h"
-#include "chip/sam_sfr.h"
+#include "hardware/sam_aic.h"
+#include "hardware/sam_matrix.h"
+#include "hardware/sam_aximx.h"
+#include "hardware/sam_sfr.h"
 
 #include "sam_irq.h"
 
diff --git a/arch/arm/src/sama5/sam_irq.h b/arch/arm/src/sama5/sam_irq.h
index 5f462862d0..be1418b9a9 100644
--- a/arch/arm/src/sama5/sam_irq.h
+++ b/arch/arm/src/sama5/sam_irq.h
@@ -41,7 +41,7 @@
  ****************************************************************************/
 
 #include <nuttx/config.h>
-#include "chip/sam_aic.h"
+#include "hardware/sam_aic.h"
 
 /****************************************************************************
  * Pre-processor Definitions
diff --git a/arch/arm/src/sama5/sam_isi.h b/arch/arm/src/sama5/sam_isi.h
index 5b3bc7482f..525eaef6e0 100644
--- a/arch/arm/src/sama5/sam_isi.h
+++ b/arch/arm/src/sama5/sam_isi.h
@@ -43,7 +43,7 @@
 #include <nuttx/config.h>
 
 #include "chip.h"
-#include "chip/sam_isi.h"
+#include "hardware/sam_isi.h"
 
 /************************************************************************************
  * Pre-processor Definitions
diff --git a/arch/arm/src/sama5/sam_lcd.c b/arch/arm/src/sama5/sam_lcd.c
index ed1f33c96a..fb136d31a1 100644
--- a/arch/arm/src/sama5/sam_lcd.c
+++ b/arch/arm/src/sama5/sam_lcd.c
@@ -59,8 +59,8 @@
 #include <arch/board/board.h>
 
 #include "up_arch.h"
-#include "chip/sam_lcdc.h"
-#include "chip/sam_pinmap.h"
+#include "hardware/sam_lcdc.h"
+#include "hardware/sam_pinmap.h"
 #include "sam_pio.h"
 #include "sam_periphclks.h"
 #include "sam_memories.h"
diff --git a/arch/arm/src/sama5/sam_lcd.h b/arch/arm/src/sama5/sam_lcd.h
index d16a2ec6f8..6fe2439c45 100644
--- a/arch/arm/src/sama5/sam_lcd.h
+++ b/arch/arm/src/sama5/sam_lcd.h
@@ -46,7 +46,7 @@
 
 #include <nuttx/nx/nxglib.h>
 
-#include "chip/sam_lcdc.h"
+#include "hardware/sam_lcdc.h"
 
 #ifdef CONFIG_SAMA5_LCDC
 
diff --git a/arch/arm/src/sama5/sam_lowputc.c b/arch/arm/src/sama5/sam_lowputc.c
index f94f6f0516..484c2417e9 100644
--- a/arch/arm/src/sama5/sam_lowputc.c
+++ b/arch/arm/src/sama5/sam_lowputc.c
@@ -52,10 +52,10 @@
 #include "sam_dbgu.h"
 #include "sam_lowputc.h"
 
-#include "chip/sam_uart.h"
-#include "chip/sam_flexcom.h"
-#include "chip/sam_dbgu.h"
-#include "chip/sam_pinmap.h"
+#include "hardware/sam_uart.h"
+#include "hardware/sam_flexcom.h"
+#include "hardware/sam_dbgu.h"
+#include "hardware/sam_pinmap.h"
 
 #include <arch/board/board.h>
 
diff --git a/arch/arm/src/sama5/sam_nand.h b/arch/arm/src/sama5/sam_nand.h
index 69c6b729e9..6d7101ad29 100644
--- a/arch/arm/src/sama5/sam_nand.h
+++ b/arch/arm/src/sama5/sam_nand.h
@@ -52,7 +52,7 @@
 
 #include "up_arch.h"
 #include "chip.h"
-#include "chip/sam_hsmc.h"
+#include "hardware/sam_hsmc.h"
 
 #include "sam_dmac.h"
 
diff --git a/arch/arm/src/sama5/sam_ohci.c b/arch/arm/src/sama5/sam_ohci.c
index ce5bbf8722..1cc36af7b7 100644
--- a/arch/arm/src/sama5/sam_ohci.c
+++ b/arch/arm/src/sama5/sam_ohci.c
@@ -69,9 +69,9 @@
 #include "sam_periphclks.h"
 #include "sam_memories.h"
 #include "sam_usbhost.h"
-#include "chip/sam_pmc.h"
-#include "chip/sam_sfr.h"
-#include "chip/sam_ohci.h"
+#include "hardware/sam_pmc.h"
+#include "hardware/sam_sfr.h"
+#include "hardware/sam_ohci.h"
 
 #ifdef CONFIG_SAMA5_OHCI
 
diff --git a/arch/arm/src/sama5/sam_pck.c b/arch/arm/src/sama5/sam_pck.c
index dc96ab678c..fc63e80425 100644
--- a/arch/arm/src/sama5/sam_pck.c
+++ b/arch/arm/src/sama5/sam_pck.c
@@ -45,7 +45,7 @@
 
 #include <arch/board/board.h>
 
-#include "chip/sam_pinmap.h"
+#include "hardware/sam_pinmap.h"
 
 #include "up_arch.h"
 #include "sam_pio.h"
diff --git a/arch/arm/src/sama5/sam_pck.h b/arch/arm/src/sama5/sam_pck.h
index 0d8199e8ea..b304c6f5b0 100644
--- a/arch/arm/src/sama5/sam_pck.h
+++ b/arch/arm/src/sama5/sam_pck.h
@@ -43,7 +43,7 @@
 #include <nuttx/config.h>
 
 #include "chip.h"
-#include "chip/sam_pmc.h"
+#include "hardware/sam_pmc.h"
 
 /************************************************************************************
  * Pre-processor Definitions
diff --git a/arch/arm/src/sama5/sam_pio.h b/arch/arm/src/sama5/sam_pio.h
index fbcf94d034..b2cb5c7008 100644
--- a/arch/arm/src/sama5/sam_pio.h
+++ b/arch/arm/src/sama5/sam_pio.h
@@ -48,7 +48,7 @@
 
 #include <arch/sama5/chip.h>
 
-#include "chip/sam_memorymap.h"
+#include "hardware/sam_memorymap.h"
 
 /************************************************************************************
  * Pre-processor Definitions
diff --git a/arch/arm/src/sama5/sam_pioirq.c b/arch/arm/src/sama5/sam_pioirq.c
index 97aef6a0bc..36dc7d61c3 100644
--- a/arch/arm/src/sama5/sam_pioirq.c
+++ b/arch/arm/src/sama5/sam_pioirq.c
@@ -53,8 +53,8 @@
 #include "up_arch.h"
 #include "up_internal.h"
 
-#include "chip/sam_pio.h"
-#include "chip/sam_pmc.h"
+#include "hardware/sam_pio.h"
+#include "hardware/sam_pmc.h"
 
 #include "sam_pio.h"
 #include "sam_periphclks.h"
diff --git a/arch/arm/src/sama5/sam_pmc.c b/arch/arm/src/sama5/sam_pmc.c
index f6c6b555f6..1c6596a7b1 100644
--- a/arch/arm/src/sama5/sam_pmc.c
+++ b/arch/arm/src/sama5/sam_pmc.c
@@ -52,10 +52,10 @@
 #include "chip.h"
 
 #ifdef CONFIG_ARCH_HAVE_SDIO
-#  include "chip/sam_hsmci.h"
+#  include "hardware/sam_hsmci.h"
 #endif
 
-#include "chip/sam_pmc.h"
+#include "hardware/sam_pmc.h"
 #include "sam_pmc.h"
 
 /****************************************************************************
diff --git a/arch/arm/src/sama5/sam_pwm.c b/arch/arm/src/sama5/sam_pwm.c
index 1758bee1a7..af5086c189 100644
--- a/arch/arm/src/sama5/sam_pwm.c
+++ b/arch/arm/src/sama5/sam_pwm.c
@@ -49,7 +49,7 @@
 #include <nuttx/arch.h>
 #include <nuttx/drivers/pwm.h>
 
-#include "chip/sam_pinmap.h"
+#include "hardware/sam_pinmap.h"
 #include <arch/board/board.h>
 
 #include "up_internal.h"
diff --git a/arch/arm/src/sama5/sam_pwm.h b/arch/arm/src/sama5/sam_pwm.h
index b9615d64da..3dbbffcc95 100644
--- a/arch/arm/src/sama5/sam_pwm.h
+++ b/arch/arm/src/sama5/sam_pwm.h
@@ -43,7 +43,7 @@
 #include <nuttx/config.h>
 
 #include "chip.h"
-#include "chip/sam_pwm.h"
+#include "hardware/sam_pwm.h"
 
 #ifdef CONFIG_SAMA5_PWM
 
diff --git a/arch/arm/src/sama5/sam_rtc.h b/arch/arm/src/sama5/sam_rtc.h
index bb97c5ea56..9007cb5ef6 100644
--- a/arch/arm/src/sama5/sam_rtc.h
+++ b/arch/arm/src/sama5/sam_rtc.h
@@ -43,7 +43,7 @@
 #include <nuttx/config.h>
 
 #include "chip.h"
-#include "chip/sam_rtc.h"
+#include "hardware/sam_rtc.h"
 
 /************************************************************************************
  * Pre-processor Definitions
diff --git a/arch/arm/src/sama5/sam_sckc.h b/arch/arm/src/sama5/sam_sckc.h
index 0dc2a2ed4c..0c2524ec43 100644
--- a/arch/arm/src/sama5/sam_sckc.h
+++ b/arch/arm/src/sama5/sam_sckc.h
@@ -45,7 +45,7 @@
 #include <stdbool.h>
 
 #include "chip.h"
-#include "chip/sam_sckc.h"
+#include "hardware/sam_sckc.h"
 
 /****************************************************************************
  * Pre-processor Definitions
diff --git a/arch/arm/src/sama5/sam_serial.c b/arch/arm/src/sama5/sam_serial.c
index 1952cc839a..a368140eb5 100644
--- a/arch/arm/src/sama5/sam_serial.c
+++ b/arch/arm/src/sama5/sam_serial.c
@@ -63,7 +63,7 @@
 #include "up_internal.h"
 
 #include "chip.h"
-#include "chip/sam_uart.h"
+#include "hardware/sam_uart.h"
 #include "sam_config.h"
 #include "sam_dbgu.h"
 #include "sam_serial.h"
diff --git a/arch/arm/src/sama5/sam_spi.c b/arch/arm/src/sama5/sam_spi.c
index eaf5882020..3848709521 100644
--- a/arch/arm/src/sama5/sam_spi.c
+++ b/arch/arm/src/sama5/sam_spi.c
@@ -72,9 +72,9 @@
 #include "sam_memories.h"
 #include "sam_periphclks.h"
 #include "sam_spi.h"
-#include "chip/sam_pmc.h"
-#include "chip/sam_spi.h"
-#include "chip/sam_pinmap.h"
+#include "hardware/sam_pmc.h"
+#include "hardware/sam_spi.h"
+#include "hardware/sam_pinmap.h"
 
 #if defined(CONFIG_SAMA5_SPI0) || defined(CONFIG_SAMA5_SPI1)
 
diff --git a/arch/arm/src/sama5/sam_ssc.c b/arch/arm/src/sama5/sam_ssc.c
index 5da89da2f9..f9cca0ae4e 100644
--- a/arch/arm/src/sama5/sam_ssc.c
+++ b/arch/arm/src/sama5/sam_ssc.c
@@ -69,9 +69,9 @@
 #include "sam_memories.h"
 #include "sam_periphclks.h"
 #include "sam_ssc.h"
-#include "chip/sam_pmc.h"
-#include "chip/sam_ssc.h"
-#include "chip/sam_pinmap.h"
+#include "hardware/sam_pmc.h"
+#include "hardware/sam_ssc.h"
+#include "hardware/sam_pinmap.h"
 
 #if defined(CONFIG_SAMA5_SSC0) || defined(CONFIG_SAMA5_SSC1)
 
diff --git a/arch/arm/src/sama5/sam_ssc.h b/arch/arm/src/sama5/sam_ssc.h
index 7ae4dafe07..ad74273a96 100644
--- a/arch/arm/src/sama5/sam_ssc.h
+++ b/arch/arm/src/sama5/sam_ssc.h
@@ -44,7 +44,7 @@
 #include <nuttx/audio/i2s.h>
 
 #include "chip.h"
-#include "chip/sam_ssc.h"
+#include "hardware/sam_ssc.h"
 
 /************************************************************************************
  * Pre-processor Definitions
diff --git a/arch/arm/src/sama5/sam_tc.c b/arch/arm/src/sama5/sam_tc.c
index a0a3f79198..4ac41adf51 100644
--- a/arch/arm/src/sama5/sam_tc.c
+++ b/arch/arm/src/sama5/sam_tc.c
@@ -63,8 +63,8 @@
 
 #include "up_arch.h"
 #include "sam_periphclks.h"
-#include "chip/sam_pinmap.h"
-#include "chip/sam_pmc.h"
+#include "hardware/sam_pinmap.h"
+#include "hardware/sam_pmc.h"
 #include "sam_pio.h"
 #include "sam_tc.h"
 
diff --git a/arch/arm/src/sama5/sam_tc.h b/arch/arm/src/sama5/sam_tc.h
index 4cf53f9cc8..06ea59a792 100644
--- a/arch/arm/src/sama5/sam_tc.h
+++ b/arch/arm/src/sama5/sam_tc.h
@@ -46,7 +46,7 @@
 #include <debug.h>
 
 #include "chip.h"
-#include "chip/sam_tc.h"
+#include "hardware/sam_tc.h"
 
 #if defined(CONFIG_SAMA5_TC0) || defined(CONFIG_SAMA5_TC1) || defined(CONFIG_SAMA5_TC2)
 
diff --git a/arch/arm/src/sama5/sam_timerisr.c b/arch/arm/src/sama5/sam_timerisr.c
index 9a0216a42e..1826f7956c 100644
--- a/arch/arm/src/sama5/sam_timerisr.c
+++ b/arch/arm/src/sama5/sam_timerisr.c
@@ -49,7 +49,7 @@
 
 #include "up_arch.h"
 #include "sam_periphclks.h"
-#include "chip/sam_pit.h"
+#include "hardware/sam_pit.h"
 
 /****************************************************************************
  * Pre-processor Definitions
diff --git a/arch/arm/src/sama5/sam_trng.h b/arch/arm/src/sama5/sam_trng.h
index d27186ac3c..8b5c63b9d5 100644
--- a/arch/arm/src/sama5/sam_trng.h
+++ b/arch/arm/src/sama5/sam_trng.h
@@ -43,7 +43,7 @@
 #include <nuttx/config.h>
 
 #include "chip.h"
-#include "chip/sam_trng.h"
+#include "hardware/sam_trng.h"
 
 #if defined(CONFIG_DEV_RANDOM) && defined(CONFIG_SAMA5_TRNG)
 
diff --git a/arch/arm/src/sama5/sam_tsd.c b/arch/arm/src/sama5/sam_tsd.c
index cf656c0eab..91491d27d8 100644
--- a/arch/arm/src/sama5/sam_tsd.c
+++ b/arch/arm/src/sama5/sam_tsd.c
@@ -72,7 +72,7 @@
 #include <arch/board/board.h>
 
 #include "up_arch.h"
-#include "chip/sam_adc.h"
+#include "hardware/sam_adc.h"
 #include "sam_adc.h"
 #include "sam_tsd.h"
 
diff --git a/arch/arm/src/sama5/sam_tsd.h b/arch/arm/src/sama5/sam_tsd.h
index ff0d6a5ead..041b0811dd 100644
--- a/arch/arm/src/sama5/sam_tsd.h
+++ b/arch/arm/src/sama5/sam_tsd.h
@@ -41,7 +41,7 @@
  ****************************************************************************/
 
 #include <nuttx/config.h>
-#include "chip/sam_adc.h"
+#include "hardware/sam_adc.h"
 
 #if defined(CONFIG_SAMA5_ADC) && defined(CONFIG_SAMA5_TSD)
 
diff --git a/arch/arm/src/sama5/sam_twi.c b/arch/arm/src/sama5/sam_twi.c
index 7cc040f465..05fb5c6e0b 100644
--- a/arch/arm/src/sama5/sam_twi.c
+++ b/arch/arm/src/sama5/sam_twi.c
@@ -65,8 +65,8 @@
 
 #include "up_arch.h"
 
-#include "chip/sam_pmc.h"
-#include "chip/sam_pinmap.h"
+#include "hardware/sam_pmc.h"
+#include "hardware/sam_pinmap.h"
 
 #include "sam_periphclks.h"
 #include "sam_pio.h"
diff --git a/arch/arm/src/sama5/sam_twi.h b/arch/arm/src/sama5/sam_twi.h
index f966bec8f8..078ba9cd1e 100644
--- a/arch/arm/src/sama5/sam_twi.h
+++ b/arch/arm/src/sama5/sam_twi.h
@@ -42,7 +42,7 @@
 
 #include <nuttx/config.h>
 #include <nuttx/i2c/i2c_master.h>
-#include "chip/sam_twi.h"
+#include "hardware/sam_twi.h"
 
 /****************************************************************************
  * Public Function Prototypes
diff --git a/arch/arm/src/sama5/sam_udphs.c b/arch/arm/src/sama5/sam_udphs.c
index 5c1edc53fe..0927669e42 100644
--- a/arch/arm/src/sama5/sam_udphs.c
+++ b/arch/arm/src/sama5/sam_udphs.c
@@ -69,7 +69,7 @@
 
 #include "sam_periphclks.h"
 #include "sam_memories.h"
-#include "chip/sam_udphs.h"
+#include "hardware/sam_udphs.h"
 #include "sam_udphs.h"
 
 #if defined(CONFIG_USBDEV) && defined(CONFIG_SAMA5_UDPHS)
diff --git a/arch/arm/src/sama5/sam_udphs.h b/arch/arm/src/sama5/sam_udphs.h
index 1f8ec79dec..2758adf0ad 100644
--- a/arch/arm/src/sama5/sam_udphs.h
+++ b/arch/arm/src/sama5/sam_udphs.h
@@ -45,7 +45,7 @@
 #include <stdint.h>
 
 #include "chip.h"
-#include "chip/sam_udphs.h"
+#include "hardware/sam_udphs.h"
 
 /************************************************************************************
  * Public Functions
diff --git a/arch/arm/src/sama5/sam_wdt.h b/arch/arm/src/sama5/sam_wdt.h
index ba3a067b1d..aea3e1a1f8 100644
--- a/arch/arm/src/sama5/sam_wdt.h
+++ b/arch/arm/src/sama5/sam_wdt.h
@@ -43,7 +43,7 @@
 #include <nuttx/config.h>
 
 #include "chip.h"
-#include "chip/sam_wdt.h"
+#include "hardware/sam_wdt.h"
 
 #ifdef CONFIG_WATCHDOG
 
diff --git a/arch/arm/src/sama5/sam_xdmac.c b/arch/arm/src/sama5/sam_xdmac.c
index e903b0dd03..b2c2e5a246 100644
--- a/arch/arm/src/sama5/sam_xdmac.c
+++ b/arch/arm/src/sama5/sam_xdmac.c
@@ -57,8 +57,8 @@
 #include "sam_dmac.h"
 #include "sam_periphclks.h"
 #include "sam_memories.h"
-#include "chip/sam_pmc.h"
-#include "chip/sam_xdmac.h"
+#include "hardware/sam_pmc.h"
+#include "hardware/sam_xdmac.h"
 
 /****************************************************************************
  * Pre-processor Definitions
diff --git a/arch/arm/src/sama5/sama5d2x_memorymap.c b/arch/arm/src/sama5/sama5d2x_memorymap.c
index e73281cabd..a9dc6cdaba 100644
--- a/arch/arm/src/sama5/sama5d2x_memorymap.c
+++ b/arch/arm/src/sama5/sama5d2x_memorymap.c
@@ -41,7 +41,7 @@
 
 #include "mmu.h"
 
-#include "chip/sam_memorymap.h"
+#include "hardware/sam_memorymap.h"
 #include "sam_lcd.h"
 #include "sam_memorymap.h"
 
diff --git a/arch/arm/src/sama5/sama5d2x_periphclks.h b/arch/arm/src/sama5/sama5d2x_periphclks.h
index 181169634e..2867e5da6b 100644
--- a/arch/arm/src/sama5/sama5d2x_periphclks.h
+++ b/arch/arm/src/sama5/sama5d2x_periphclks.h
@@ -43,7 +43,7 @@
 #include <nuttx/config.h>
 #include <stdint.h>
 #include <arch/irq.h>
-#include "chip/sam_pmc.h"
+#include "hardware/sam_pmc.h"
 
 /************************************************************************************
  * Pre-processor Definitions
diff --git a/arch/arm/src/sama5/sama5d2x_pio.c b/arch/arm/src/sama5/sama5d2x_pio.c
index 4907529be4..163d957085 100644
--- a/arch/arm/src/sama5/sama5d2x_pio.c
+++ b/arch/arm/src/sama5/sama5d2x_pio.c
@@ -52,7 +52,7 @@
 #include "up_internal.h"
 #include "up_arch.h"
 
-#include "chip/_sama5d2x_pio.h"
+#include "hardware/_sama5d2x_pio.h"
 
 #include "chip.h"
 #include "sam_periphclks.h"
diff --git a/arch/arm/src/sama5/sama5d2x_pio.h b/arch/arm/src/sama5/sama5d2x_pio.h
index 4b0324dc96..2512af37f5 100644
--- a/arch/arm/src/sama5/sama5d2x_pio.h
+++ b/arch/arm/src/sama5/sama5d2x_pio.h
@@ -46,7 +46,7 @@
 #include <stdint.h>
 #include <stdbool.h>
 
-#include "chip/sam_memorymap.h"
+#include "hardware/sam_memorymap.h"
 
 /************************************************************************************
  * Pre-processor Definitions
diff --git a/arch/arm/src/sama5/sama5d3x4x_pio.c b/arch/arm/src/sama5/sama5d3x4x_pio.c
index 5f979f3c85..af2d7a40af 100644
--- a/arch/arm/src/sama5/sama5d3x4x_pio.c
+++ b/arch/arm/src/sama5/sama5d3x4x_pio.c
@@ -52,7 +52,7 @@
 #include "up_internal.h"
 #include "up_arch.h"
 
-#include "chip/_sama5d3x4x_pio.h"
+#include "hardware/_sama5d3x4x_pio.h"
 
 #include "chip.h"
 #include "sam_periphclks.h"
diff --git a/arch/arm/src/sama5/sama5d3x_memorymap.c b/arch/arm/src/sama5/sama5d3x_memorymap.c
index 229d2e8132..0f08951c4e 100644
--- a/arch/arm/src/sama5/sama5d3x_memorymap.c
+++ b/arch/arm/src/sama5/sama5d3x_memorymap.c
@@ -41,7 +41,7 @@
 
 #include "mmu.h"
 
-#include "chip/sam_memorymap.h"
+#include "hardware/sam_memorymap.h"
 #include "sam_lcd.h"
 #include "sam_memorymap.h"
 
diff --git a/arch/arm/src/sama5/sama5d3x_periphclks.h b/arch/arm/src/sama5/sama5d3x_periphclks.h
index 2d2fe7c3e9..c826aa6558 100644
--- a/arch/arm/src/sama5/sama5d3x_periphclks.h
+++ b/arch/arm/src/sama5/sama5d3x_periphclks.h
@@ -43,7 +43,7 @@
 #include <nuttx/config.h>
 #include <stdint.h>
 #include <arch/irq.h>
-#include "chip/sam_pmc.h"
+#include "hardware/sam_pmc.h"
 
 /************************************************************************************
  * Pre-processor Definitions
diff --git a/arch/arm/src/sama5/sama5d4x_memorymap.c b/arch/arm/src/sama5/sama5d4x_memorymap.c
index 8d63ea70d5..548d3a1e79 100644
--- a/arch/arm/src/sama5/sama5d4x_memorymap.c
+++ b/arch/arm/src/sama5/sama5d4x_memorymap.c
@@ -41,7 +41,7 @@
 
 #include "mmu.h"
 
-#include "chip/sam_memorymap.h"
+#include "hardware/sam_memorymap.h"
 #include "sam_lcd.h"
 #include "sam_memorymap.h"
 
diff --git a/arch/arm/src/sama5/sama5d4x_periphclks.h b/arch/arm/src/sama5/sama5d4x_periphclks.h
index c4e14eda63..52386de68c 100644
--- a/arch/arm/src/sama5/sama5d4x_periphclks.h
+++ b/arch/arm/src/sama5/sama5d4x_periphclks.h
@@ -43,7 +43,7 @@
 #include <nuttx/config.h>
 #include <stdint.h>
 #include <arch/irq.h>
-#include "chip/sam_pmc.h"
+#include "hardware/sam_pmc.h"
 
 /************************************************************************************
  * Pre-processor Definitions
diff --git a/configs/sam3u-ek/src/sam3u-ek.h b/configs/sam3u-ek/src/sam3u-ek.h
index 87119e417d..1c3e0f971d 100644
--- a/configs/sam3u-ek/src/sam3u-ek.h
+++ b/configs/sam3u-ek/src/sam3u-ek.h
@@ -48,7 +48,7 @@
 #include <arch/irq.h>
 #include <nuttx/irq.h>
 
-#include "chip/sam_pinmap.h"
+#include "hardware/sam_pinmap.h"
 
 /************************************************************************************
  * Pre-processor Definitions
diff --git a/configs/sam3u-ek/src/sam_lcd.c b/configs/sam3u-ek/src/sam_lcd.c
index 25aa1822ae..d08df5dd3f 100644
--- a/configs/sam3u-ek/src/sam_lcd.c
+++ b/configs/sam3u-ek/src/sam_lcd.c
@@ -126,8 +126,8 @@
 
 #include "up_arch.h"
 #include "sam_gpio.h"
-#include "chip/sam_pmc.h"
-#include "chip/sam_smc.h"
+#include "hardware/sam_pmc.h"
+#include "hardware/sam_smc.h"
 #include "sam3u-ek.h"
 
 /**************************************************************************************
diff --git a/configs/sam4s-xplained-pro/src/sam4s-xplained-pro.h b/configs/sam4s-xplained-pro/src/sam4s-xplained-pro.h
index e6baf02f1d..9529a60157 100644
--- a/configs/sam4s-xplained-pro/src/sam4s-xplained-pro.h
+++ b/configs/sam4s-xplained-pro/src/sam4s-xplained-pro.h
@@ -49,7 +49,7 @@
 #include <arch/irq.h>
 #include <nuttx/irq.h>
 
-#include "chip/sam_pinmap.h"
+#include "hardware/sam_pinmap.h"
 
 /************************************************************************************
  * Pre-processor Definitions
diff --git a/configs/sama5d2-xult/src/sama5d2-xult.h b/configs/sama5d2-xult/src/sama5d2-xult.h
index 59875ae36b..3f23eaf96b 100644
--- a/configs/sama5d2-xult/src/sama5d2-xult.h
+++ b/configs/sama5d2-xult/src/sama5d2-xult.h
@@ -49,7 +49,7 @@
 #include <arch/irq.h>
 #include <nuttx/irq.h>
 
-#include "chip/sam_pinmap.h"
+#include "hardware/sam_pinmap.h"
 
 /************************************************************************************
  * Pre-processor Definitions
diff --git a/configs/sama5d3-xplained/src/sam_ajoystick.c b/configs/sama5d3-xplained/src/sam_ajoystick.c
index f5347ae819..f49a9be124 100644
--- a/configs/sama5d3-xplained/src/sam_ajoystick.c
+++ b/configs/sama5d3-xplained/src/sam_ajoystick.c
@@ -51,7 +51,7 @@
 
 #include "sam_pio.h"
 #include "sam_adc.h"
-#include "chip/sam_adc.h"
+#include "hardware/sam_adc.h"
 #include "sama5d3-xplained.h"
 
 /****************************************************************************
diff --git a/configs/sama5d3-xplained/src/sam_nandflash.c b/configs/sama5d3-xplained/src/sam_nandflash.c
index f53fa352d9..7e9a1619db 100644
--- a/configs/sama5d3-xplained/src/sam_nandflash.c
+++ b/configs/sama5d3-xplained/src/sam_nandflash.c
@@ -59,8 +59,8 @@
 #include "sam_periphclks.h"
 #include "sam_pio.h"
 #include "sam_nand.h"
-#include "chip/sam_hsmc.h"
-#include "chip/sam_pinmap.h"
+#include "hardware/sam_hsmc.h"
+#include "hardware/sam_pinmap.h"
 
 #include "sama5d3-xplained.h"
 
diff --git a/configs/sama5d3-xplained/src/sam_sdram.c b/configs/sama5d3-xplained/src/sam_sdram.c
index abd75d6664..2768332d8f 100644
--- a/configs/sama5d3-xplained/src/sam_sdram.c
+++ b/configs/sama5d3-xplained/src/sam_sdram.c
@@ -51,10 +51,10 @@
 #include "up_arch.h"
 
 #include "sam_periphclks.h"
-#include "chip/sam_memorymap.h"
-#include "chip/sam_pmc.h"
-#include "chip/sam_sfr.h"
-#include "chip/sam_mpddrc.h"
+#include "hardware/sam_memorymap.h"
+#include "hardware/sam_pmc.h"
+#include "hardware/sam_sfr.h"
+#include "hardware/sam_mpddrc.h"
 
 #include "sama5d3-xplained.h"
 
diff --git a/configs/sama5d3-xplained/src/sam_usb.c b/configs/sama5d3-xplained/src/sam_usb.c
index 8abe5f5493..d6534cd64b 100644
--- a/configs/sama5d3-xplained/src/sam_usb.c
+++ b/configs/sama5d3-xplained/src/sam_usb.c
@@ -56,7 +56,7 @@
 #include "up_arch.h"
 #include "sam_pio.h"
 #include "sam_usbhost.h"
-#include "chip/sam_ohci.h"
+#include "hardware/sam_ohci.h"
 #include "sama5d3-xplained.h"
 
 #if defined(CONFIG_SAMA5_UHPHS) || defined(CONFIG_SAMA5_UDPHS)
diff --git a/configs/sama5d3-xplained/src/sama5d3-xplained.h b/configs/sama5d3-xplained/src/sama5d3-xplained.h
index 40de794377..fae72db6a0 100644
--- a/configs/sama5d3-xplained/src/sama5d3-xplained.h
+++ b/configs/sama5d3-xplained/src/sama5d3-xplained.h
@@ -48,7 +48,7 @@
 #include <arch/irq.h>
 #include <nuttx/irq.h>
 
-#include "chip/sam_pinmap.h"
+#include "hardware/sam_pinmap.h"
 
 /************************************************************************************
  * Pre-processor Definitions
diff --git a/configs/sama5d3x-ek/src/nor_main.c b/configs/sama5d3x-ek/src/nor_main.c
index 14c86e787e..609bae0071 100644
--- a/configs/sama5d3x-ek/src/nor_main.c
+++ b/configs/sama5d3x-ek/src/nor_main.c
@@ -50,9 +50,9 @@
 #include "cp15_cacheops.h"
 
 #include "sam_periphclks.h"
-#include "chip/sam_hsmc.h"
-#include "chip/sam_matrix.h"
-#include "chip/sam_aximx.h"
+#include "hardware/sam_hsmc.h"
+#include "hardware/sam_matrix.h"
+#include "hardware/sam_aximx.h"
 
 #include "sama5d3x-ek.h"
 
diff --git a/configs/sama5d3x-ek/src/sam_nandflash.c b/configs/sama5d3x-ek/src/sam_nandflash.c
index e212a7f274..8dc559d834 100644
--- a/configs/sama5d3x-ek/src/sam_nandflash.c
+++ b/configs/sama5d3x-ek/src/sam_nandflash.c
@@ -59,8 +59,8 @@
 #include "sam_periphclks.h"
 #include "sam_pio.h"
 #include "sam_nand.h"
-#include "chip/sam_hsmc.h"
-#include "chip/sam_pinmap.h"
+#include "hardware/sam_hsmc.h"
+#include "hardware/sam_pinmap.h"
 
 #include "sama5d3x-ek.h"
 
diff --git a/configs/sama5d3x-ek/src/sam_norflash.c b/configs/sama5d3x-ek/src/sam_norflash.c
index 1b4ff0c3fb..13412d068f 100644
--- a/configs/sama5d3x-ek/src/sam_norflash.c
+++ b/configs/sama5d3x-ek/src/sam_norflash.c
@@ -50,7 +50,7 @@
 
 #include "up_arch.h"
 #include "sam_periphclks.h"
-#include "chip/sam_hsmc.h"
+#include "hardware/sam_hsmc.h"
 
 #include "sama5d3x-ek.h"
 
diff --git a/configs/sama5d3x-ek/src/sam_ov2640.c b/configs/sama5d3x-ek/src/sam_ov2640.c
index dfaf2dbfc1..71b2700c62 100644
--- a/configs/sama5d3x-ek/src/sam_ov2640.c
+++ b/configs/sama5d3x-ek/src/sam_ov2640.c
@@ -53,7 +53,7 @@
 #include "sam_pck.h"
 #include "sam_twi.h"
 #include "sam_pio.h"
-#include "chip/sam_pinmap.h"
+#include "hardware/sam_pinmap.h"
 
 #include "sama5d3x-ek.h"
 
diff --git a/configs/sama5d3x-ek/src/sam_sdram.c b/configs/sama5d3x-ek/src/sam_sdram.c
index 184c5cbda4..f0c9d62ad8 100644
--- a/configs/sama5d3x-ek/src/sam_sdram.c
+++ b/configs/sama5d3x-ek/src/sam_sdram.c
@@ -51,10 +51,10 @@
 #include "up_arch.h"
 
 #include "sam_periphclks.h"
-#include "chip/sam_memorymap.h"
-#include "chip/sam_pmc.h"
-#include "chip/sam_sfr.h"
-#include "chip/sam_mpddrc.h"
+#include "hardware/sam_memorymap.h"
+#include "hardware/sam_pmc.h"
+#include "hardware/sam_sfr.h"
+#include "hardware/sam_mpddrc.h"
 
 #include "sama5d3x-ek.h"
 
diff --git a/configs/sama5d3x-ek/src/sam_usb.c b/configs/sama5d3x-ek/src/sam_usb.c
index 614b6c31e2..91d12b0ecb 100644
--- a/configs/sama5d3x-ek/src/sam_usb.c
+++ b/configs/sama5d3x-ek/src/sam_usb.c
@@ -56,7 +56,7 @@
 #include "up_arch.h"
 #include "sam_pio.h"
 #include "sam_usbhost.h"
-#include "chip/sam_ohci.h"
+#include "hardware/sam_ohci.h"
 #include "sama5d3x-ek.h"
 
 #if defined(CONFIG_SAMA5_UHPHS) || defined(CONFIG_SAMA5_UDPHS)
diff --git a/configs/sama5d3x-ek/src/sama5d3x-ek.h b/configs/sama5d3x-ek/src/sama5d3x-ek.h
index c6dd625998..f475580340 100644
--- a/configs/sama5d3x-ek/src/sama5d3x-ek.h
+++ b/configs/sama5d3x-ek/src/sama5d3x-ek.h
@@ -48,7 +48,7 @@
 #include <arch/irq.h>
 #include <nuttx/irq.h>
 
-#include "chip/sam_pinmap.h"
+#include "hardware/sam_pinmap.h"
 
 /************************************************************************************
  * Pre-processor Definitions
diff --git a/configs/sama5d4-ek/src/sam_nandflash.c b/configs/sama5d4-ek/src/sam_nandflash.c
index 467ac8b106..81a7ff8601 100644
--- a/configs/sama5d4-ek/src/sam_nandflash.c
+++ b/configs/sama5d4-ek/src/sam_nandflash.c
@@ -59,8 +59,8 @@
 #include "sam_periphclks.h"
 #include "sam_pio.h"
 #include "sam_nand.h"
-#include "chip/sam_hsmc.h"
-#include "chip/sam_pinmap.h"
+#include "hardware/sam_hsmc.h"
+#include "hardware/sam_pinmap.h"
 
 #include "sama5d4-ek.h"
 
diff --git a/configs/sama5d4-ek/src/sam_sdram.c b/configs/sama5d4-ek/src/sam_sdram.c
index a868d67091..c199e8ddab 100644
--- a/configs/sama5d4-ek/src/sam_sdram.c
+++ b/configs/sama5d4-ek/src/sam_sdram.c
@@ -147,11 +147,11 @@
 #include "up_arch.h"
 
 #include "sam_periphclks.h"
-#include "chip/sam_memorymap.h"
-#include "chip/sam_pmc.h"
-#include "chip/sam_sfr.h"
-#include "chip/sam_matrix.h"
-#include "chip/sam_mpddrc.h"
+#include "hardware/sam_memorymap.h"
+#include "hardware/sam_pmc.h"
+#include "hardware/sam_sfr.h"
+#include "hardware/sam_matrix.h"
+#include "hardware/sam_mpddrc.h"
 
 #include "sama5d4-ek.h"
 
diff --git a/configs/sama5d4-ek/src/sam_usb.c b/configs/sama5d4-ek/src/sam_usb.c
index 081197a7fa..51f69fb030 100644
--- a/configs/sama5d4-ek/src/sam_usb.c
+++ b/configs/sama5d4-ek/src/sam_usb.c
@@ -56,7 +56,7 @@
 #include "up_arch.h"
 #include "sam_pio.h"
 #include "sam_usbhost.h"
-#include "chip/sam_ohci.h"
+#include "hardware/sam_ohci.h"
 #include "sama5d4-ek.h"
 
 #if defined(CONFIG_SAMA5_UHPHS) || defined(CONFIG_SAMA5_UDPHS)
diff --git a/configs/sama5d4-ek/src/sama5d4-ek.h b/configs/sama5d4-ek/src/sama5d4-ek.h
index 848a7d5caf..9a3710d9e8 100644
--- a/configs/sama5d4-ek/src/sama5d4-ek.h
+++ b/configs/sama5d4-ek/src/sama5d4-ek.h
@@ -49,7 +49,7 @@
 #include <arch/irq.h>
 #include <nuttx/irq.h>
 
-#include "chip/sam_pinmap.h"
+#include "hardware/sam_pinmap.h"
 
 /************************************************************************************
  * Pre-processor Definitions